公开(公告)号：US20220105535A1

公开(公告)日：2022-04-07

申请号：US17489045

申请日：2021-09-29

Applicant: Tokyo Electron Limited

Inventor： Kotaro TSURUSAKI ,  Koji YAMASHITA ,  Yusuke YAMAMOTO ,  Koji TANAKA ,  Kouzou KANAGAWA

IPC: B05C3/109 ,  B05D1/20 ,  B05C11/00

Abstract: A substrate processing apparatus includes a processing tank, a holder, an organic solvent supply, a drainage port, a gas supply, and an exhaust port. The processing tank stores an aqueous layer. The holder holds a substrate. The organic solvent supply supplies an organic solvent onto the aqueous layer to form a liquid layer of the organic solvent. The drainage port discharges the aqueous layer from a bottom wall of the processing tank and causes the liquid layer of the organic solvent to descend from above the substrate to below the substrate. The gas supply supplies a gas of a water repellent agent to the liquid layer from above the processing tank while the liquid layer descends. The exhaust port is exposed on a side wall of the processing tank by the descending of the liquid layer and discharges the gas of the water repellent gas.

公开(公告)号：US20150279702A1

公开(公告)日：2015-10-01

申请号：US14736582

申请日：2015-06-11

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshinobu FURUSHO ,  Takahiro OOKUBO ,  Kousuke YOSHIHARA ,  Yusuke YAMAMOTO ,  Steffen HORNIG

IPC: H01L21/67 ,  B01D35/02 ,  B05C11/10 ,  B01D29/56

CPC classification number: B05D1/02 ,  B01D29/56 ,  B01D35/02 ,  B05C9/06 ,  B05C11/10 ,  F17D1/00 ,  H01L21/67017 ,  H01L21/6715 ,  H01L21/67173 ,  H01L21/67178 ,  Y10T137/794

Abstract: A chemical supply system comprises: a first container and a second container for storing a chemical solution; a first pump, located on a first pipe connecting the first and second containers, for directing the solution stored in the first container to the second container; and a first filter, located in the first pipe, for filtering the solution flowing through the first pipe from the first container toward the second container. The system further includes: a second pipe for connecting the first container and the second container; and a second pump, located on the second pipe, for directing the solution stored in the second container to the first container.

Abstract translation: 化学品供应系统包括：第一容器和用于储存化学溶液的第二容器; 第一泵，位于连接第一和第二容器的第一管上，用于将存储在第一容器中的溶液引导到第二容器; 以及位于第一管道中的第一过滤器，用于将从第一容器流过第一管道的溶液过滤到第二容器。 该系统还包括：用于连接第一容器和第二容器的第二管; 以及位于第二管上的用于将存储在第二容器中的溶液引导到第一容器的第二泵。