Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same
    3.
    发明授权
    Bottom antireflective coatings exhibiting enhanced wet strip rates, bottom antireflective coating compositions for forming bottom antireflective coatings, and methods for fabricating the same 有权
    表现出增强的湿条带率的底部抗反射涂层,用于形成底部抗反射涂层的底部抗反射涂料组合物及其制造方法

    公开(公告)号:US07955782B2

    公开(公告)日:2011-06-07

    申请号:US12234849

    申请日:2008-09-22

    IPC分类号: G03F7/11

    摘要: Bottom antireflective coating (BARC) that exhibit enhanced wet strip rates, BARC compositions for fabricating such BARCs, and methods for manufacturing such BARC compositions are provided. According to one exemplary embodiment, a bottom antireflective coating (BARC) composition comprises an inorganic-based compound, an absorbing material, and a wet strip-rate modifier combination. The wet strip-rate modifier composition comprises a combination of a short chain linear alcohol and dipropylene glycol (DPG), a combination of the short chain linear alcohol and tetraethylene glycol (TEG), a combination of DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG.

    摘要翻译: 提供了表现出增强的湿条带速率的底部抗反射涂层(BARC),用于制造这种BARC的BARC组合物以及用于制造这种BARC组合物的方法。 根据一个示例性实施方案,底部抗反射涂层(BARC)组合物包含无机基化合物,吸收材料和湿剥离率调节剂组合。 湿剥离率调节剂组合物包括短链线性醇和二丙二醇(DPG)的组合,短链线性醇和四甘醇(TEG)的组合,DPG和TEG的组合,或组合的 短链线性醇,DPG和TEG。

    BOTTOM ANTIREFLECTIVE COATINGS EXHIBITING ENHANCED WET STRIP RATES, BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR FORMING BOTTOM ANTIREFLECTIVE COATINGS, AND METHODS FOR FABRICATING THE SAME
    4.
    发明申请
    BOTTOM ANTIREFLECTIVE COATINGS EXHIBITING ENHANCED WET STRIP RATES, BOTTOM ANTIREFLECTIVE COATING COMPOSITIONS FOR FORMING BOTTOM ANTIREFLECTIVE COATINGS, AND METHODS FOR FABRICATING THE SAME 有权
    底部抗反射涂层展示增强的湿度条纹率,底部抗反射涂层组合物,用于形成底部抗反射涂层及其制造方法

    公开(公告)号:US20100075248A1

    公开(公告)日:2010-03-25

    申请号:US12234849

    申请日:2008-09-22

    IPC分类号: G03F7/00

    摘要: Bottom antireflective coating (BARC) that exhibit enhanced wet strip rates, BARC compositions for fabricating such BARCs, and methods for manufacturing such BARC compositions are provided. According to one exemplary embodiment, a bottom antireflective coating (BARC) composition comprises an inorganic-based compound, an absorbing material, and a wet strip-rate modifier combination. The wet strip-rate modifier composition comprises a combination of a short chain linear alcohol and dipropylene glycol (DPG), a combination of the short chain linear alcohol and tetraethylene glycol (TEG), a combination of DPG and TEG, or a combination of the short chain linear alcohol, DPG, and TEG.

    摘要翻译: 提供了表现出增强的湿条带速率的底部抗反射涂层(BARC),用于制造这种BARC的BARC组合物以及用于制造这种BARC组合物的方法。 根据一个示例性实施方案,底部抗反射涂层(BARC)组合物包含无机基化合物,吸收材料和湿剥离率调节剂组合。 湿剥离率调节剂组合物包括短链线性醇和二丙二醇(DPG)的组合,短链线性醇和四甘醇(TEG)的组合,DPG和TEG的组合,或组合的 短链线性醇,DPG和TEG。

    Method for producing fluorinated organic compounds
    6.
    发明申请
    Method for producing fluorinated organic compounds 有权
    氟化有机化合物的制备方法

    公开(公告)号:US20070129580A1

    公开(公告)日:2007-06-07

    申请号:US11592442

    申请日:2006-11-03

    IPC分类号: C07C17/25 C07C21/18

    CPC分类号: C07C17/25 C07C21/18

    摘要: Disclosed is a method for producing fluorinated organic compounds, including hydrofluoropropenes, which preferably comprises converting at least one compound of formula (I): CF3CFnCHmXa-m  (I)to at least one compound of formula (II) CF3CZCHZ  (II).where each X is independently Cl, I or Br; each Z is independently H or F; n is 1 or 2; m is 1, 2 or 3, provided that when n is 1, m is 1 or 2; a is 2 or 3, and a-m≧0. Certain embodiments include the step of reacting fluorinated C2 olefin, such as tetrafluoroethylene, with a Cl addition agent under conditions effective to produce a compound of formula (I).

