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    Integrated magnetic levitation and rotation system
    1.
    发明授权
    Integrated magnetic levitation and rotation system 有权
    集成磁悬浮和旋转系统

    公开(公告)号：US6049148A

    公开(公告)日：2000-04-11

    申请号：US166064

    申请日：1998-10-02

    申请人： Stephen B. Nichols ,  Shankar Jagannathan ,  Kevin Leary ,  David Eisenhaure ,  William Stanton ,  Richard Hockney ,  James Downer ,  Vijay Gondhalekar

    发明人： Stephen B. Nichols ,  Shankar Jagannathan ,  Kevin Leary ,  David Eisenhaure ,  William Stanton ,  Richard Hockney ,  James Downer ,  Vijay Gondhalekar

    IPC分类号： H02K17/08 ,  F16C39/06 ,  H01L21/687 ,  H02K7/09 ,  H02K17/12 ,  H02K17/30 ,  H02K19/10 ,  H02K21/38 ,  H02K11/00

    CPC分类号： H01L21/68792 ,  F16C32/0448 ,  F16C32/047 ,  F16C32/0493 ,  H02K21/44 ,  H02K7/09 ,  H02K17/12

    摘要： A rotary motor and a rotary magnetic bearing are integrated in a compact assembly that is contact-less. A stator assembly surrounds a ferromagnetic rotor with an annular air gap which can accommodate a cylindrical wall, e.g. of a chamber for semiconductor wafer processing. The stator assembly has a permanent magnet or magnets sandwiched between vertically spaced magnetic stator plates with plural pole segments. The rotor is preferably a ring of a magnetic stainless steel with complementary pole teeth. The stator assembly (i) levitates and passively centers the rotor along a vertical axis and against tilt about either horizontal axis, (ii) provides a radial position bias for the rotor, and (iii) establishes a motor flux field at the rotor poles. Polyphase coils wound on the stator plates produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller energizes control coils wound on each stator pole segment in response to a sensed physical position of the rotor. The control coils provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.

    摘要翻译： 旋转电机和旋转磁性轴承集成在一个无接触的紧凑组件中。 定子组件围绕铁磁转子，其具有可容纳圆柱形壁的环形空气间隙，例如， 的半导体晶片处理室。 定子组件具有夹在具有多个极段的垂直间隔的磁性定子板之间的永磁体或磁体。 转子优选为具有互补极齿的磁性不锈钢的环。 定子组件（i）使转子沿垂直轴线悬浮和被动地居中并且绕着水平轴线倾斜，（ii）为转子提供径向位置偏压，（iii）在转子极点处建立电动机磁通场。 缠绕在定子板上的多相线圈产生旋转磁通场，其驱动转子作为同步单极电动机。 无极齿的转子允许使用异步感应驱动器进行操作。 控制器响应于感测到的转子的物理位置而激励缠绕在每个定子极段上的控制线圈。 控制线圈提供主动的径向位置控制，并且可以主动地抑制可能克服被动对中的尖端和倾斜振荡。

    Light reaction mass actuator
    3.
    发明授权
    Light reaction mass actuator 失效
    轻反应质量致动器

    公开(公告)号：US5880542A

    公开(公告)日：1999-03-09

    申请号：US866567

    申请日：1997-05-30

    申请人： Kevin J. Leary ,  Shankar Jagannathan ,  Ralph C. Fenn

    发明人： Kevin J. Leary ,  Shankar Jagannathan ,  Ralph C. Fenn

    IPC分类号： H01L41/12 ,  H02N2/02

    CPC分类号： H01L41/12

    摘要： A very light, high force reaction-mass actuator using high energy density magnetostrictive material to accelerate a mass, producing a reaction force that can be used to oppose vibration forces. The reaction-mass actuator is configured having an axially symmetric design that features a Terfenol-D rod as a core. Surrounding the rod is a magnetic coil which provides the changing magnetizing field used to actively control magnetostrictive strain of the Terfenol rod. The magnetic coil also provides a magnetic flux based on a D.C. current, for biasing the Terfenol rod. The magnetic coil, disposed about the fixed magnetostrictive rod, is incorporated into a reaction mass assembly that is suspended and sealed inside an enclosed, stiff outer shell or housing by an elastomeric material mounting configuration that facilitates an output force with suppressed harmonic content. In addition, the elastomeric mounting configuration provides sealing protection against external factors. In one embodiment, the magnetic coil is wound on a bobbin effecting a movable mass that is accelerated to produce a force on a mounting surface. The Terfenol rod is placed under axially compressive stress by a simple mechanical preloading mechanism. This increases strain in the Terfenol rod while providing a return spring for the reaction mass when it has reached its maximum stroke.

    摘要翻译： 使用高能量密度磁致伸缩材料的非常轻的，强力的反作用 - 质量致动器来加速质量，产生可用于抵抗振动力的反作用力。 反应 - 质量致动器被构造成具有以Terfenol-D棒为核心的轴对称设计。 围绕杆是一个磁性线圈，其提供用于主动控制Terfenol杆的磁致伸缩应变的变化的磁化场。 磁线圈还提供基于直流电流的磁通量，用于偏置Terfenol杆。 设置在固定磁致伸缩杆周围的磁性线圈被并入反应质量组件中，反应物质组件通过弹性体材料安装结构悬挂并密封在封闭的刚性外壳或壳体内，该弹性体材料安装配置有利于具有抑制的谐波含量的输出力。 此外，弹性体安装配置提供了防止外部因素的密封保护。 在一个实施例中，电磁线圈缠绕在线轴上，该线轴影响加速以在安装表面上产生力的可移动质量块。 Terfenol杆通过简单的机械预加载机构置于轴向压应力下。 这增加了Terfenol杆的应变，同时当反应物料达到最大冲程时为其提供了一个复位弹簧。