公开(公告)号：US20190189897A1

公开(公告)日：2019-06-20

申请号：US16323583

申请日：2017-08-10

Applicant: TECHNION RESEARCH AND DEVELOPMENT FOUNDATION LIMITED

Inventor： David ELATA

IPC: H01L41/09 ,  H01L41/047 ,  B81B3/00

CPC classification number: H01L41/096 ,  B81B3/0024 ,  H01L41/047 ,  H01L41/094 ,  H01L41/0993

Abstract: Single bulk unimorph piezoelectric elements, with interdigitated electrodes aligned obliquely relative to the direction perpendicular to the axis of the element, such that a torsional response is induced into the element. When such elements are used as a beam structure, with angularly oriented electrodes on both opposite surfaces of the beam, and with their orientations at mutually opposite angles, motion ranging from pure torsional rotation to pure bending can be obtained, depending on the comparative level and polarity of the voltages applied to each of the two electrode sets. If such elements are used as the spiral support arms of a central platform, a large displacement of the stage can be achieved. Due to the oblique orientation of the IDE's, the piezoelectric transduction induces torsional deformation in the spirals, and this torsion is converted by the spiral arms to a parallel out-of-plane platform motion.