公开(公告)号：US09664628B2

公开(公告)日：2017-05-30

申请号：US13302895

申请日：2011-11-22

申请人： Soo-Young Cho ,  Bong-Ha Hwang ,  Min-Young Kim

发明人： Soo-Young Cho ,  Bong-Ha Hwang ,  Min-Young Kim

IPC分类号： G01N21/956

CPC分类号： G01N21/95684 ,  G01N21/956 ,  G01N2021/95638

摘要： In order to inspect a board, a measurement area is set on a board, and reference data and measurement data of the measurement area are acquired. Then, a conversion condition is established for the measurement area, and a conversion relation is acquired according to a distortion degree between reference data and measurement data. Thereafter, validity of the conversion relation is verified by using at least one of verifying that a comparison feature object satisfies the conversion relation, verifying that a verification feature object selected from feature objects satisfies the conversion relation and verifying that a pad formed on the board satisfies the conversion relation. Then, the conversion condition is confirmed, and an inspection area for inspecting a measurement target is set according to the confirmed conversion condition. Thus, an inspection area may be correctly set so that distortion is compensated for.

公开(公告)号：US20120130666A1

公开(公告)日：2012-05-24

申请号：US13302895

申请日：2011-11-22

申请人： Soo-Young Cho ,  Bong-Ha Hwang ,  Min-Young Kim

发明人： Soo-Young Cho ,  Bong-Ha Hwang ,  Min-Young Kim

IPC分类号： G06F19/00

CPC分类号： G01N21/95684 ,  G01N21/956 ,  G01N2021/95638

摘要： In order to inspect a board, a measurement area is set on a board, and reference data and measurement data of the measurement area are acquired. Then, a conversion condition is established for the measurement area, and a conversion relation is acquired according to a distortion degree between reference data and measurement data. Thereafter, validity of the conversion relation is verified by using at least one of verifying that a comparison feature object satisfies the conversion relation, verifying that a verification feature object selected from feature objects satisfies the conversion relation and verifying that a pad formed on the board satisfies the conversion relation. Then, the conversion condition is confirmed, and an inspection area for inspecting a measurement target is set according to the confirmed conversion condition. Thus, an inspection area may be correctly set so that distortion is compensated for.

摘要翻译： 为了检查电路板，在电路板上设置测量区域，并且获取测量区域的参考数据和测量数据。 然后，对于测量区域建立转换条件，并且根据参考数据和测量数据之间的失真度获取转换关系。 此后，通过使用验证比较特征对象满足转换关系中的至少一个来验证转换关系的有效性，验证从特征对象中选择的验证特征对象是否满足转换关系，并且验证板上形成的垫满足 转换关系。 然后，确认转换条件，根据确认的转换条件设定检查对象的检查区域。 因此，可以正确地设置检查区域，从而补偿失真。

公开(公告)号：US09885669B2

公开(公告)日：2018-02-06

申请号：US13977499

申请日：2011-12-29

申请人： Soo-Young Cho ,  Hee-Wook You ,  Bong-Ha Hwang ,  Hee-Tae Kim

发明人： Soo-Young Cho ,  Hee-Wook You ,  Bong-Ha Hwang ,  Hee-Tae Kim

IPC分类号： G01B11/25 ,  G01B11/06 ,  G01N21/95 ,  H05K13/08

CPC分类号： G01N21/9501 ,  G01B11/0608 ,  G01B11/25 ,  H05K13/08

摘要： A method of inspecting a substrate is disclosed. The method is performed by a substrate-inspecting apparatus having at least one projecting module projecting a patterned light onto a substrate fixed on a stage and an inspecting module with a camera capturing an image, and inspecting a plurality of inspection regions of the substrate step by step. The method comprises, setting an inspection order of the inspecting regions according to a lengthwise direction of the substrate, estimating height displacement of a target inspection region by using a tendency information regarding at least one previous inspection region that is already inspected, adjusting height of the inspecting module by using the estimated height displacement of the target inspection region, and inspecting the target inspection region by using the inspecting module of which height is adjusted. Therefore, inspection time is reduced.

