公开(公告)号：US10544039B2

公开(公告)日：2020-01-28

申请号：US15698706

申请日：2017-09-08

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Benjamin Stassen Cook ,  Kurt Wachtler ,  Adam Joseph Fruehling ,  Juan Alejandro Herbsommer ,  Simon Joshua Jacobs

IPC: H01L21/00 ,  B81C1/00 ,  G04F5/14 ,  B81B3/00

Abstract: Methods for depositing a measured amount of a species in a sealed cavity. In one example, a method for depositing molecules in a sealed cavity includes depositing a selected number of microcapsules in a cavity. Each of the microcapsules contains a predetermined amount of a first fluid. The cavity is sealed after the microcapsules are deposited. After the cavity is sealed the microcapsules are ruptured to release molecules of the first fluid into the cavity.