摘要:
A method of manufacturing a semiconductor device, the method including forming a tunnel insulating layer on an upper surface of a substrate, forming gate patterns on an upper surface of the tunnel insulating layer, forming capping layer patterns on sidewalls of the gate patterns and on the upper surface of the tunnel insulating layer, etching a portion of the tunnel insulating layer that is not covered with the gate patterns or the capping layer patterns to form a tunnel insulating layer pattern, and forming a first insulating layer on the upper surface of the substrate to cover the gate patterns, the capping layer patterns, and the tunnel insulating layer pattern, wherein the first insulating layer has an air gap between the capping layer patterns.
摘要:
A signal processing method and apparatus for obtaining a diversity gain in the communication system equipping the antenna array when a background noise is a space white noise or a non white noise is disclosed. The signal processing method and apparatus includes steps and functions of calculating a covariance matrix, estimating at least two time invariance vectors by performing an eigen-disintegration operation, estimating a channel vector and outputting a beam-forming vector. The present invention can improve the performance of the antenna array by using at least two time invariance vectors and it also increase a communication quality and quantity of the communication system, if the present invention is implemented to the wireless communication system.