公开(公告)号：US11823919B2

公开(公告)日：2023-11-21

申请号：US17863960

申请日：2022-07-13

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

发明人： Ping-Tse Lin ,  Wen-Cheng Lien ,  Chun-Chih Lin ,  Monica Ho

IPC分类号： G01B11/06 ,  H01L21/67 ,  G01B11/14 ,  G01N21/84 ,  H01L21/268 ,  H01L21/324 ,  F16P1/06

CPC分类号： H01L21/67115 ,  F16P1/06 ,  G01B11/0633 ,  G01B11/14 ,  G01N21/8422 ,  H01L21/268 ,  H01L21/324 ,  H01L21/67248 ,  H01L21/67253 ,  G01N2021/8427

摘要： A multi-shield plate includes a plurality of windows and a plurality of vapor shields mounted to the plurality of windows, wherein each window of the plurality of windows is formed in the plate and extends through an entirety of the plate in a thickness direction. The multi-shield plate further includes a plurality of apertures in the plate, wherein each of the plurality of apertures extends through the entirety of the plate in the thickness direction and, an aperture of the plurality of apertures is aligned with a corresponding window of the plurality of windows along radius of the multi-shield plate.

公开(公告)号：US10811285B2

公开(公告)日：2020-10-20

申请号：US15798827

申请日：2017-10-31

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

发明人： Ping-Tse Lin ,  Chun-Chih Lin ,  Wen-Cheng Lien ,  Monica Ho

IPC分类号： G01N21/84 ,  H01L21/67 ,  G01B11/14 ,  H01L21/268 ,  H01L21/324 ,  F16P1/06 ,  G01B11/06

摘要： A multi-shield plate includes a plate having a substantially flat upper surface and a substantially flat lower surface, a plurality of first windows formed in the plate and extending through the plate from the upper surface to the lower surface, and a plurality of vapor shields mounted to the plate, each vapor shield of the plurality of vapor shields configured to prevent passage of a vapor through a corresponding window of the plurality of windows. The multi-shield plate includes an aperture formed in the plate, the aperture aligned with a first window of the plurality of windows along an axis corresponding to the upper surface.