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公开(公告)号:US11561146B2
公开(公告)日:2023-01-24
申请号:US16762079
申请日:2018-11-07
Applicant: TDK Electronics AG
Inventor: Christian Wohlgemuth , Benjamin Bohl
Abstract: In an embodiment, a pressure sensor system includes a pressure sensor element with a flexible plate, wherein the pressure sensor element is a piezoresistive sensor element and a support element on which the pressure sensor element is arranged, wherein a flow channel configured to supply a medium to the flexible plate runs in the support element, wherein the flow channel has at least one sub-section, a longitudinal direction of which running perpendicularly below the flexible plate, and wherein a channel cross section of the at least one sub-section of the flow channel is at no point within the sub-section of the flow channel smaller than an area of the flexible plate.
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公开(公告)号:US11085844B2
公开(公告)日:2021-08-10
申请号:US16650324
申请日:2018-09-27
Applicant: TDK Electronics AG
Inventor: Benjamin Bohl , Jan Ihle , Bert Hundertmark , Bernd Polder , Christian Wohlgemuth
Abstract: A pressure transmitter is disclosed. In an embodiment a pressure transmitter includes a housing including a housing wall, a sensor element arranged inside the housing, a ceramic substrate acting as a carrier of the sensor element and of its electrical connection arranged inside the housing and a first heating element arranged inside the housing or the housing wall, wherein the pressure transmitter is configured to determine differential, relative or absolute pressure.
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公开(公告)号:US20200340874A1
公开(公告)日:2020-10-29
申请号:US16762079
申请日:2018-11-07
Applicant: TDK Electronics AG
Inventor: Christian Wohlgemuth , Benjamin Bohl
Abstract: A pressure sensor system is disclosed. In an embodiment, a pressure sensor system includes a pressure sensor element with a flexible plate, wherein the pressure sensor element is a piezoresistive sensor element and a support element on which the pressure sensor element is arranged, wherein a flow channel configured to supply a medium to the flexible plate runs in the support element, wherein the flow channel has at least one sub-section, a longitudinal direction of which running perpendicularly below the flexible plate, and wherein a channel cross section of the at least one sub-section of the flow channel is at no point within the sub-section of the flow channel smaller than an area of the flexible plate.
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公开(公告)号:US11473990B2
公开(公告)日:2022-10-18
申请号:US17273679
申请日:2019-09-16
Applicant: TDK Electronics AG
Inventor: Markus Eberstein , Peter Sättler , Christian Wohlgemuth
Abstract: In an embodiment a membrane includes a hydrophobic region having a plurality of hierarchically arranged micrometer-sized and submicrometer-sized units consisting of a membrane material, wherein a single micrometer-sized unit has a diameter of from 1 μm to 5 μm and a single submicrometer-sized unit has a diameter of
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公开(公告)号:US20210318192A1
公开(公告)日:2021-10-14
申请号:US17273679
申请日:2019-09-16
Applicant: TDK Electronics AG
Inventor: Markus Eberstein , Peter Sättler , Christian Wohlgemuth
Abstract: A membrane, a pressure sensor system and a method for producing the pressure sensor system are disclosed. In an embodiment a pressure sensor system includes a housing, at least one media supply line and a pressure-sensitive element including at least one membrane with a hydrophobic region.
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公开(公告)号:US20200292401A1
公开(公告)日:2020-09-17
申请号:US16650937
申请日:2018-09-27
Applicant: TDK Electronics AG
Inventor: Benjamin Bohl , Jan Ihle , Bert Hundertmark , Bernd Polder , Christian Wohlgemuth
Abstract: A pressure sensor is disclosed. In an embodiment a pressure sensor includes a housing comprising a housing wall, a sensor element arranged inside the housing, a ceramic substrate acting as a carrier of the sensor element and of its electrical connection arranged inside the housing and a first heating element arranged inside the housing or the housing wall.
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公开(公告)号:US20200271534A1
公开(公告)日:2020-08-27
申请号:US16650324
申请日:2018-09-27
Applicant: TDK Electronics AG
Inventor: Benjamin Bohl , Jan Ihle , Bert Hundertmark , Bernd Polder , Christian Wohlgemuth
Abstract: A pressure transmitter is disclosed. In an embodiment a pressure transmitter includes a housing including a housing wall, a sensor element arranged inside the housing, a ceramic substrate acting as a carrier of the sensor element and of its electrical connection arranged inside the housing and a first heating element arranged inside the housing or the housing wall, wherein the pressure transmitter is configured to determine differential, relative or absolute pressure.
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公开(公告)号:US20200256751A1
公开(公告)日:2020-08-13
申请号:US16629663
申请日:2018-09-27
Applicant: TDK Electronics AG
Inventor: Benjamin Bohl , Jan Ihle , Bert Hundertmark , Bernd Polder , Christian Wohlgemuth
Abstract: A pressure sensor is disclosed. In an embodiment a pressure sensor includes a housing having a housing wall, a sensor element arranged in the housing, a ceramic substrate configured to serve as a support for the sensor element and an electrical connection thereof and a first heating element arranged in an interior of the housing or in the housing wall.
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