公开(公告)号：US10705061B2

公开(公告)日：2020-07-07

申请号：US15571792

申请日：2016-05-04

Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN

Inventor： Xudong Fan ,  Hongbo Zhu ,  Robert Nidetz ,  Katsuo Kurabayashi ,  Menglian Zhou ,  Jiwon Lee

IPC: G01N30/64 ,  G01N30/74 ,  G01N27/66 ,  G01N27/68 ,  G01N30/60

Abstract: A rapid flow-through, highly sensitive microfluidic photoionization detector (PID) which is micro-fabricated directly onto a substrate, such as a conductive silicon wafer, is provided. The microfluidic PID has an ionization chamber volume of less than 9 μL. The microfluidic PID may have a flow through design with a microfluidic channel defines a serpentine pattern on the substrate. The flow through design of the microfluidic PID results in negligible dead volume, thus allowing a shortened response time over existing commercially available designs. Such microfluidic PIDs are particularly useful with gas chromatography (GC), including microGC and multi-dimensional microGC systems. Methods for calibrating PIDs are also provided.