公开(公告)号：US20170107098A1

公开(公告)日：2017-04-20

申请号：US15273423

申请日：2016-09-22

Applicant: THALES

Inventor： Fabien FILHOL ,  Pierre-Olivier LEFORT ,  Bertrand LEVERRIER ,  Régis QUER ,  Bernard CHAUMET

IPC: B81B7/00 ,  B81C1/00

CPC classification number: B81B7/0016 ,  B81B7/0048 ,  B81B7/0051 ,  B81B2203/0307 ,  B81C1/00269 ,  B81C3/001 ,  B81C2201/019 ,  H01L23/10

Abstract: A microelectromechanical system comprising an assembly of layers stacked in a stacking direction comprises an active layer made of single-crystal silicon comprising an active structure, and first and second covers defining a cavity around the active structure, the active layer interposed between the first and second covers, the second cover comprising a single layer made of single-crystal silicon. The assembly comprises a decoupling layer made of single-crystal silicon and comprising: an attaching element fastened to a carrier, a frame encircling the attaching element in the plane of the decoupling layer, and a mechanical decoupling structure connecting the frame and the attaching structure, the mechanical decoupling structure allowing the attaching element to be flexibly joined to the frame. The frame is secured to the silicon layer of the second cover and at most one film of silicon dioxide is interposed between the frame and silicon layer of the second cover.

公开(公告)号：US20150377621A1

公开(公告)日：2015-12-31

申请号：US14750862

申请日：2015-06-25

Applicant: THALES

Inventor： Bernard CHAUMET ,  Fabien FILHOL ,  Claude ROUGEOT ,  Bertrand LEVERRIER

IPC: G01C19/5621

CPC classification number: G01C19/5747 ,  G01C19/574

Abstract: A vibrating inertial sensor is provided, micro machined in a plane thin wafer, allowing the measurement of an angular position or of an angular speed. The sensor comprises two vibrating masses suspended by springs with identical stiffness in X and Y and coupled together by identical stiffness springs in X and Y, and at least excitation transducers and detection transducers disposed on at least one of the masses. The mobile assembly consisting of a vibrating mass and the parts of transducers fastened to this mass has a generally symmetric structure with respect to an axis of symmetry OX and with respect to an axis of symmetry OY.

Abstract translation: 提供振动惯性传感器，微机加工在平面薄晶片中，允许测量角位置或角速度。 该传感器包括由X和Y中具有相同刚度的弹簧悬挂的两个振动块，并且通过X和Y中相同的刚度弹簧和至少一个设置在至少一个质量块上的激励换能器和检测换能器联接在一起。 由振动块和固定到该块的换能器部分组成的移动组件相对于对称轴OX和相对于对称轴线OY具有大致对称的结构。