公开(公告)号：US06603786B1

公开(公告)日：2003-08-05

申请号：US09538284

申请日：2000-03-30

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Masaki Hirayama

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Masaki Hirayama

IPC分类号： H01S322

CPC分类号： H01S3/0975 ,  H01S3/08 ,  H01S3/225

摘要： This invention relates to an excimer laser oscillation apparatus which has a laser chamber which stores a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, and F2 gas, and in which an inner surface thereof has a reflection-free surface with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, an optical resonator which is made up of a pair of reflection mirrors arranged to sandwich the laser chamber therebetween, and in which the reflectance of the reflection mirror on the output side is 90% or more and microwave introduction means, arranged on the laser chamber, for continuously exciting the laser gas in the laser chamber.

摘要翻译： 准分子激光振荡装置技术领域本发明涉及一种准分子激光振荡装置，其具有：激光室，其存储含有选自Kr，Ar和Ne的至少一种惰性气体和F2气体的气体混合物的激光气体， 其内表面相对于248nm，193nm或157nm的所需波长的光具有无反射的表面，并且内表面的最上表面由氟化物，由以下组成的光谐振器组成： 一对反射镜，其布置成将激光室夹在其间，并且其中输出侧的反射镜的反射率为90％以上，并且布置在激光室上的微波引入装置用于连续激发激光中的激光气体 房间。

公开(公告)号：US06331994B1

公开(公告)日：2001-12-18

申请号：US08893977

申请日：1997-07-16

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Masaki Hirayama

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka ,  Masaki Hirayama

IPC分类号： H01S3097

CPC分类号： H01S3/0975 ,  H01S3/08 ,  H01S3/225

摘要： This invention relates to an excimer laser oscillation apparatus which has a laser chamber which stores a laser gas containing a gas mixture of at least one inert gas selected from the group consisting of Kr, Ar, and Ne, and F2 gas, and in which an inner surface thereof has a reflection-free surface with respect to light of a desired wavelength of 248 nm, 193 nm, or 157 nm, and the uppermost surface of the inner surface consists of a fluoride, an optical resonator which is made up of a pair of reflection mirrors arranged to sandwich the laser chamber therebetween, and in which the reflectance of the reflection mirror on the output side is 90% or more and microwave introduction means, arranged on the laser chamber, for continuously exciting the laser gas in the laser chamber.

摘要翻译： 准分子激光振荡装置技术领域本发明涉及一种准分子激光振荡装置，其具有：激光室，其存储含有选自Kr，Ar和Ne的至少一种惰性气体和F2气体的气体混合物的激光气体， 其内表面相对于248nm，193nm或157nm的所需波长的光具有无反射的表面，并且内表面的最上表面由氟化物，由以下组成的光谐振器组成： 一对反射镜，其布置成将激光室夹在其间，并且其中输出侧的反射镜的反射率为90％以上，并且布置在激光室上的微波引入装置用于连续激发激光中的激光气体 房间。

公开(公告)号：US5210434A

公开(公告)日：1993-05-11

申请号：US857592

申请日：1992-04-24

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

IPC分类号： H01L27/146 ,  H01L31/11

CPC分类号： H01L31/1105 ,  H01L27/14681 ,  Y10T307/773

摘要： A photoelectric converter comprising a photosensor element, a typical example of the photosensor element comprising: a transistor including an n or n.sup.+ collector region an n.sup.- region disposed contiguous to the collector region, a p base region disposed contiguous to the n.sup.- region, an n.sup.+ emitter region disposed contiguous to the base region, and a first electrode connected to the emitter region; and a storage capacitor constituted by the base region, an electrically insulating region disposed contiguous to the base region, and a second electrode connected to the electrically insulating region; Whereby the base region is held in a floating state. A photogenerated charge is stored in the base region by controlling the potential of the base region and an electric signal corresponding to the charge stored in the base region is subsequently output from the first electrode.

摘要翻译： 一种光电转换器，包括光电传感器元件，该光电传感器元件的典型实例包括：晶体管，包括n或n +集电极区域，邻近集电极区域设置的n区域，邻近n区域设置的ap基极区域， n +发射极区域和与发射极区域连接的第一电极; 以及由所述基极区域构成的保持电容器，与所述基极区域邻接设置的电绝缘区域和与所述电绝缘区域连接的第二电极; 其中基地区保持在浮动状态。 通过控制基极区域的电位，在基极区域中存储光生电荷，随后从第一电极输出对应于存储在基极区域中的电荷的电信号。

公开(公告)号：US06282221B1

公开(公告)日：2001-08-28

申请号：US08891972

申请日：1997-07-11

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

IPC分类号： H01S322

CPC分类号： H01S3/0388 ,  H01S3/0305 ,  H01S3/225

摘要： An excimer laser oscillation apparatus comprises a laser chamber for storing a laser gas, a pair of electrodes arranged in the chamber, and a voltage application circuit for applying a voltage to the pair of electrodes to excite the laser gas. A fluorine passivation film is formed on an inner surface of said laser chamber. The excimer laser apparatus further has a circuit for applying a voltage to the pair of electrodes to flow a current that exceeds a light-emission threshold value between the pair of electrodes while alternately changing a flowing direction thereof. And, the pair of electrodes have an oxygen content of not more than 10 ppm.

