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公开(公告)号：US11272579B2
公开(公告)日：2022-03-08
申请号：US16310797
申请日：2017-06-02
Applicant: TOCALO CO., LTD.
Inventor： Shikou Abukawa , Kensuke Taguchi , Toru Moriyama , Yasuhiro Sato , Akira Kumagai , Yu Asakimori
Abstract: Provided is a heat generating component of which volume resistivity hardly varies even if used repeatedly at a high temperature for a long period of time. Since a thin coating heater part (13) formed on a substrate part (12) is composed of a thermal sprayed coating containing TixOy (wherein, 0
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Patent Agency Ranking
公开(公告)号：US09799545B2
公开(公告)日：2017-10-24
申请号：US14397297
申请日：2013-03-22
Applicant: TOCALO CO., LTD.
Inventor： Ryo Yamasaki , Mitsuharu Inaba , Kensuke Taguchi
CPC classification number: H01L21/6833 , C23C4/01 , C23C4/11 , C23C4/12 , H01L21/67103 , H01L21/6831 , H02N13/00
Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.
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公开(公告)号：US20150116889A1
公开(公告)日：2015-04-30
申请号：US14397297
申请日：2013-03-22
Applicant: TOCALO CO., LTD.
Inventor： Ryo Yamasaki , Mitsuharu Inaba , Kensuke Taguchi
IPC: H01L21/683 , C23C4/12
CPC classification number: H01L21/6833 , C23C4/01 , C23C4/11 , C23C4/12 , H01L21/67103 , H01L21/6831 , H02N13/00
Abstract: An electrostatic chuck and a manufacturing method are disclosed in which drawbacks of using an adhesive are not existent and a freedom degree of design is high. The electrostatic chuck includes a substrate part constituting a main chuck body, a first insulating layer of a spray coating formed to the surface of the substrate part, a heater part of an electric conductor formed by applying a conductive paste to the surface of the first insulating layer, a second insulating layer of a spray coating formed to the surface of the first insulating layer so as to cover the heater part, an electrode part formed by thermal spraying to the surface of the second insulating layer and a dielectric layer of a spray coating formed to the surface of the second layer so as to cover the electrode part and lowers a volume resistivity without using an adhesive.
Abstract translation: 公开了一种静电卡盘和制造方法，其中不存在使用粘合剂的缺点，自由度高。 静电卡盘包括构成主卡盘主体的基板部分，形成在基板部分表面上的喷涂层的第一绝缘层，通过将导电浆料涂敷到第一绝缘层的表面而形成的电导体的加热器部分 层，形成在第一绝缘层的表面上以覆盖加热器部分的喷涂层的第二绝缘层，通过热喷涂形成于第二绝缘层的表面上的电极部分和喷涂层的介电层 形成到第二层的表面，以便覆盖电极部分，并且在不使用粘合剂的情况下降低体积电阻率。
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公开(公告)号：US20240043982A1
公开(公告)日：2024-02-08
申请号：US18266481
申请日：2021-11-18
Applicant: TOCALO Co., Ltd. , FUJIMI INCORPORATED
Inventor： Yasuhiro Shiojiri , Tatsuo Suidzu , Kensuke Taguchi , Hiroaki Mizuno , Takaya Masuda
CPC classification number: C23C4/04 , H01J37/32477 , C23C4/134
Abstract: There is provided a thermal spray coating which has excellent plasma erosion resistance, which protects members of a plasma etching device from plasma erosion over a long period of term, and which can contribute to the stable production of devices and a longer life of members. The thermal spray material which is one aspect of this invention contains a composite compound containing a rare earth fluoride in the proportion of 40 mol % or more and 80 mol % or less, a magnesium fluoride in the proportion of 10 mol % or more and 40 mol % or less, and a calcium fluoride in the proportion of 0 mol % or more and 40 mol % or less.
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公开(公告)号：US11631574B2
公开(公告)日：2023-04-18
申请号：US16764042
申请日：2018-10-29
Applicant: TOCALO CO., LTD.
Inventor： Shikou Abukawa , Kensuke Taguchi , Yu Asakimori , Ryutaro Kawamura
IPC: H01J37/32 , H01L21/683 , H01L21/687 , H05B1/02 , H05B3/03 , H05B3/28
Abstract: The heater component (1) has a substrate part (2), and a thin coating heater (4) which is equipped outside this substrate part (2) and generates heat by power supply. The thin coating heater (4) is formed of a thermal sprayed coating. The thin coating heater (4) has a heater body (10) and a heater extension part (11). The heater body (10) is arranged on a first end face (2a) of the substrate part (2). The heater extension part (11) is extended from the heater body (10) to a second end face (2b) of the substrate part (2) through a side surface (2c) of the substrate part (2). A tip part (11s) of the heater extension part (11) is a heater power supplying part (12) for supplying electric power to the heater body (10).
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公开(公告)号：US12046459B2
公开(公告)日：2024-07-23
申请号：US18057187
申请日：2022-11-18
Applicant: TOCALO CO., LTD.
Inventor： Shikou Abukawa , Kensuke Taguchi , Yu Asakimori , Ryutaro Kawamura
IPC: H01J37/32 , H01L21/683 , H01L21/687 , H05B1/02 , H05B3/03 , H05B3/28
CPC classification number: H01J37/32724 , H01L21/6833 , H01L21/68757 , H05B1/0233 , H05B3/03 , H05B3/283 , H01J2237/3341 , H05B2203/013
Abstract: A heater component has a substrate part and a thin coating heater which is equipped outside this substrate part and generates heat by power supply. The thin coating heater is formed of a thermal sprayed coating. The thin coating heater has a heater body and a heater extension part. The heater body is arranged on a first end face of the substrate part. The heater extension part is extended from the heater body to a second end face of the substrate part through a side surface of the substrate part. A tip part of the heater extension part is a heater power supplying part for supplying electric power to the heater body.
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