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公开(公告)号：US09664628B2
公开(公告)日：2017-05-30
申请号：US13302895
申请日：2011-11-22
申请人： Soo-Young Cho , Bong-Ha Hwang , Min-Young Kim
发明人： Soo-Young Cho , Bong-Ha Hwang , Min-Young Kim
IPC分类号： G01N21/956
CPC分类号： G01N21/95684 , G01N21/956 , G01N2021/95638
摘要： In order to inspect a board, a measurement area is set on a board, and reference data and measurement data of the measurement area are acquired. Then, a conversion condition is established for the measurement area, and a conversion relation is acquired according to a distortion degree between reference data and measurement data. Thereafter, validity of the conversion relation is verified by using at least one of verifying that a comparison feature object satisfies the conversion relation, verifying that a verification feature object selected from feature objects satisfies the conversion relation and verifying that a pad formed on the board satisfies the conversion relation. Then, the conversion condition is confirmed, and an inspection area for inspecting a measurement target is set according to the confirmed conversion condition. Thus, an inspection area may be correctly set so that distortion is compensated for.
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公开(公告)号：US20120130666A1
公开(公告)日：2012-05-24
申请号：US13302895
申请日：2011-11-22
申请人： Soo-Young Cho , Bong-Ha Hwang , Min-Young Kim
发明人： Soo-Young Cho , Bong-Ha Hwang , Min-Young Kim
IPC分类号： G06F19/00
CPC分类号： G01N21/95684 , G01N21/956 , G01N2021/95638
摘要： In order to inspect a board, a measurement area is set on a board, and reference data and measurement data of the measurement area are acquired. Then, a conversion condition is established for the measurement area, and a conversion relation is acquired according to a distortion degree between reference data and measurement data. Thereafter, validity of the conversion relation is verified by using at least one of verifying that a comparison feature object satisfies the conversion relation, verifying that a verification feature object selected from feature objects satisfies the conversion relation and verifying that a pad formed on the board satisfies the conversion relation. Then, the conversion condition is confirmed, and an inspection area for inspecting a measurement target is set according to the confirmed conversion condition. Thus, an inspection area may be correctly set so that distortion is compensated for.
摘要翻译： 为了检查电路板，在电路板上设置测量区域，并且获取测量区域的参考数据和测量数据。 然后，对于测量区域建立转换条件，并且根据参考数据和测量数据之间的失真度获取转换关系。 此后，通过使用验证比较特征对象满足转换关系中的至少一个来验证转换关系的有效性，验证从特征对象中选择的验证特征对象是否满足转换关系，并且验证板上形成的垫满足 转换关系。 然后，确认转换条件，根据确认的转换条件设定检查对象的检查区域。 因此，可以正确地设置检查区域，从而补偿失真。
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公开(公告)号：US09885669B2
公开(公告)日：2018-02-06
申请号：US13977499
申请日：2011-12-29
申请人： Soo-Young Cho , Hee-Wook You , Bong-Ha Hwang , Hee-Tae Kim
发明人： Soo-Young Cho , Hee-Wook You , Bong-Ha Hwang , Hee-Tae Kim
CPC分类号： G01N21/9501 , G01B11/0608 , G01B11/25 , H05K13/08
摘要： A method of inspecting a substrate is disclosed. The method is performed by a substrate-inspecting apparatus having at least one projecting module projecting a patterned light onto a substrate fixed on a stage and an inspecting module with a camera capturing an image, and inspecting a plurality of inspection regions of the substrate step by step. The method comprises, setting an inspection order of the inspecting regions according to a lengthwise direction of the substrate, estimating height displacement of a target inspection region by using a tendency information regarding at least one previous inspection region that is already inspected, adjusting height of the inspecting module by using the estimated height displacement of the target inspection region, and inspecting the target inspection region by using the inspecting module of which height is adjusted. Therefore, inspection time is reduced.