公开(公告)号：US20140009601A1

公开(公告)日：2014-01-09

申请号：US13977499

申请日：2011-12-29

申请人： Soo-Young Cho ,  Hee-Wook You ,  Bong-Ha Hwang ,  Hee-Tae Kim

发明人： Soo-Young Cho ,  Hee-Wook You ,  Bong-Ha Hwang ,  Hee-Tae Kim

IPC分类号： G01N21/95

CPC分类号： G01N21/9501 ,  G01B11/0608 ,  G01B11/25 ,  H05K13/08

摘要： A method of inspecting a substrate is disclosed. The method is performed by a substrate-inspecting apparatus having at least one projecting module projecting a patterned light onto a substrate fixed on a stage and an inspecting module with a camera capturing an image, and inspecting a plurality of inspection regions of the substrate step by step. The method comprises, setting an inspection order of the inspecting regions according to a lengthwise direction of the substrate, estimating height displacement of a target inspection region by using a tendency information regarding at least one previous inspection region that is already inspected, adjusting height of the inspecting module by using the estimated height displacement of the target inspection region, and inspecting the target inspection region by using the inspecting module of which height is adjusted. Therefore, inspection time is reduced.

摘要翻译： 公开了一种检查基板的方法。 该方法由具有至少一个投影模块的基板检查装置执行，所述至少一个投影模块将图案化的光投影到固定在平台上的基板上，以及具有拍摄图像的相机的检查模块，并且通过以下步骤检查基板步骤的多个检查区域： 步。 该方法包括：根据基板的长度方向设定检查区域的检查顺序，通过使用关于已经检查的至少一个以前检查区域的倾向信息来估计目标检查区域的高度位移，调整高度 通过使用目标检查区域的估计高度位移来检查模块，并且使用调整了哪个高度的检查模块来检查目标检查区域。 因此，检查时间缩短。

公开(公告)号：US10706521B2

公开(公告)日：2020-07-07

申请号：US14232480

申请日：2012-07-13

申请人： Soo-Young Cho

发明人： Soo-Young Cho

IPC分类号： G01B9/00 ,  G01B11/00 ,  G06T7/00 ,  G01N21/956 ,  H04N5/225

摘要： To inspect a board, first, a measurement area is set on the board and a reference data of the measurement area is obtained. Then, a measurement data of the measurement area is obtained per colors, and a lighting condition is set using the reference data of the measurement area and the measurement data obtained per colors. Next, a feature object in the measurement area is set, and a distortion quantity between the reference data and the measurement data is obtained by comparing the reference data corresponding to the feature object and the measurement data corresponding to the feature object obtained under the lighting condition. Then, an inspection area is set by compensating the distortion quantity. Therefore, it is possible to compensate the distortion and set precisely the inspection area.

公开(公告)号：US20140168419A1

公开(公告)日：2014-06-19

申请号：US14232480

申请日：2012-07-13

申请人： Soo-Young Cho

发明人： Soo-Young Cho

IPC分类号： G06T7/00 ,  H04N5/225

摘要： To inspect a board, first, a measurement area is set on the board and a reference data of the measurement area is obtained. Then, a measurement data of the measurement area is obtained per colors, and a lighting condition is set using the reference data of the measurement area and the measurement data obtained per colors. Next, a feature object in the measurement area is set, and a distortion quantity between the reference data and the measurement data is obtained by comparing the reference data corresponding to the feature object and the measurement data corresponding to the feature object obtained under the lighting condition. Then, an inspection area is set by compensating the distortion quantity. Therefore, it is possible to compensate the distortion and set precisely the inspection area.

摘要翻译： 为了检查电路板，首先在电路板上设置测量区域，并获得测量区域的参考数据。 然后，根据颜色获得测量区域的测量数据，并且使用测量区域的参考数据和每种颜色获得的测量数据来设置点亮条件。 接下来，设置测量区域中的特征对象，并且通过比较与特征对象相对应的参考数据和与在照明条件下获得的特征对象相对应的测量数据来获得参考数据和测量数据之间的失真量 。 然后，通过补偿失真量来设定检查区域。 因此，可以补偿失真并精确地设定检查区域。