Magnetic sensor, magnetic detection device and magnetic detection system

    公开(公告)号:US11662401B2

    公开(公告)日:2023-05-30

    申请号:US17156741

    申请日:2021-01-25

    Inventor: Keisuke Takasugi

    CPC classification number: G01R33/091 G01N33/54326 G01R33/1269

    Abstract: A magnetic sensor includes a substrate having a first surface and a second surface, which is opposite the first surface, and a detection unit provided on the first surface. The detection unit includes a magnetoresistive effect element, the resistance value of which changes in accordance with an input magnetic field, provided on the first surface, and a protective layer that covers at least the magnetoresistive effect element. The magnetoresistive effect element is configured in a linear shape extending in a first direction on the first surface. The detection unit has a first width, which is a length in a second direction, orthogonal to the first direction, and a second length, which is greater than the first width. The first width is the length of the detection unit on the first surface, and the second width is the length of the top surface of the detection unit.

    Magnetic sensor and method of manufacturing the same

    公开(公告)号:US10527687B2

    公开(公告)日:2020-01-07

    申请号:US15676117

    申请日:2017-08-14

    Abstract: A magnetic sensor that is easy to ensure the height of the yoke and that is also easy to guide magnetic flux in the direction in which the magnetic field sensing film detects a magnetic field is provided. The magnetic sensor includes first magnetic field detection element 21 that has first magnetic field sensing film 38 that detects a magnetic field in first direction X, and first yoke 23 that includes first portion 23a that is located on a side of first magnetic field sensing film 38 with respect to first direction X, and second portion 23b that is in contact with first portion 23a in direction Z that is orthogonal to first direction X. The average dimension of second portion 23b in first direction X is larger than the average dimension of first portion 23a in first direction X.

    Magnetic sensor, detection device and detection system

    公开(公告)号:US11921111B2

    公开(公告)日:2024-03-05

    申请号:US16787182

    申请日:2020-02-11

    Inventor: Keisuke Takasugi

    CPC classification number: G01N33/54326 G01N15/0606 G01N15/0656 G01R33/093

    Abstract: A magnetic sensor used to detect detection substances in samples includes a substrate having a first surface and a second surface, which is opposite to the first surface, a magnetoresistance effect element, which is provided on the first surface and in which the resistance of the magnetoresistance effect element changes in accordance with an input magnetic field, and a protective layer that covers the magnetoresistance effect element. The magnetoresistance effect element is configured in a line shape extending in a first direction on the first surface, and has a first region that is positioned at the outer periphery in a plan view, and a second region that is surrounded by the first region. The height of a top surface of the protective layer on the first region is greater than the height of a top surface of the protective layer on the second region.

    Magnetic sensor and method of manufacturing the same

    公开(公告)号:US11067648B2

    公开(公告)日:2021-07-20

    申请号:US16693546

    申请日:2019-11-25

    Abstract: A magnetic sensor that ensures the height of the yoke and that guides magnetic flux in the direction in which the magnetic field sensing film detects a magnetic field includes a first magnetic field detection element that has a first magnetic field sensing film that detects a magnetic field in a first direction, and a first yoke that includes a first portion that is located on a side of the first magnetic field sensing film with respect to the first direction, and a second portion that is in contact with the first portion in a direction that is orthogonal to the first direction. The average dimension of the second portion in the first direction is larger than the average dimension of the first portion in the first direction.

    Sensor
    7.
    发明授权
    Sensor 有权

    公开(公告)号:US12282077B2

    公开(公告)日:2025-04-22

    申请号:US18737185

    申请日:2024-06-07

    Abstract: A magnetic sensor includes an insulating layer including a flat portion and a protruding portion, a first MR element, and a second MR element. The protruding portion includes a first inclined surface and a second inclined surface. The first MR element is disposed on the first inclined surface. The second MR element is disposed on the second inclined surface. The protruding portion extends in a first direction parallel to a top surface of a substrate, and includes a plurality of recess portions each recessed in a direction parallel to the top surface of the substrate at an end of the protruding portion in the first direction.

    Magnetic field detection apparatus

    公开(公告)号:US12072397B2

    公开(公告)日:2024-08-27

    申请号:US17946838

    申请日:2022-09-16

    CPC classification number: G01R33/093

    Abstract: A magnetic field detection apparatus includes first and second projections that are provided on a flat surface of a substrate and that each include first and second inclined surfaces. First and second MR films are provided on the first and second inclined surfaces, respectively. A first wiring line couples the first MR films provided on the respective first inclined surfaces of the first and second projections. A second wiring line couples the second MR films provided on the respective second inclined surfaces of the first and second projections. The first and second projections are adjacent in a first direction, with the first inclined surface of the first projection and the second inclined surface of the second projection opposed to each other in the first direction. One or more patterns are provided on the first inclined surface of the first projection, the second inclined surface of the second projection, or both.

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