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公开(公告)号：US20140009601A1
公开(公告)日：2014-01-09
申请号：US13977499
申请日：2011-12-29
申请人： Soo-Young Cho , Hee-Wook You , Bong-Ha Hwang , Hee-Tae Kim
发明人： Soo-Young Cho , Hee-Wook You , Bong-Ha Hwang , Hee-Tae Kim
IPC分类号： G01N21/95
CPC分类号： G01N21/9501 , G01B11/0608 , G01B11/25 , H05K13/08
摘要： A method of inspecting a substrate is disclosed. The method is performed by a substrate-inspecting apparatus having at least one projecting module projecting a patterned light onto a substrate fixed on a stage and an inspecting module with a camera capturing an image, and inspecting a plurality of inspection regions of the substrate step by step. The method comprises, setting an inspection order of the inspecting regions according to a lengthwise direction of the substrate, estimating height displacement of a target inspection region by using a tendency information regarding at least one previous inspection region that is already inspected, adjusting height of the inspecting module by using the estimated height displacement of the target inspection region, and inspecting the target inspection region by using the inspecting module of which height is adjusted. Therefore, inspection time is reduced.
摘要翻译： 公开了一种检查基板的方法。 该方法由具有至少一个投影模块的基板检查装置执行，所述至少一个投影模块将图案化的光投影到固定在平台上的基板上，以及具有拍摄图像的相机的检查模块，并且通过以下步骤检查基板步骤的多个检查区域： 步。 该方法包括：根据基板的长度方向设定检查区域的检查顺序，通过使用关于已经检查的至少一个以前检查区域的倾向信息来估计目标检查区域的高度位移，调整高度 通过使用目标检查区域的估计高度位移来检查模块，并且使用调整了哪个高度的检查模块来检查目标检查区域。 因此，检查时间缩短。
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公开(公告)号：US08437533B2
公开(公告)日：2013-05-07
申请号：US12575768
申请日：2009-10-08
申请人： Min-Young Kim , Bong-Ha Hwang
发明人： Min-Young Kim , Bong-Ha Hwang
CPC分类号： G06K9/00 , G01B11/2513 , G01B11/254 , G01B11/28 , G01N21/95607 , G06T7/001 , G06T7/33 , G06T7/60 , G06T2207/10028 , G06T2207/30141 , H05K1/0269
摘要： In order to measure a three-dimensional shape, feature information is read from a database. A board is transferred to a measurement position. A measurement head is transferred to an inspection area of the board. Light of a first lighting device for three-dimensional measurement and light of a second lighting device for two-dimensional measurement is illuminated onto the inspection area to photograph a first reflection image and a second reflection image that are reflected from the inspection area. The inspection area is realigned by comparing the feature information with at least one of the photographed first and second reflection images to inspect distortion of the inspection area. The realigned inspection area is inspected. Thus, the three-dimensional shape may be precisely measured.
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公开(公告)号：US09092843B2
公开(公告)日：2015-07-28
申请号：US13299977
申请日：2011-11-18
申请人： Bong-Ha Hwang
发明人： Bong-Ha Hwang
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G06T2207/30141
摘要： In order to inspect a board, firstly, a measurement area is set on a board, and reference data and measurement data of the measurement area are acquired. Then, a plurality of feature blocks is established by a block unit so as to include a predetermined shape in the measurement area, and a merged block is established by merging feature blocks overlapped in the feature blocks. Thereafter, a distortion degree is acquired by comparing reference data and measurement data corresponding to a feature block except for the merged block and/or the merged block, and the distortion degree is compensated for, to set an inspection area in the target measurement area. Thus, an inspection area, in which distortion is compensated for, may be correctly set.
摘要翻译： 为了检查电路板，首先在电路板上设置测量区域，并且获取测量区域的参考数据和测量数据。 然后，通过块单元建立多个特征块，以便在测量区域中包括预定的形状，并且通过合并在特征块中重叠的特征块来建立合并块。 此后，通过比较与合并块和/或合并块以外的特征块相对应的参考数据和测量数据来获得失真度，并且对失真度进行补偿，以设置目标测量区域中的检查区域。 因此，可以正确地设置补偿失真的检查区域。
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公开(公告)号：US09091725B2
公开(公告)日：2015-07-28
申请号：US12829996
申请日：2010-07-02
申请人： Joong-Ki Jeong , Yu-Jin Lee , Seung-Jun Lee , Bong-Ha Hwang
发明人： Joong-Ki Jeong , Yu-Jin Lee , Seung-Jun Lee , Bong-Ha Hwang
CPC分类号： G01R31/309 , G01B11/2531 , G06T7/521
摘要： An inspection method includes photographing a measurement target to acquire image data for each pixel of the measurement target, acquiring height data for each pixel of the measurement target, acquiring visibility data for each pixel of the measurement target, multiplying the acquired image data by at least one of the height data and the visibility data for each pixel to produce a result value, and setting a terminal area by using the produced result value. Thus, the terminal area may be accurately determined.
