公开(公告)号：US10181834B2

公开(公告)日：2019-01-15

申请号：US15672070

申请日：2017-08-08

Applicant: Texas Instruments Incorporated

Inventor： Siraj Akhtar ,  Richard Francis Taylor ,  Petteri Litmanen

IPC: H01L23/522 ,  H03H7/42 ,  H01L23/64 ,  H01L23/66 ,  H01L49/02 ,  H01F21/12 ,  H01F27/28 ,  H01F27/29 ,  H01F41/04

Abstract: In described examples of a magnetically coupled structure on a substrate with an integrated circuit device, the structure includes a first coil in a differential configuration, a second coil located above the first coil in a generally stacked configuration, and a center tap connection to a winding of the second coil. The first coil includes a first differential terminal, a second differential terminal, and metal windings of the first coil. The first coil's metal windings form a continuous spiral electrical path between the first and second differential terminals. The first coil's metal windings include turns and crossing connections between the turns. The turns are fabricated in an integrated circuit metal wiring level, and the crossing connections are fabricated in at least one metal level other than the metal wiring level containing the turns. The center tap is positioned to create a balanced structure.

公开(公告)号：US20160142036A1

公开(公告)日：2016-05-19

申请号：US15003030

申请日：2016-01-21

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Siraj Akhtar ,  Richard Francis Taylor ,  Petteri Litmanen

IPC: H03H7/42 ,  H01F27/29 ,  H01F41/04 ,  H01F27/28

CPC classification number: H03H7/42 ,  H01F21/12 ,  H01F27/2804 ,  H01F27/29 ,  H01F41/041 ,  H01L23/5227 ,  H01L23/645 ,  H01L23/66 ,  H01L28/10 ,  H01L2223/6655 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A magnetically-coupled structure is integrated with an integrated circuit in back end-of-line (BEOL) digital CMOS fabrication processes. A differential primary (or secondary) coil is formed by patterning a thick copper (Cu) metal layer, and a single-ended secondary (or primary) coil is formed by patterning a thick aluminum (Al) top metal bonding layer. Crossovers and/or cross-unders are formed using thin metal layers. One embodiment provides a stacked balun with a differential primary input winding defined in the copper layer, directly underneath a single-ended spiral winding defined in the aluminum layer. The spiral forms the single-ended secondary output of the balun and is rotated by 90° to prevent metal shorting for its cross-under connections. Another embodiment provides a transformer with one differential primary (or secondary) coil defined in the copper layer and another differential secondary (or primary) coil defined in the aluminum layer and adding a center tap. The position of the tap is selected to compensate for phase differences and provide desired balance.

Abstract translation: 磁耦合结构与后端（BEOL）数字CMOS制造工艺中的集成电路集成。 通过图案化厚铜（Cu）金属层来形成差分初级（或次级）线圈，并且通过图案化厚铝（Al）顶部金属结合层来形成单端次级（或初级）线圈。 使用薄金属层形成交叉和/或交叉下方。 一个实施例提供了一种堆叠的平衡 - 不平衡转换器，其具有限定在铜层中的差分初级输入绕组，直接位于限定在铝层中的单端螺旋绕组下方。 螺旋形成平衡 - 不平衡变换器的单端二次输出，并旋转90°，以防止金属短路其交叉连接。 另一个实施例提供一种变压器，其具有限定在铜层中的一个差分初级（或次级）线圈和限定在铝层中的另一个差分次级（或初级）线圈，并且添加中心抽头。 选择抽头的位置来补偿相位差并提供所需的平衡。

公开(公告)号：US20170338791A1

公开(公告)日：2017-11-23

申请号：US15672070

申请日：2017-08-08

Applicant: Texas Instruments Incorporated

Inventor： Siraj Akhtar ,  Richard Francis Taylor ,  Petteri Litmanen

IPC: H03H7/42 ,  H01F27/28 ,  H01L49/02 ,  H01F27/29 ,  H01F21/12 ,  H01L23/522 ,  H01F41/04 ,  H01L23/64 ,  H01L23/66

CPC classification number: H03H7/42 ,  H01F21/12 ,  H01F27/2804 ,  H01F27/29 ,  H01F41/041 ,  H01L23/5227 ,  H01L23/645 ,  H01L23/66 ,  H01L28/10 ,  H01L2223/6655 ,  H01L2924/0002 ,  H01L2924/00

Abstract: In described examples of a magnetically coupled structure on a substrate with an integrated circuit device, the structure includes a first coil in a differential configuration, a second coil located above the first coil in a generally stacked configuration, and a center tap connection to a winding of the second coil. The first coil includes a first differential terminal, a second differential terminal, and metal windings of the first coil. The first coil's metal windings form a continuous spiral electrical path between the first and second differential terminals. The first coil's metal windings include turns and crossing connections between the turns. The turns are fabricated in an integrated circuit metal wiring level, and the crossing connections are fabricated in at least one metal level other than the metal wiring level containing the turns. The center tap is positioned to create a balanced structure.

