SEMICONDUCTOR CHIP PACKAGES HAVING BOND OVER ACTIVE CIRCUIT (BOAC) STRUCTURES

    公开(公告)号:US20230068086A1

    公开(公告)日:2023-03-02

    申请号:US17463077

    申请日:2021-08-31

    Abstract: In some examples a method comprises forming an insulating member over a circuit on a device side of a semiconductor die, removing a portion of the insulating member to produce a cavity, and forming a seed layer on the insulating member and within the cavity. In addition, the method includes forming a conductive member on the seed layer in the cavity, wherein the conductive member comprises a plurality of layers of different metal materials. Further, the method includes removing the seed layer from atop the insulating member, outside the cavity, after forming the conductive member in the cavity such that a remaining portion of the seed layer is positioned between the conductive member and the insulating member.

    OPEN CAVITY SENSOR
    4.
    发明申请

    公开(公告)号:US20250006573A1

    公开(公告)日:2025-01-02

    申请号:US18345186

    申请日:2023-06-30

    Abstract: In examples, a semiconductor package comprises a semiconductor die including a device side having circuitry formed therein. The device side includes a sensor. The package includes a metal member creating a hollow cavity extending through the metal member, the hollow cavity vertically aligned with the sensor, the metal member including a lower portion having a first wall thickness and an upper portion having varying wall thicknesses greater than and less than the first wall thickness, an intersection of the upper and lower portions forming a notch on an outer side of the metal member opposing the hollow cavity. The package also includes a mold compound covering portions of the semiconductor die and contacting the metal member.

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