公开(公告)号：US09856133B2

公开(公告)日：2018-01-02

申请号：US14891033

申请日：2014-05-21

Applicant: TRONICS MICROSYSTEMS S.A.

Inventor： François-Xavier Boillot ,  Rémi Laoubi

IPC: G01P15/08 ,  B81B3/00 ,  G01C19/5747 ,  B81B7/02 ,  G01C19/5762

CPC classification number: B81B3/0021 ,  B81B3/0048 ,  B81B7/02 ,  G01C19/5747 ,  G01C19/5762 ,  G01P2015/0837

Abstract: A sensor which measures parameters such as acceleration, rotation and magnetic field comprises a substrate defining a plane and at least one sensing plate suspended above the substrate for movement in a sensing direction orthogonal to the substrate plane. A detection arm suspended above the substrate is rotational about an axis parallel to the substrate plane. An out-of-plane coupling structure couples the sensing plate to the detection arm for generating rotational movement of the detection arm, which is detected by a rotation detection structure. A pivot element arranged at a distance from the coupling structure facilitates tilting movement of the sensing plate.