公开(公告)号：US20100003789A1

公开(公告)日：2010-01-07

申请号：US12494123

申请日：2009-06-29

申请人： Stephane CAPLET ,  Xavier Baillin ,  Jean-Louis Pornin

发明人： Stephane CAPLET ,  Xavier Baillin ,  Jean-Louis Pornin

IPC分类号： H01L21/56

CPC分类号： B81C1/00285 ,  B81C2203/0136 ,  B81C2203/0145

摘要： A method of encapsulating a microelectronic device arranged on a substrate, comprising at least the following steps: a) formation of a portion of sacrificial material covering at least one part of the microelectronic device, the volume of which occupies a space intended to form at least one part of a cavity in which the device is intended to be encapsulated; b) deposition of a layer based on at least one getter material, covering at least one part of the portion of sacrificial material; c) formation of at least one orifice through at least the layer of getter material, forming an access to the portion of sacrificial material; d) elimination of the portion of sacrificial material via the orifice, forming the cavity in which the microelectronic device is encapsulated; and e) sealing of the cavity.

摘要翻译： 一种封装布置在衬底上的微电子器件的方法，至少包括以下步骤：a）形成覆盖微电子器件的至少一部分的牺牲材料的一部分，其体积占据至少形成的空间 腔体的一部分，其中装置旨在被包封; b）沉积基于至少一种吸气材料的层，覆盖牺牲材料部分的至少一部分; c）通过至少所述吸气材料层形成至少一个孔口，形成对所述牺牲材料部分的通路; d）通过孔口消除部分牺牲材料，形成其中封装有微电子器件的腔体; 和e）密封腔。

公开(公告)号：US20100001361A1

公开(公告)日：2010-01-07

申请号：US12494147

申请日：2009-06-29

申请人： Stephane CAPLET ,  Xavier BAILLIN

发明人： Stephane CAPLET ,  Xavier BAILLIN

IPC分类号： H01L23/00 ,  B32B3/26 ,  B32B3/24 ,  H01L21/465

CPC分类号： B81B7/0038 ,  H01L23/26 ,  H01L2924/0002 ,  Y10T428/24331 ,  Y10T428/24612 ,  H01L2924/00

摘要： Getter structure comprising a substrate and at least one getter material-based layer mechanically connected to the substrate by means of at least one support, in which the surface of the support in contact with the substrate is smaller than the surface of a first face of the getter material layer, in which said first face is in contact with the support, and a second face of the getter material layer, opposite said first face is at least partially exposed.

摘要翻译： 吸气体结构包括基底和至少一个通过至少一个支撑件机械地连接到基底的吸气剂材料层，其中与衬底接触的支撑体的表面小于第一面的表面 吸气剂材料层，其中所述第一面与支撑体接触，吸气剂材料层的与所述第一面相对的第二面至少部分地露出。

公开(公告)号：US20100014036A1

公开(公告)日：2010-01-21

申请号：US12502061

申请日：2009-07-13

申请人： Stephane CAPLET

发明人： Stephane CAPLET

IPC分类号： G02F1/1337 ,  H01L21/64

CPC分类号： G02F1/133377 ,  G02C7/083 ,  G02C2202/18 ,  G02F1/133784

摘要： A process for formation of cavities of a micro-optic device, comprising: a) formation, on the surface plane of a support, of an alignment layer of liquid crystals; and b) formation of walls of said cavities, the base of said cavities being formed by said alignment layer.

摘要翻译： 一种用于形成微光学器件的空腔的方法，包括：a）在支撑体的表面上形成液晶取向层; 以及b）形成所述空腔的壁，所述空腔的底部由所述对准层形成。