公开(公告)号：US6049148A

公开(公告)日：2000-04-11

申请号：US166064

申请日：1998-10-02

申请人： Stephen B. Nichols ,  Shankar Jagannathan ,  Kevin Leary ,  David Eisenhaure ,  William Stanton ,  Richard Hockney ,  James Downer ,  Vijay Gondhalekar

发明人： Stephen B. Nichols ,  Shankar Jagannathan ,  Kevin Leary ,  David Eisenhaure ,  William Stanton ,  Richard Hockney ,  James Downer ,  Vijay Gondhalekar

IPC分类号： H02K17/08 ,  F16C39/06 ,  H01L21/687 ,  H02K7/09 ,  H02K17/12 ,  H02K17/30 ,  H02K19/10 ,  H02K21/38 ,  H02K11/00

CPC分类号： H01L21/68792 ,  F16C32/0448 ,  F16C32/047 ,  F16C32/0493 ,  H02K21/44 ,  H02K7/09 ,  H02K17/12

摘要： A rotary motor and a rotary magnetic bearing are integrated in a compact assembly that is contact-less. A stator assembly surrounds a ferromagnetic rotor with an annular air gap which can accommodate a cylindrical wall, e.g. of a chamber for semiconductor wafer processing. The stator assembly has a permanent magnet or magnets sandwiched between vertically spaced magnetic stator plates with plural pole segments. The rotor is preferably a ring of a magnetic stainless steel with complementary pole teeth. The stator assembly (i) levitates and passively centers the rotor along a vertical axis and against tilt about either horizontal axis, (ii) provides a radial position bias for the rotor, and (iii) establishes a motor flux field at the rotor poles. Polyphase coils wound on the stator plates produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller energizes control coils wound on each stator pole segment in response to a sensed physical position of the rotor. The control coils provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.

摘要翻译： 旋转电机和旋转磁性轴承集成在一个无接触的紧凑组件中。 定子组件围绕铁磁转子，其具有可容纳圆柱形壁的环形空气间隙，例如， 的半导体晶片处理室。 定子组件具有夹在具有多个极段的垂直间隔的磁性定子板之间的永磁体或磁体。 转子优选为具有互补极齿的磁性不锈钢的环。 定子组件（i）使转子沿垂直轴线悬浮和被动地居中并且绕着水平轴线倾斜，（ii）为转子提供径向位置偏压，（iii）在转子极点处建立电动机磁通场。 缠绕在定子板上的多相线圈产生旋转磁通场，其驱动转子作为同步单极电动机。 无极齿的转子允许使用异步感应驱动器进行操作。 控制器响应于感测到的转子的物理位置而激励缠绕在每个定子极段上的控制线圈。 控制线圈提供主动的径向位置控制，并且可以主动地抑制可能克服被动对中的尖端和倾斜振荡。

公开(公告)号：US5818137A

公开(公告)日：1998-10-06

申请号：US548692

申请日：1995-10-26

申请人： Stephen B. Nichols ,  Shankar Jagannathan ,  Kevin Leary ,  David Eisenhaure ,  William Stanton ,  Richard Hockney ,  James Downer ,  Vijay Gondhalekar

发明人： Stephen B. Nichols ,  Shankar Jagannathan ,  Kevin Leary ,  David Eisenhaure ,  William Stanton ,  Richard Hockney ,  James Downer ,  Vijay Gondhalekar

IPC分类号： H02K17/08 ,  F16C39/06 ,  H01L21/687 ,  H02K7/09 ,  H02K17/12 ,  H02K17/30 ,  H02K19/10 ,  H02K21/38

CPC分类号： H01L21/68792 ,  F16C32/0448 ,  F16C32/047 ,  F16C32/0493 ,  H02K21/44 ,  H02K7/09 ,  H02K17/12

摘要： A rotary motor and a rotary magnetic bearing are integrated in a compact assembly that is contact-less. A stator assembly surrounds a ferromagnetic rotor with an annular air gap which can accommodate a cylindrical wall, e.g. of a chamber for semiconductor wafer processing. The stator assembly has a permanent magnet or magnets sandwiched between vertically spaced magnetic stator plates with plural pole segments. The rotor is preferably a ring of a magnetic stainless steel with complementary pole teeth. The stator assembly (i) levitates and passively centers the rotor along a vertical axis and against tilt about either horizontal axis, (ii) provides a radial position bias for the rotor, and (iii) establishes a motor flux field at the rotor poles. Polyphase coils wound on the stator plates produce a rotating flux field that drives the rotor as a synchronous homopolar motor. A rotor without pole teeth allows operation with an asynchronous inductive drive. A controller energizes control coils wound on each stator pole segment in response to a sensed physical position of the rotor. The control coils provide active radial position control and can actively damp tip and tilt oscillations that may overcome the passive centering.

公开(公告)号：US06262505B1

公开(公告)日：2001-07-17

申请号：US08824862

申请日：1997-03-26

申请人： Richard L. Hockney ,  Stephen B. Nichols ,  Geoffrey B. Lansberry ,  Francis E. Nimblett ,  Dariusz A. Bushko ,  Gita P. Rao ,  Luka Serdar ,  Michael E. Amaral ,  William E. Stanton ,  James O'Rourke

发明人： Richard L. Hockney ,  Stephen B. Nichols ,  Geoffrey B. Lansberry ,  Francis E. Nimblett ,  Dariusz A. Bushko ,  Gita P. Rao ,  Luka Serdar ,  Michael E. Amaral ,  William E. Stanton ,  James O'Rourke

IPC分类号： H02K709

CPC分类号： F16C32/0442 ,  F16C32/0457 ,  F16C2361/55 ,  F16F15/03 ,  F16F15/315 ,  H02K7/025 ,  H02K7/083 ,  H02K7/09 ,  Y02E60/16 ,  Y10T74/2131

摘要： A power supply device for providing uninterrupted power for a period of time is disclosed. The power supply device has a controller and a flywheel device. The flywheel device has a housing that contains a flywheel rotor and a motor/generator rotor. The flywheel rotor and the motor/generator rotor are mounted on a common shaft. An active axial magnetic bearing is located to support the shaft for frictionless rotation. The bearing provides support for the shaft, the flywheel rotor and motor/generator rotor. The axial magnetic bearing is attached to the housing and provides, in combination with the motor/generator rotor, a flux path and magnetic field to exert a magnetic force to lift the motor/generator rotor and the shaft on which it is mounted.

摘要翻译： 公开了用于在一段时间内提供不间断电力的电源装置。 电源装置具有控制器和飞轮装置。 飞轮装置具有包含飞轮转子和电动机/发电机转子的壳体。 飞轮转子和电机/发电机转子安装在公共轴上。 主动轴向磁轴承位于支撑轴以进行无摩擦旋转。 轴承为轴，飞轮转子和电机/发电机转子提供支撑。 轴向磁性轴承附接到壳体并与电动机/发电机转子组合提供磁通和磁场，以施加磁力以提升电动机/发电机转子及其所安装的轴。