公开(公告)号：US20150243830A1

公开(公告)日：2015-08-27

申请号：US14423169

申请日：2013-08-29

申请人： Solar Frontier K.K.

发明人： Masashi Kondou ,  Manabu Tanaka

IPC分类号： H01L31/18 ,  H01L31/0224 ,  H01L31/068

CPC分类号： H01L31/18 ,  H01L31/022441 ,  H01L31/022466 ,  H01L31/04 ,  H01L31/0463 ,  H01L31/0465 ,  H01L31/068 ,  H01L31/1884 ,  Y02E10/50 ,  Y02P70/521

摘要： A method of manufacturing a thin-film solar cell includes a first electrode forming step of forming a first electrode on a substrate; a first partition groove forming step of forming a first partition groove for dividing the first electrode and exposing a surface of the substrate in the first partition groove; a semiconductor layer forming step of forming a semiconductor layer on the first electrode and in the first partition groove; a second partition groove forming step of forming a second partition groove for dividing the semiconductor layer and exposing a surface of the first electrode in the second partition groove; a second electrode forming step of forming a second electrode on the semiconductor layer and in the second partition groove; and a third partition groove forming step of forming a third partition groove for dividing the second electrode and the semiconductor layer and exposing the surface of the first electrode in the third partition groove. At least one of the first partition groove forming step, the second partition groove forming step, and the third partition groove forming step includes an opening forming step of forming an opening in a partition groove forming layer where a partition groove is to be formed, by removing beforehand a part of the partition groove forming layer corresponding to a starting point from which the partition groove is formed, and thereby exposing a surface of a lower layer below the partition groove forming layer in the opening, and a partition groove forming step of bringing a needle into contact with the surface of the lower layer exposed in the opening and forming the partition groove by moving the needle in a predetermined direction.

摘要翻译： 一种制造薄膜太阳能电池的方法包括：在基板上形成第一电极的第一电极形成步骤; 第一分隔槽形成步骤，形成用于分割第一电极并暴露第一分隔槽中的基板的表面的第一分隔槽; 在第一电极和第一分隔槽中形成半导体层的半导体层形成步骤; 第二分隔槽形成步骤，形成用于分割半导体层并暴露第二分隔槽中的第一电极的表面的第二分隔槽; 第二电极形成步骤，在所述半导体层和所述第二分隔槽中形成第二电极; 以及第三分隔槽形成步骤，形成用于分割第二电极和半导体层并暴露第三分隔槽中的第一电极的表面的第三分隔槽。 第一分隔槽形成工序，第二分隔槽形成工序和第三分隔槽形成工序中的至少一个包括开口形成步骤，在形成有分隔槽的分隔槽形成层中形成开口的开口形成工序， 预先分离与形成有分隔槽的起始点对应的分隔槽形成层的一部分，从而将开口部中的分隔槽形成层的下层的表面露出，并且将分隔槽形成工序， 针与暴露在开口中的下层的表面接触并且通过沿预定方向移动针来形成分隔槽。

公开(公告)号：US09735307B2

公开(公告)日：2017-08-15

申请号：US14423169

申请日：2013-08-29

申请人： Solar Frontier K.K.

发明人： Masashi Kondou ,  Manabu Tanaka

IPC分类号： H01L21/00 ,  H01L31/18 ,  H01L31/0465 ,  H01L31/04 ,  H01L31/0463 ,  H01L31/0224 ,  H01L31/068

CPC分类号： H01L31/18 ,  H01L31/022441 ,  H01L31/022466 ,  H01L31/04 ,  H01L31/0463 ,  H01L31/0465 ,  H01L31/068 ,  H01L31/1884 ,  Y02E10/50 ,  Y02P70/521

摘要： A method of manufacturing a thin-film solar cell includes forming a first electrode on a substrate; forming a first petition groove for dividing the first electrode; forming a semiconductor layer on the first electrode and in the first partition groove; forming a second partition groove for dividing the semiconductor layer; forming a second electrode on the semiconductor layer and in the second partition groove; and forming a third partition groove for dividing the second electrode and the semiconductor layer. At least one of the steps of forming the first partition groove, the second partition groove, and the third partition groove includes forming an opening in a partition groove forming layer to expose a lower layer surface below the partition groove forming layer, bringing a needle into contact with the lower layer surface, and forming the partition groove by moving the needle in a predetermined direction.

公开(公告)号：US09634157B2

公开(公告)日：2017-04-25

申请号：US14359616

申请日：2012-11-22

申请人： Solar Frontier K.K.

发明人： Hiroki Sugimoto ,  Keisuke Ishikawa ,  Masashi Kondou

IPC分类号： H01L31/0224 ,  H01L27/142 ,  H01L31/18 ,  H01L31/0392 ,  H01L31/0463

CPC分类号： H01L31/022425 ,  H01L31/03923 ,  H01L31/0463 ,  H01L31/18 ,  Y02E10/541 ,  Y02P70/521

摘要： A method for manufacturing a thin-film solar cell module includes a rear surface electrode layer deposition step for depositing a rear surface electrode layer on a substrate, an alkali metal adding step for adding an alkali metal to the rear surface electrode layer, a light absorbing layer deposition step for depositing a light absorbing layer on the rear surface electrode layer, a division groove forming step for forming a division groove that divides the light absorbing layer and exposing a front surface of the rear surface electrode layer in the division groove, an alloying step for alloying the rear surface electrode layer and the alkali metal on the front surface of the rear surface electrode layer exposed in the division groove, and a transparent conductive film deposition step for depositing a transparent conductive film on the light absorbing layer and in the division groove.