摘要翻译： 检查方法包括拍摄测量对象以获取测量对象的每个像素的图像数据，获取测量对象的每个像素的高度数据，获取测量对象的每个像素的可见度数据，至少将所获取的图像数据乘以 为每个像素生成结果值的高度数据和可见度数据之一，以及通过使用所产生的结果值来设置终端区域。 因此，终端区域可以被准确地确定。
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公开(公告)号：US08949060B2
公开(公告)日：2015-02-03
申请号：US13295757
申请日：2011-11-14
申请人： Bong-Ha Hwang
发明人： Bong-Ha Hwang
IPC分类号： G01N21/88 , G01N21/956 , G06F17/40 , G06F19/00
CPC分类号： G01B11/24 , G01N21/8851 , G01N21/956 , G06F17/40 , G06F19/00
摘要： In order to set an inspection area in an inspection apparatus for inspecting a board, a plurality of measurement areas are set on a board, and then reference data and measurement data of at least one adjacent measurement area that is adjacent to a target measurement area for inspecting a measurement target, among the measurement areas, are acquired. Thereafter, at least one feature object is extracted from the adjacent measurement area. Then, a distortion degree is acquired by comparing reference data and measurement data corresponding to the feature object with each other, and thereafter the distortion degree is compensated for, to set an inspection area in the target measurement area. Thus, a conversion relation between the reference data and the measurement data may be correctly acquired, and an inspection area, in which distortion is compensated for, may be correctly set.
摘要翻译： 为了在用于检查电路板的检查装置中设置检查区域，在电路板上设置多个测量区域，然后将与测量区域相邻的至少一个相邻测量区域的参考数据和测量数据设置在目标测量区域 在测量区域中检测测量目标。 此后，从相邻测量区域提取至少一个特征对象。 然后，通过将参考数据和与特征对象相对应的测量数据进行比较来获得失真度，然后对失真程度进行补偿，以设置目标测量区域中的检查区域。 因此，可以正确地获取参考数据和测量数据之间的转换关系，并且可以正确地设置其中补偿失真的检查区域。
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公开(公告)号：US08260030B2
公开(公告)日：2012-09-04
申请号：US12748801
申请日：2010-03-29
申请人： Hee-Tae Kim , Bong-Ha Hwang , Seung-Jun Lee , Kwang-Ill Kho
发明人： Hee-Tae Kim , Bong-Ha Hwang , Seung-Jun Lee , Kwang-Ill Kho
IPC分类号： G06K9/00
CPC分类号： G01N21/956 , G01N21/95607 , G01N2021/95638 , G01N2021/95653 , G01N2021/95661 , G03B15/03 , G06T7/001 , G06T2207/30141
摘要： In order to set an inspection area, a measurement target is disposed onto a stage, a reference data of the measurement target is summoned, and a measurement data of the measurement target is acquired. Then, at least one feature object is selected in the measurement data and the reference data of the measurement target, and at least one feature variable for the selected feature object is extracted from each of the reference data and the measurement data. Thereafter, a change amount of the measurement target is produced by using the feature variable and a quantified conversion formula, and the produced change amount is compensated for to set an inspection area. Thus, the distortion of the measurement target is compensated for to correctly set an inspection area.
摘要翻译： 为了设置检查区域，将测量对象设置在平台上，召集测量对象的参考数据，并获取测量对象的测量数据。 然后，在测量数据和测量目标的参考数据中选择至少一个特征对象，并且从每个参考数据和测量数据中提取所选择的特征对象的至少一个特征变量。 此后，通过使用特征变量和量化转换公式来产生测量目标的变化量，并且对产生的变化量进行补偿以设置检查区域。 因此，补偿测量目标的失真以正确设置检查区域。
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