    摘要翻译: 公开了一种包括氢氟丙烯的氟化有机化合物的制备方法,其优选包括转化至少一种式(I)的化合物:<?in-line-formula description =“In-line formula”end =“lead”→> CF (I)<?in-line-formula description =“In-line-formula description =”In-line-formula description =“In- 至少一种式(II)的化合物<?in-line-formula description =“In-line Formulas”end =“lead”?> CF 3 > CZCHZ(II)。<?in-line-formula description =“In-line Formulas”end =“tail”?>其中每个X独立为Cl,I或Br; 每个Z独立地为H或F; n为1或2; m为1,2或3,条件是当n为1时,m为1或2; a为2或3,a-m> = 0。 某些实施方案包括在有效产生式(I)化合物的条件下,将氟化C 2烯烃如四氟乙烯与Cl加成剂反应的步骤。

    Method for producing fluorinated organic compounds
    7.
    发明申请
    Method for producing fluorinated organic compounds 有权
    氟化有机化合物的制备方法

    公开(公告)号:US20070112229A1

    公开(公告)日:2007-05-17

    申请号:US11592476

    申请日:2006-11-03

    IPC分类号: C07C17/093

    摘要: Disclosed is a method for producing fluorinated organic compounds, including hydrofluoropropenes, which preferably comprises converting at least one compound of formula (I): CF3CFnCHmXa-m   (I) to at least one compound of formula (II) CF3CZCHZ   (II). where each X is independently Cl, F, I or Br; each Z is independently H or F; n is 1 or 2; m is 1, 2 or 3, provided that when n is 1, mis 1 or 2; a is 2 or 3, and a-m≧0. Certain embodiments include the step of reacting fluorinated C2 olefin, such as tetrafluoroethylene, with a Cl addition agent under conditions effective to produce a compound of formula (I).

    摘要翻译: 公开了一种包括氢氟丙烯的氟化有机化合物的制备方法,其优选包括转化至少一种式(I)的化合物:<?in-line-formula description =“In-line formula”end =“lead”→> CF (I)<?in-line-formula description =“In-line-formula description =”In-line-formula description =“In- 至少一种式(II)的化合物<?in-line-formula description =“In-line Formulas”end =“lead”?> CF 3 CZCHZ(二)。 <?in-line-formula description =“在线公式”end =“tail”?>其中每个X独立为Cl,F,I或Br; 每个Z独立地为H或F; n为1或2; m为1,2或3,条件是当n为1时,为1或2; a为2或3,a-m> = 0。 某些实施方案包括在有效产生式(I)化合物的条件下,将氟化C 2烯烃如四氟乙烯与Cl加成剂反应的步骤。

    Processes for synthesis of tetrafluoropropene
    8.
    发明授权
    Processes for synthesis of tetrafluoropropene 有权
    合成四氟丙烯的方法

    公开(公告)号:US07189884B2

    公开(公告)日:2007-03-13

    申请号:US11118530

    申请日:2005-04-29

    IPC分类号: C07C21/18

    摘要: Disclosed in one embodiment is a process for the synthesis of 1,3,3,3-tetrafluoropropene that comprises (a) reacting a compound of formula (I) X1X2 with a compound of formula (II) CF3CH═CH2 to produce a reaction product comprising a compound of formula (III) CF3CHX1CH2X2, wherein X1 and X2 are each independently selected from the group consisting of hydrogen, chlorine, bromine and iodine, provided that X1 and X2 are not both hydrogen; (b) when X2 in formula (III) is not fluorine, fluorinating the compound of formula (III) to produce a reaction product comprising a compound of formula (III) wherein X1 is as described above and X2 is fluorine; and (c) exposing said compound of formula (III) to reaction conditions effective to convert said compound to 1,3,3,3-tetrafluoropropene.

    摘要翻译: 在一个实施方案中公开了一种用于合成1,3,3,3-四氟丙烯的方法,其包括(a)使式(I)化合物X 1,X 2, 与式(II)化合物CF 3 CH-CH 2取代,生成包含式(III)化合物的反应产物CF 3 其中X 1和X 2都是(CH 2)2 CH 2,其中X 1和X 2都是 各自独立地选自氢,氯,溴和碘,条件是X 1和X 2都不是氢; (b)当式(III)中的X 2不是氟时,氟化式(III)化合物以产生包含式(III)化合物的反应产物,其中X 1, / SUP>如上所述,X 2是氟; 和(c)将所述式(III)化合物暴露于有效将所述化合物转化为1,3,3,3-四氟丙烯的反应条件。