公开(公告)号：US20230127477A1

公开(公告)日：2023-04-27

申请号：US17728844

申请日：2022-04-25

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Christopher Murray BEARD ,  Song ZHENG ,  John Wesley HAMLIN, III ,  Win-Jae Jessie YUAN ,  Kelly Jay TAYLOR ,  Jose Antonio MARTINEZ SOTO

IPC: B81C1/00

Abstract: In an example, a method includes depositing an organic polymer layer on one or more material layers. The method also includes thermally curing the organic polymer layer. The method includes depositing a hard mask on the organic polymer layer and depositing a photoresist layer on the hard mask. The method also includes patterning the photoresist layer to expose at least a portion of the hard mask. The method includes etching the exposed portion of the hard mask to expose at least a portion of the organic polymer layer. The method also includes etching the exposed portion of the organic polymer layer to expose at least a portion of the one or more material layers.