公开(公告)号：US20220228850A1

公开(公告)日：2022-07-21

申请号：US17614880

申请日：2020-05-25

Applicant: TOPCON CORPORATION ,  RIKEN

Inventor： Homare MOMIYAMA ,  Yoshiaki SASAKI ,  Isao YOSHIMINE ,  Chiko OTANI ,  Tetsuya YUASA

IPC: G01B9/02 ,  G01B9/02091

Abstract: Provided is an optical interference measuring apparatus including a measuring unit for acquiring an interferogram of an interference wave obtained by irradiating a measuring target and a reference surface with electromagnetic waves and causing reflected waves from a reflecting surface of the measurement target and reflected waves from the reference surface to interfere and a signal processing unit for configuring an intensity profile in the depth direction by performing Fourier transform of the interferogram. The signal processing unit is configured to estimate a parameter for a model formula for an assumed surface count, based on the model formula of an interferogram when it is assumed that the measurement target has a predetermined structure, to select an optimal model by a statistical technique from the model formula to which a parameter estimated for the assumed surface count is applied, and to reconfigure an intensity profile based on the optimal model.

公开(公告)号：US20220221266A1

公开(公告)日：2022-07-14

申请号：US17615065

申请日：2020-05-25

Applicant: TOPCON CORPORATION ,  RIKEN

Inventor： Homare MOMIYAMA ,  Yoshiaki SASAKI ,  Isao YOSHIMINE ,  Chiko OTANI ,  Tetsuya YUASA

IPC: G01B9/02 ,  G01B9/02091 ,  G01B9/02055

Abstract: Provided is an optical interference measuring apparatus including a measuring unit configured to acquire an interferogram of an interference wave by irradiating a measurement target and a reference surface with electromagnetic waves and causing a reflected wave from a reflecting surface of the measurement target to interfere with a reflected wave from the reference surface and a signal processing unit configured to configure an intensity profile in a depth direction by performing Fourier transform of the interferogram. The signal processing unit includes at least one of a first noise removal unit to remove noise with filtering by deleting data in regions other than a pass region which is a region set with reference to a measurement target installation position from the intensity profile and a second noise removal unit to remove noise by performing singular value decomposition of the interferogram to delete noise component.

公开(公告)号：US20170205233A1

公开(公告)日：2017-07-20

申请号：US15407804

申请日：2017-01-17

Applicant: TOPCON CORPORATION

Inventor： Homare MOMIYAMA ,  Akinobu SUGIURA ,  Hideyuki MATSUMOTO

IPC: G01C9/20 ,  G01C9/06 ,  G01F23/14

CPC classification number: G01C9/20 ,  G01C9/06 ,  G01C2009/066 ,  G01F23/14

Abstract: A method of designing a container of a liquid reflection inclination sensor includes a liquid surface calculating step (S1) that calculates a shape of a liquid surface of a liquid in a horizontal direction “x” and a vertical direction “y” by utilizing the Young-Laplace formula and the hydrostatic pressure formula, the liquid surface formed on a plate extending vertically and infinitely with respect to a horizontal part of the liquid surface, an optical simulation step (S2) that obtains a light receiving pattern by reflecting a dark field pattern (4′) irradiated from an imaginary light source (2′) on an imaginary mirror plane (9a′) having the shape of the liquid surface, and a container adjusting step (S3-S4) that adjusts a shape of a cylindrical container (10) for enclosing the liquid by judging whether image accuracy of the light receiving pattern satisfies demanded sensor accuracy.