公开(公告)号：US20140320015A1

公开(公告)日：2014-10-30

申请号：US14325499

申请日：2014-07-08

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Pawel Ozimek ,  Rafal Bugyi ,  Robert Dziuba ,  Andrzej Klimczak ,  Marcin Zelechowski

IPC: H01J37/32

CPC classification number: H01J37/32064 ,  H01J37/32091 ,  H01J37/32174 ,  H01M10/42 ,  H01M10/425 ,  H01M10/4264 ,  H01M10/44 ,  H05H1/36 ,  Y02E60/12

Abstract: According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/interrupting power to the load; a first electrical nonlinear device; an energy storing device arranged in series with the first electrical nonlinear device; and a pre-charging circuit in operative connection with the energy storing device, the pre-charging circuit configured to charge the energy storing device to a pre-determined energy level while power to the load is enabled.

Abstract translation: 根据本发明的第一方面，通过等离子体处理电源电路来实现减少存储在负载中的电能或用于连接电源与负载的一个或多个引线中的电能，该等离子体处理电源电路包括与至少一个 导线用于启用/中断负载电源; 第一电气非线性装置; 与第一电气非线性装置串联布置的能量存储装置; 以及与所述能量存储装置可操作地连接的预充电电路，所述预充电电路被配置为在能量到所述负载的电力的同时将所述能量存储装置充电到预定的能量水平。

公开(公告)号：US09818579B2

公开(公告)日：2017-11-14

申请号：US14325499

申请日：2014-07-08

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Pawel Ozimek ,  Rafal Bugyi ,  Robert Dziuba ,  Andrzej Klimczak ,  Marcin Zelechowski

IPC: H01J37/32 ,  H01M10/42 ,  H01M10/44 ,  H05H1/36

CPC classification number: H01J37/32064 ,  H01J37/32091 ,  H01J37/32174 ,  H01M10/42 ,  H01M10/425 ,  H01M10/4264 ,  H01M10/44 ,  H05H1/36 ,  Y02E60/12

Abstract: According to a first aspect of the present invention, reducing electrical energy stored in a load or in one or more leads for connecting a power supply with the load is achieved by plasma process power circuitry including a switch in operative connection with at least one of the leads for enabling/interrupting power to the load; a first electrical nonlinear device; an energy storing device arranged in series with the first electrical nonlinear device; and a pre-charging circuit in operative connection with the energy storing device, the pre-charging circuit configured to charge the energy storing device to a pre-determined energy level while power to the load is enabled.

公开(公告)号：US11538670B2

公开(公告)日：2022-12-27

申请号：US16664243

申请日：2019-10-25

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Jan Peter Engelstaedter ,  Pawel Ozimek ,  Krzysztof Ruda ,  Jakub Swiatnicki

IPC: H01J37/24 ,  H05H1/24 ,  H01J37/32 ,  C23C16/455 ,  C23C16/50 ,  H02M5/458 ,  H02M1/32 ,  H02M7/06 ,  H02M7/5387 ,  H02M1/00

Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port.

公开(公告)号：US20210159872A1

公开(公告)日：2021-05-27

申请号：US17163605

申请日：2021-02-01

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Andrzej Klimczak ,  Marcin Golan ,  Pawel Ozimek

IPC: H03H7/42 ,  H03F3/26

Abstract: A balun configured for a power range between 500 W and 5 kW output includes a balanced signal port comprising a first connection and a second connection and further includes a single-ended signal port comprising a third connection and a fourth connection, the fourth connection being connected to ground. In addition, the balun includes a first capacitor disposed between the first connection and a first end of a first resistor and a second capacitor disposed between the second connection and the first end of the first resistor. A second end of the first resistor is connected to ground.

公开(公告)号：US11955947B2

公开(公告)日：2024-04-09

申请号：US17163605

申请日：2021-02-01

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Andrzej Klimczak ,  Marcin Golan ,  Pawel Ozimek

IPC: H03F3/26 ,  H03H7/42

CPC classification number: H03H7/42 ,  H03F3/265 ,  H03F2200/09 ,  H03F2200/451

Abstract: A balun configured for a power range between 500 W and 5 kW output includes a balanced signal port comprising a first connection and a second connection and further includes a single-ended signal port comprising a third connection and a fourth connection, the fourth connection being connected to ground. In addition, the balun includes a first capacitor disposed between the first connection and a first end of a first resistor and a second capacitor disposed between the second connection and the first end of the first resistor. A second end of the first resistor is connected to ground.

公开(公告)号：US20200058475A1

公开(公告)日：2020-02-20

申请号：US16664243

申请日：2019-10-25

Applicant: TRUMPF Huettinger Sp. z o. o.

Inventor： Jan Peter Engelstaedter ,  Pawel Ozimek ,  Krzysztof Ruda ,  Jakub Swiatnicki

IPC: H01J37/32 ,  H02M5/458 ,  C23C16/50 ,  C23C16/455

Abstract: A power converter is capable to convert an electrical input power into a bipolar output power and to deliver the bipolar output power to at least two independent plasma processing chambers. The power converter includes: a power input port for connection to an electrical power delivering grid, at least two, preferably more than two, power output ports each for connection to one of the plasma process chambers, and a controller configured to control the power converter to deliver the bipolar output power to the power output ports, using one or more control parameters selected from a list comprising: power, voltage, current, excitation frequency, and threshold for protective measures, such that at least one of the control parameters at a first power output port is different from the corresponding control parameter at a different power output port.