公开(公告)号：US20130207746A1

公开(公告)日：2013-08-15

申请号：US13646371

申请日：2012-10-05

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Arun Kumar Gupta

IPC: H03H9/46 ,  H05K13/00

CPC classification number: H03H9/462 ,  H05K13/00 ,  Y10T29/49117

Abstract: A MEMS mixer filter including an array of a multiplicity of resonator elements with conductive outer surfaces in a coplanar rectangularly tiled array, and two sets of DC bias lines in which alternating resonator elements in each row and column are connected to one or the other sets of bias lines so that laterally adjacent resonators may be biased to a DC potential. The resonator elements are uniform in size and shape. Lateral dimensions of the resonator elements are between 5 and 50 microns. The resonator elements are between 100 nanometers and 100 microns thick, and adjacent resonator elements are separated by a gap between 100 and 500 nanometers. A process of forming the MEMS mixer filter.

Abstract translation: 一种MEMS混频器滤波器，包括具有共面矩形平铺阵列中的导电外表面的多个谐振元件的阵列，以及两组DC偏置线，其中每行和列中的交变谐振元件连接到一组或另一组 偏置线，使得横向相邻的谐振器可能被偏置到DC电位。 谐振元件的尺寸和形状均匀。 谐振器元件的横向尺寸在5和50微米之间。 谐振器元件在100纳米和100微米厚之间，并且相邻的谐振元件被分隔在100和500纳米之间的间隙。 形成MEMS混合器过滤器的过程。

公开(公告)号：US09190982B2

公开(公告)日：2015-11-17

申请号：US13646371

申请日：2012-10-05

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Arun Kumar Gupta

IPC: H03H9/46 ,  H05K13/00

CPC classification number: H03H9/462 ,  H05K13/00 ,  Y10T29/49117

Abstract: A MEMS mixer filter including an array of a multiplicity of resonator elements with conductive outer surfaces in a coplanar rectangularly tiled array, and two sets of DC bias lines in which alternating resonator elements in each row and column are connected to one or the other sets of bias lines so that laterally adjacent resonators may be biased to a DC potential. The resonator elements are uniform in size and shape. Lateral dimensions of the resonator elements are between 5 and 50 microns. The resonator elements are between 100 nanometers and 100 microns thick, and adjacent resonator elements are separated by a gap between 100 and 500 nanometers. A process of forming the MEMS mixer filter.

Abstract translation: 一种MEMS混频器滤波器，包括具有共面矩形平铺阵列中的导电外表面的多个谐振元件的阵列，以及两组DC偏置线，其中每行和列中的交变谐振元件连接到一组或另一组 偏置线，使得横向相邻的谐振器可能被偏置到DC电位。 谐振元件的尺寸和形状均匀。 谐振器元件的横向尺寸在5和50微米之间。 谐振器元件在100纳米和100微米厚之间，并且相邻的谐振器元件被分隔在100和500纳米之间的间隙。 形成MEMS混合器过滤器的过程。

公开(公告)号：US09263973B2

公开(公告)日：2016-02-16

申请号：US14691962

申请日：2015-04-21

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Arun Kumar Gupta ,  William Craig McDonald

IPC: H01H57/00 ,  H02N2/12 ,  B81B3/00 ,  B81B7/02

CPC classification number: H02N2/12 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0013 ,  B81B7/02 ,  B81B2201/016 ,  B81B2201/0221 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/053 ,  B81B2203/058 ,  B81B2203/06

Abstract: A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.

公开(公告)号：US20150229241A1

公开(公告)日：2015-08-13

申请号：US14691962

申请日：2015-04-21

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Arun Kumar Gupta ,  William Craig McDonald

IPC: H02N2/12 ,  B81B7/02

CPC classification number: H02N2/12 ,  B81B3/0008 ,  B81B3/001 ,  B81B3/0013 ,  B81B7/02 ,  B81B2201/016 ,  B81B2201/0221 ,  B81B2203/0109 ,  B81B2203/0181 ,  B81B2203/053 ,  B81B2203/058 ,  B81B2203/06

Abstract: A MEMS electrostatic actuator includes a bottom plate affixed to a substrate and a top plate suspended above the bottom plate. The top plate has a parallel plate center section and two rotating members electrically connected to the center section. Each rotating member is attached centrally of the rotating member for rotation about an axis of rotation to a set of anchor posts. The attachment includes at least one pair of torsional springs attached along each axis, each spring comprising a rectangular metal square that twists as the rotational members rotate. Electrostatic pull-down electrodes are underneath each rotational member.

Abstract translation: MEMS静电致动器包括固定到基板的底板和悬挂在底板上方的顶板。 顶板具有平行板中心部分和两个电连接到中心部分的旋转部件。 每个旋转构件安装在旋转构件的中心，用于围绕旋转轴线旋转到一组锚柱。 附件包括沿着每个轴线附接的至少一对扭转弹簧，每个弹簧包括矩形金属正方形，随着旋转构件的旋转，该正方形扭曲。 静电下拉电极位于每个旋转构件的下方。