公开(公告)号：US09735753B2

公开(公告)日：2017-08-15

申请号：US15003030

申请日：2016-01-21

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Siraj Akhtar ,  Richard Francis Taylor ,  Petteri Litmanen

IPC: H01L23/522 ,  H03H7/42 ,  H01L23/64 ,  H01L23/66 ,  H01L49/02 ,  H01F21/12 ,  H01F27/28 ,  H01F27/29 ,  H01F41/04

CPC classification number: H03H7/42 ,  H01F21/12 ,  H01F27/2804 ,  H01F27/29 ,  H01F41/041 ,  H01L23/5227 ,  H01L23/645 ,  H01L23/66 ,  H01L28/10 ,  H01L2223/6655 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A magnetically-coupled structure is integrated with an integrated circuit in back end-of-line (BEOL) digital CMOS fabrication processes. A differential primary (or secondary) coil is formed by patterning a thick copper (Cu) metal layer, and a single-ended secondary (or primary) coil is formed by patterning a thick aluminum (Al) top metal bonding layer. Crossovers and/or cross-unders are formed using thin metal layers. One embodiment provides a stacked balun with a differential primary input winding defined in the copper layer, directly underneath a single-ended spiral winding defined in the aluminum layer. The spiral forms the single-ended secondary output of the balun and is rotated by 90° to prevent metal shorting for its cross-under connections. Another embodiment provides a transformer with one differential primary (or secondary) coil defined in the copper layer and another differential secondary (or primary) coil defined in the aluminum layer and adding a center tap. The position of the tap is selected to compensate for phase differences and provide desired balance.

公开(公告)号：US10461717B2

公开(公告)日：2019-10-29

申请号：US16246643

申请日：2019-01-14

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Siraj Akhtar ,  Richard Francis Taylor ,  Petteri Litmanen

IPC: H01L23/522 ,  H03H7/42 ,  H01L23/64 ,  H01L23/66 ,  H01L49/02 ,  H01F21/12 ,  H01F27/28 ,  H01F27/29 ,  H01F41/04

Abstract: In described examples of a magnetically coupled structure on a substrate with an integrated circuit device, the structure includes a first coil in a differential configuration, a second coil located above the first coil in a generally stacked configuration, and a center tap connection to a winding of the second coil. The first coil includes a first differential terminal, a second differential terminal, and metal windings of the first coil. The first coil's metal windings form a continuous spiral electrical path between the first and second differential terminals. The first coil's metal windings include turns and crossing connections between the turns. The turns are fabricated in an integrated circuit metal wiring level, and the crossing connections are fabricated in at least one metal level other than the metal wiring level containing the turns. The center tap is positioned to create a balanced structure.

公开(公告)号：US20190149120A1

公开(公告)日：2019-05-16

申请号：US16246643

申请日：2019-01-14

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Siraj Akhtar ,  Richard Francis Taylor ,  Petteri Litmanen

IPC: H03H7/42 ,  H01F41/04 ,  H01F27/29 ,  H01F21/12 ,  H01L23/64 ,  H01F27/28 ,  H01L23/522 ,  H01L49/02 ,  H01L23/66

CPC classification number: H03H7/42 ,  H01F21/12 ,  H01F27/2804 ,  H01F27/29 ,  H01F41/041 ,  H01L23/5227 ,  H01L23/645 ,  H01L23/66 ,  H01L28/10 ,  H01L2223/6655 ,  H01L2924/0002 ,  H01L2924/00

Abstract: In described examples of a magnetically coupled structure on a substrate with an integrated circuit device, the structure includes a first coil in a differential configuration, a second coil located above the first coil in a generally stacked configuration, and a center tap connection to a winding of the second coil. The first coil includes a first differential terminal, a second differential terminal, and metal windings of the first coil. The first coil's metal windings form a continuous spiral electrical path between the first and second differential terminals. The first coil's metal windings include turns and crossing connections between the turns. The turns are fabricated in an integrated circuit metal wiring level, and the crossing connections are fabricated in at least one metal level other than the metal wiring level containing the turns. The center tap is positioned to create a balanced structure.