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公开(公告)号:US11170863B2
公开(公告)日:2021-11-09
申请号:US16921879
申请日:2020-07-06
发明人: Guobiao Zhang , Yida Li , Xiaodong Xiang , Hongyu Yu , Yuejin Guo , Shengming Zhou , Guoxing Zhang , Guangzhao Liu , Mingtao Hu , Wang Zhang , Mei Shen
摘要: The present invention discloses a multi-bit-per-cell three-dimensional resistive random-access memory (3D-RRAMMB). It comprises a plurality of RRAM cells stacked above a semiconductor substrate. Each RRAM cell comprises a RRAM layer, which is switched from a high-resistance state to a low-resistance state during programming. By adjusting the programming current, the programmed RRAMs have different resistances.
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公开(公告)号:US11616030B2
公开(公告)日:2023-03-28
申请号:US17539040
申请日:2021-11-30
发明人: Guobiao Zhang , Hongyu Yu , Shengming Zhou , Yuejin Guo , Kai Chen , Yida Li , Jun Lan
IPC分类号: H01L23/64 , H01L21/48 , H01L21/683 , H01L23/538 , H01L49/02
摘要: A method for making a three-dimensional (3-D) module includes the steps of: A) forming a laminate of alternate ceramic tape layers and internal electrode layers on a substrate; B) etching said laminate to form first and second capacitor stacks at said first and second locations; C) firing said first and second capacitor stacks integrally; D) forming first and second pairs of external electrodes on said first and second capacitor stacks, respectively.
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公开(公告)号:US11217542B2
公开(公告)日:2022-01-04
申请号:US16926606
申请日:2020-07-10
发明人: Guobiao Zhang , Hongyu Yu , Yuejin Guo , Shengming Zhou , Guoxing Zhang , Guangzhao Liu , Mingtao Hu , Wang Zhang
IPC分类号: H01L23/64 , H01L21/48 , H01L21/683 , H01L23/538 , H01L49/02
摘要: A three-dimensional (3-D) module with integrated passive components includes a plurality of vertically stacked sub-modules. Each sub-module comprises a device level comprising a high-k dielectric (e.g. ceramic) material and an interconnect level comprising a low-k dielectric (e.g. organic) material. The passive components in the device level are fired integrally, whereas the device level and the interconnect level are fired independently.
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