公开(公告)号：US20140352431A1

公开(公告)日：2014-12-04

申请号：US14367670

申请日：2012-12-20

Applicant: TRONICS MICROSYSTEMS S.A.

Inventor： Jacques Leclerc

IPC: G01P15/18 ,  G01P15/08 ,  G01C19/5712

CPC classification number: G01P15/18 ,  G01C19/5712 ,  G01P15/08 ,  G01P15/125 ,  G01P15/14 ,  G01P2015/0862

Abstract: A resonator micro-electronic inertial sensor, preferably a micro-electromechanical system (MEMS) sensor (e.g. a gyro), for detecting linear accelerations and rotation rates in more than one axis comprises: a proof-mass system (21.1, 21.4) flexibly suspended above a substrate for performing a rotational in-plane vibration about a central axis (24,) a drive electrode system (D1, . . . D4) for driving the proof-mass system (21.1, . . . 21.4) to perform said rotational in-plane vibration, and a sensing electrode system (S1, S8) connected to the proof-mass system (21.1, . . . 21.4) for detecting linear accelerations or rotation rates in more than one axis. Said proof-mass system (21.1 21.4) has more than two proof-mass elements flexibly coupled (25.1a, 25.1b) to each other. Each proof-mass element (21.1, 21.2) is directly and flexibly connected (23.1, 25.1a, 25.1b) to an anchor structure (22) on the substrate (32). The proof-mass elements (21.1, . . . 21.4) are preferably arranged In a ring-shaped configuration between an inner and an outer radius (R1, R2) with respect to the central axis (24).

Abstract translation: 谐振器微电子惯性传感器，优选微机电系统（MEMS）传感器（例如，陀螺仪），用于检测多于一个轴线中的线性加速度和旋转速率包括：柔性悬挂的校验质量系统（21.1,21.4） 在用于驱动所述校验质量系统（21.1，...，21.4）的驱动电极系统（D1 ... D4）的中心轴线（24）上执行旋转平面内振动的基板上方，以执行所述转动 平面振动以及连接到校验质量系统（21.1，...，21.4）的检测电极系统（S1，S8），用于检测多于一个轴的线性加速度或旋转速度。 所述证明质量系统（21.1 21.4）具有两个彼此柔性耦合（25.1a，25.1b）的证明质量元件。 每个证明质量元件（21.1,21.2）直接和柔性地连接（23.1,25.1a，25.1b）到衬底（32）上的锚结构（22）。 证明质量元件（21.1，...，21.4）优选地以相对于中心轴线（24）的内半径（R 1，R 2）和外半径（R 1，R 2）之间的环形构造布置。

公开(公告)号：US20140224016A1

公开(公告)日：2014-08-14

申请号：US14345970

申请日：2012-09-20

Applicant: TRONICS MICROSYSTEMS S.A.

Inventor： Jacques Leclerc

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A resonator micro-electronic gyro, preferably a micro-electromechanical system (MEMS) gym comprises a first and a second resonator mass (1, 2) suspended for rotational vibration. The two masses (1, 2) are flexibly connected by four mechanical coupling elements (4, 5, 6, 7) for anti-phase vibration. There is at least one positive and at least one negative sensing electrode (S11+, S11−, S21+, S21−) on each resonator mass (1, 2) for detecting an out-of-plane output movement of the masses (1, 2). A detection circuit is connected to be said positive and negative sensing electrodes and determines the output signal by differential detection of the signals on the basis of the following formula: Sxout=({S21+}−M{S11+})−({S21−}−M{S11−}), wherein {S21+}, {S21−} sensing electrode signals of the positive and negative detection electrode of the second mass, respectively; {S11+}, {S11−} sensing electrode signals of the positive and negative detection electrode of the first mass, respectively, μ=compensation factor.

Abstract translation: 谐振器微电子陀螺仪，优选微机电系统（MEMS）健身房包括悬挂用于旋转振动的第一和第二谐振器质量块（1,2）。 两个质量（1,2）通过四个用于反相振动的机械耦合元件（4,5,6,7）灵活连接。 在每个谐振器块（1,2）上存在至少一个正和至少一个负感测电极（S11 +，S11-，S21 +，S21-），用于检测质量（1,2）的平面外输出运动 ）。 连接检测电路为所述正极和负极检测电极，并根据下列公式通过差分检测来确定输出信号：Sxout =（{S21 +} -M {S11 +}） - （{S21-} -M {S11-}），其中分别为第二质量的正和负检测电极的{S21 +}，{S21-}感测电极信号; {S11 +}，{S11-}分别检测第一质量的正极和负极检测电极的电极信号，μ=补偿因子。