公开(公告)号：US20200312553A1

公开(公告)日：2020-10-01

申请号：US16823789

申请日：2020-03-19

Applicant: TDK Corporation

Inventor： Shirou OOTSUKI ,  Aiko TAKAHASHI ,  Yasunori HARADA ,  Shota SUZUKI ,  Yasunaga KAGAYA ,  Tomohiko KATO ,  Mirai ISHIDA

IPC: H01G4/10 ,  H01G4/14

Abstract: A dielectric film, contains: (1) Bi and Ti; (2) at least one element E1 selected from the group consisting of Na and K; and (3) at least one element E2 selected from the group consisting of Ba, Sr, and Ca. The dielectric film has a main phase containing an oxide that contains Bi, Ti, the element E1, and the element E2 and has a perovskite structure, and a subphase that contains Bi and has an oxygen concentration lower than that of the main phase. In a sectional surface of the dielectric film, a ratio RS of an area of the subphase to a sum of an area of the main phase and the area of the subphase is greater than or equal to 0.03 and less than or equal to 0.3.

公开(公告)号：US20220059753A1

公开(公告)日：2022-02-24

申请号：US17274897

申请日：2019-09-11

Applicant: TDK Corporation ,  TOKYO INSTITUTE OF TECHNOLOGY

Inventor： Yusuke SATO ,  Mirai ISHIDA ,  Wakiko SATO ,  Hiroshi FUNAKUBO ,  Takao SHIMIZU ,  Miyu HASEGAWA ,  Keisuke ISHIHAMA

IPC: H01L41/187 ,  H01L41/08 ,  H01L41/316 ,  H01L41/319 ,  C04B35/475 ,  G11B5/127 ,  G01C19/5607 ,  G01L1/16 ,  B41J2/14

Abstract: Provided is a dielectric thin film including a metal oxide. The metal oxide includes bismuth, sodium, barium, and titanium, at least a part of the metal oxide is a tetragonal crystal having a perovskite structure, and a (100) plane of at least a part of the tetragonal crystal is oriented in a normal direction do of a surface of the dielectric thin film 3.

公开(公告)号：US20190288181A1

公开(公告)日：2019-09-19

申请号：US16357864

申请日：2019-03-19

Applicant: TDK CORPORATION

Inventor： Hiroki KATOH ,  Yuiko HIROSE ,  Masakazu HIROSE ,  Mirai ISHIDA

IPC: H01L41/187 ,  H01L41/43 ,  C04B35/495 ,  C04B35/63

Abstract: A piezoelectric composition including copper, germanium and a complex oxide represented by a compositional formula KmNbO3 and having a perovskite structure, in which m in the compositional formula satisfies 0.970≤ m≤0.999, and with respect to 1 mol of the complex oxide, x mol % of copper in terms of a copper element and y mol % of germanium in terms of a germanium element are contained, wherein x satisfies 0.100 ≤x≤1.000 and y satisfies 0.000