公开(公告)号：US20140245956A1

公开(公告)日：2014-09-04

申请号：US14351003

申请日：2012-10-12

Applicant: TOYO TANSO CO., LTD.

Inventor： Masaaki Kita ,  Takeshi Kubota ,  Hiroyuki Hirano

IPC: C30B35/00 ,  C23C16/32 ,  C23C16/04

CPC classification number: C30B35/00 ,  C04B41/009 ,  C04B41/5057 ,  C04B41/5059 ,  C04B41/87 ,  C23C16/042 ,  C23C16/325 ,  C23C16/4404 ,  C23C16/4588 ,  C04B35/52 ,  C04B41/4531 ,  C04B41/4572

Abstract: A masking portion (recessed portion) 20 is provided at the center of a rear surface of a carbonaceous substrate 10. The masking portion 20 includes a first bore portion 20a and a second bore portion 20b. The first bore portion 20a has an inner wall in which a female screw portion 21 is formed. A male screw portion 7a of a masking jig 7 is screw-fitted to the female screw portion 21. The masking jig 7 is fixed to a film forming jig 2. The carbonaceous substrate is thus supported in a standing posture, and the carbonaceous substrate is provided, on a surface, with a firm such as a SiC film or a TaC film except for the recessed portion by introducing gas into the apparatus in this supported state.

Abstract translation: 掩模部分（凹部）20设置在碳质基材10的后表面的中心。掩模部分20包括第一孔部分20a和第二孔部分20b。 第一孔部20a具有形成有内螺纹部21的内壁。 掩模夹具7的外螺纹部分7a螺纹配合到阴螺纹部分21.掩模夹具7固定在成膜夹具2上。因此，碳质基底以站立姿态被支撑，碳质基底是 在该支撑状态下，通过将气体引入到装置中，在表面上提供除了凹部之外的诸如SiC膜或TaC膜之类的公司。