公开(公告)号：US20230387260A1

公开(公告)日：2023-11-30

申请号：US17826872

申请日：2022-05-27

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Sheldon Douglas HAYNIE ,  Alexei SADOVNIKOV

IPC: H01L29/66 ,  H01L29/78 ,  H01L21/3213

CPC classification number: H01L29/66681 ,  H01L29/66795 ,  H01L29/785 ,  H01L29/7816 ,  H01L21/32134 ,  H01L29/66628

Abstract: A method includes forming a gate on a semiconductor layer of a substrate. A hard mask is formed over the gate and the semiconductor layer to expose a portion of the semiconductor layer. The exposed portion of the semiconductor layer is isotropically etched away to form a recess having a depth. A first selective epitaxial growth of a first semiconductor material doped with a first dopant is performed on the semiconductor layer in the recess. A second selective epitaxial growth of a second semiconductor material doped with a second dopant is performed on the first semiconductor material in the recess. The hard mask is then removed.

公开(公告)号：US20230352580A1

公开(公告)日：2023-11-02

申请号：US17732211

申请日：2022-04-28

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Sheldon Douglas HAYNIE ,  Scott SUMMERFELT

IPC: H01L29/78 ,  H01L29/66 ,  H01L29/417

CPC classification number: H01L29/7823 ,  H01L29/66689 ,  H01L29/41775 ,  H01L29/41758 ,  H01L29/0607

Abstract: A semiconductor device includes a semiconductor substrate including a corrugated surface. A body has a first conductivity type and includes a portion extending continuously along the corrugated surface. A gate dielectric layer is on the body and extends continuously along the corrugated surface. A gate is on the gate dielectric layer, the gate extending continuously along the corrugated surface. A corrugated conformal drift region has a second conductivity type opposite from the first conductivity type, and is on and conformal with the corrugated surface of the semiconductor substrate, and extends continuously along the corrugated surface. A source has the second conductivity type and includes a portion extending continuously along the corrugated surface, the source being in contact with the body. A drain contact region electrically coupled to the drift region and having the second conductivity type.