公开(公告)号：US09799545B2

公开(公告)日：2017-10-24

申请号：US14397297

申请日：2013-03-22

Applicant: TOCALO CO., LTD.

Inventor： Ryo Yamasaki ,  Mitsuharu Inaba ,  Kensuke Taguchi

IPC: H01L21/683 ,  C23C4/12 ,  H02N13/00 ,  H01L21/67 ,  C23C4/11 ,  C23C4/01

CPC classification number: H01L21/6833 ,  C23C4/01 ,  C23C4/11 ,  C23C4/12 ,  H01L21/67103 ,  H01L21/6831 ,  H02N13/00

Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

公开(公告)号：US20150116889A1

公开(公告)日：2015-04-30

申请号：US14397297

申请日：2013-03-22

Applicant: TOCALO CO., LTD.

Inventor： Ryo Yamasaki ,  Mitsuharu Inaba ,  Kensuke Taguchi

IPC: H01L21/683 ,  C23C4/12

CPC classification number: H01L21/6833 ,  C23C4/01 ,  C23C4/11 ,  C23C4/12 ,  H01L21/67103 ,  H01L21/6831 ,  H02N13/00

Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.

Abstract translation: 公开了一种静电卡盘和制造方法，其中不存在使用粘合剂的缺点，自由度高。 静电卡盘包括构成主卡盘主体的基板部分，形成在基板部分表面上的喷涂层的第一绝缘层，通过将导电浆料涂敷到第一绝缘层的表面而形成的电导体的加热器部分 层，形成在第一绝缘层的表面上以覆盖加热器部分的喷涂层的第二绝缘层，通过热喷涂形成于第二绝缘层的表面上的电极部分和喷涂层的介电层 形成到第二层的表面，以便覆盖电极部分，并且在不使用粘合剂的情况下降低体积电阻率。