公开(公告)号：US20210318192A1

公开(公告)日：2021-10-14

申请号：US17273679

申请日：2019-09-16

Applicant: TDK Electronics AG

Inventor： Markus Eberstein ,  Peter Sättler ,  Christian Wohlgemuth

IPC: G01L9/00 ,  G01L19/06 ,  G01L23/24

Abstract: A membrane, a pressure sensor system and a method for producing the pressure sensor system are disclosed. In an embodiment a pressure sensor system includes a housing, at least one media supply line and a pressure-sensitive element including at least one membrane with a hydrophobic region.

公开(公告)号：US20210402522A1

公开(公告)日：2021-12-30

申请号：US17292875

申请日：2019-11-18

Applicant: TDK Electronics AG ,  Bundesanstalt für Materialforschung und - prüfung (BAM)

Inventor： Markus Eberstein ,  Jörn Bonse ,  Sabrina V. Kirner

IPC: B23K26/362 ,  G01L19/06 ,  B23K26/0622

Abstract: In an embodiment a sensor device includes a sensor element, a media supply configured to transport a medium to the sensor element and a surface, wherein the surface is configured to be exposed to the medium during operation of the sensor device, and wherein the surface comprises a surface structure configured to reduce a wettability of the surface by the medium.

公开(公告)号：US20250155305A1

公开(公告)日：2025-05-15

申请号：US18839674

申请日：2023-02-08

Applicant: TDK Electronics AG

Inventor： Markus Eberstein ,  Thomas Stendel ,  Benjamin Bohl

IPC: G01L9/00 ,  B23K26/21

Abstract: In an embodiment a pressure sensor arrangement includes a sensor element having a top side and a bottom side, wherein the sensor element comprises a membrane configured to be exposed to a medium and at least one detection element configured to measure a pressure of the medium, a substrate serving as a carrier of the sensor element, wherein the substrate comprises glass and a connection interface, produced by laser welding, arranged between the sensor element and the substrate, wherein the sensor element and the substrate are mechanically firmly and hermetically connected to one another at the connection interface.

公开(公告)号：US11473990B2

公开(公告)日：2022-10-18

申请号：US17273679

申请日：2019-09-16

Applicant: TDK Electronics AG

Inventor： Markus Eberstein ,  Peter Sättler ,  Christian Wohlgemuth

IPC: G01L9/00 ,  G01L19/06 ,  G01L23/24

Abstract: In an embodiment a membrane includes a hydrophobic region having a plurality of hierarchically arranged micrometer-sized and submicrometer-sized units consisting of a membrane material, wherein a single micrometer-sized unit has a diameter of from 1 μm to 5 μm and a single submicrometer-sized unit has a diameter of

公开(公告)号：US12097574B2

公开(公告)日：2024-09-24

申请号：US17292875

申请日：2019-11-18

Applicant: TDK Electronics AG

Inventor： Markus Eberstein ,  Jörn Bonse ,  Sabrina V. Kirner

IPC: B23K26/362 ,  B23K26/0622 ,  G01L19/06

CPC classification number: B23K26/362 ,  B23K26/0624 ,  G01L19/0654

Abstract: In an embodiment a sensor device includes a sensor element, a media supply configured to transport a medium to the sensor element and a surface, wherein the surface is configured to be exposed to the medium during operation of the sensor device, and wherein the surface comprises a surface structure configured to reduce a wettability of the surface by the medium.