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公开(公告)号：US20050079354A1
公开(公告)日：2005-04-14
申请号：US10500798
申请日：2002-12-19
CPC分类号： B82Y30/00 , B82Y40/00 , C01B32/15 , Y10T428/2982 , Y10T428/30
摘要： A graphite nanosphere which has a structure wherein a plurality of pyramids of multilayer graphite are arranged without clearance, taking their apexes as a center and the external form thereof is nearly spherical as a whole or as a part; and a method for preparing the graphite nanosphere which comprises irradiating a carbon target with a CO2 laser in an inert gas atmosphere under a pressure of 5 to 10 atm to thereby generate the carbon in an atomic or cluster form having a temperature of no less than 1000° C.
摘要翻译： 一种石墨纳米球，其结构为多层石墨的多个锥体以间隙排列，以其顶点为中心，其外形为整体或部分接近球面; 以及制备该石墨纳米球的方法，其特征在于，在5〜10atm的压力下，在惰性气体气氛中用CO 2激光照射碳靶，由此生成温度为1000以上的原子或簇状碳 C。
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公开(公告)号：US20090127233A1
公开(公告)日：2009-05-21
申请号：US12263310
申请日：2008-10-31
IPC分类号： B23K26/00
CPC分类号： G01N21/73 , B23K26/032 , B23K26/0853 , G01J3/443 , G01N2021/8416 , G01N2201/0697 , H01L21/67253
摘要： A laser beam machining apparatus including a chuck table for holding a wafer, and a laser beam irradiation unit for irradiating the wafer held on the chuck table with a pulsed laser beam. The laser beam machining apparatus further includes a plasma detecting part which includes a plasma receiving part for receiving a plasma generated by irradiation of the work with the laser beam radiated from the laser beam irradiation unit, and a spectrum analyzing part for analyzing the spectrum of the plasma received by the plasma receiving part; and a controller for determining the material of the work on the basis of a spectrum analysis signal from the spectrum analyzing part of the plasma detecting part and for controlling the laser beam irradiation unit.
摘要翻译： 一种激光束加工装置，包括用于保持晶片的卡盘台和激光束照射单元，用于用脉冲激光束照射保持在卡盘台上的晶片。 激光束加工装置还包括等离子体检测部件，其包括等离子体接收部件，用于接收由激光束照射单元辐射的激光束照射工件产生的等离子体;以及光谱分析部件，用于分析 由等离子体接收部接收的等离子体; 以及控制器，用于根据来自等离子体检测部分的光谱分析部分的光谱分析信号确定工件的材料并控制激光束照射单元。
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