公开(公告)号：US20230127477A1

公开(公告)日：2023-04-27

申请号：US17728844

申请日：2022-04-25

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Christopher Murray BEARD ,  Song ZHENG ,  John Wesley HAMLIN, III ,  Win-Jae Jessie YUAN ,  Kelly Jay TAYLOR ,  Jose Antonio MARTINEZ SOTO

IPC: B81C1/00

Abstract: In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositing a hard mask on the organic polymer layer and depositing a photoresist layer on the hard mask. The method also includes patterning the photoresist layer to expose at least a portion of the hard mask. The method includes etching the exposed portion of the hard mask to expose at least a portion of the organic polymer layer. The method also includes etching the exposed portion of the organic polymer layer to expose at least a portion of the one or more material layers.

公开(公告)号：US20230077129A1

公开(公告)日：2023-03-09

申请号：US17843816

申请日：2022-06-17

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Sean Christopher O'BRIEN ,  Kelly Jay TAYLOR ,  John Wesley HAMLIN, III ,  Christopher Murray BEARD

IPC: B81C1/00 ,  B81B7/00 ,  G02B26/06

Abstract: In an example, a method of manufacturing a MEMS device includes forming a via. The method also includes depositing metal in the via and depositing a first layer of a non-photoactive organic polymer on the metal. The method includes baking the first layer of the non-photoactive organic polymer. The method also includes depositing a second layer of the non-photoactive organic polymer on the first layer of the non-photoactive organic polymer after baking the first layer of the non-photoactive organic polymer. The method includes baking the second layer of the non-photoactive organic polymer. The method also includes etching the first layer and the second layer of the non-photoactive organic polymer.