摘要翻译： 准分子激光振荡装置包括用于存储激光气体的激光室，布置在腔室中的一对电极，以及用于向一对电极施加电压以激发激光气体的电压施加电路。 在所述激光室的内表面上形成氟钝化膜。 准分子激光装置还具有用于向一对电极施加电压以在一对电极之间流过超过发光阈值的电流同时交替改变其流动方向的电路。 并且，该对电极的氧含量不大于10ppm。

公开(公告)号：US4791469A

公开(公告)日：1988-12-13

申请号：US1580

申请日：1987-01-08

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

IPC分类号： H01L27/146 ,  H01L31/11 ,  H01L27/14 ,  H01L31/00

CPC分类号： H01L31/1105 ,  H01L27/14681

摘要： A photoelectric converter comprising a photosensor element, a typical example of the photosensor element comprising: a transistor including an n or n.sup.+ collector region an n.sup.- region disposed contiguous to the collector region, a p base region disposed contiguous to the n.sup.- region, an n.sup.+ emitter region disposed contiguous to the base region, and a first electrode connected to the emitter region; and a storage capacitor constituted by the base region, an electrically insulating region disposed contiguous to the base region, and a second electrode connected to the electrically insulating region; whereby the base region is held in a floating state. A photogenerated charge is stored in the base region by controlling the potential of the base region and an electric signal corresponding to the charge stored in the base region is subsequently output from the first electrode.

公开(公告)号：US4686554A

公开(公告)日：1987-08-11

申请号：US625130

申请日：1984-06-27

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

IPC分类号： H01L27/146 ,  H01L31/11 ,  H01L27/14 ,  H01L31/00

CPC分类号： H01L31/1105 ,  H01L27/14681

摘要： A photoelectric converter comprising a photosensor element, a typical example of the photosensor element comprising: a transistor including an n or n.sup.+ collector region an n.sup.- region disposed contiguous to the collector region, a p base region disposed contiguous to the n.sup.- region, an n.sup.+ emitter region disposed contiguous to the base region, and a first electrode connected to the emitter region; and a storage capacitor constituted by the base region, an electrically insulating region disposed contiguous to the base region, and a second electrode connected to the electrically insulating region; whereby the base region is held in a floating state. A photogenerated charge is stored in the base region by controlling the potential of the base region and an electric signal corresponding to the charge stored in the base region is subsequently output from the first electrode.

公开(公告)号：US06847672B2

公开(公告)日：2005-01-25

申请号：US09985707

申请日：2001-11-06

申请人： Tadahiro Ohmi ,  Hiroshi Osawa ,  Nobuyoshi Tanaka ,  Kazuhide Ino ,  Toshikuni Shinohara ,  Yasuyuki Shirai ,  Masaki Hirayama

发明人： Tadahiro Ohmi ,  Hiroshi Osawa ,  Nobuyoshi Tanaka ,  Kazuhide Ino ,  Toshikuni Shinohara ,  Yasuyuki Shirai ,  Masaki Hirayama

IPC分类号： H01S5/30 ,  H01S3/036 ,  H01S3/22 ,  G03B27/42 ,  G03B27/54 ,  H01S3/03 ,  H01S3/223

CPC分类号： H01S3/036

摘要： A gas supply path structure forms a fluid path for allowing a laser gas to flow into or out of a pair of fluid inlet and outlet 11a and a laser gas is controlled to a predetermined subsonic speed at a throat portion. Gas supplies for controlling the speed of the gas are connected each to the fluid inlet and to the fluid outlet of the gas supply path structure and, together with a cooling device, compose a circulation system for controlling the speed and pressure of the laser gas at the fluid inlet and/or at the fluid outlet.

摘要翻译： 气体供给路径结构形成用于允许激光气体流入或流出一对流体入口和出口11a的流体路径，并且在喉部处将激光气体控制到预定的亚音速。 用于控制气体速度的气体供应装置连接到流体入口和气体供给路径结构的流体出口，并且与冷却装置一起构成用于控制激光气体的速度和压力的循环系统 流体入口和/或在流体出口处。

公开(公告)号：US5604364A

公开(公告)日：1997-02-18

申请号：US472278

申请日：1995-06-07

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

IPC分类号： H01L27/146 ,  H01L31/11 ,  H01L31/00

CPC分类号： H01L31/1105 ,  H01L27/14681 ,  Y10T307/773

摘要： A photoelectric converter comprising a photosensor element, a typical example of the photosensor element comprising: a transistor including an n or n.sup.+ collector region an n.sup.- region disposed contiguous to the collector region, a p base region disposed contiguous to the n.sup.- region, an n.sup.+ emitter region disposed contiguous to the base region, and a first electrode connected to the emitter region; and a storage capacitor constituted by the base region, an electrically insulating region disposed contiguous to the base region, and a second electroce connected to the electrically insulating region; whereby the base region is held in a floating state. A photogenerated is stored in the base region by controlling the potential of the base region and an electric signal corresponding to the charge stored in the base region is subsequently output from the first electrode.

摘要翻译： 一种光电转换器，包括光电传感器元件，该光电传感器元件的典型示例包括：晶体管，包括n或n +集电极区域，邻近集电极区域设置的n-区域，邻近n区域设置的ap基极区域，n + 发射极区域，设置为邻近所述基极区域;以及第一电极，连接到所述发射极区域; 以及由所述基极区域构成的保持电容器，与所述基极区域邻接设置的电绝缘区域和与所述电绝缘区域连接的第二电极; 由此基部区域保持在浮置状态。 光电产生器通过控制基极区域的电位而存储在基极区域中，并且随后从第一电极输出对应于存储在基极区域中的电荷的电信号。

公开(公告)号：US5563431A

公开(公告)日：1996-10-08

申请号：US25638

申请日：1993-03-02

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

IPC分类号： H01L27/146 ,  H01L31/11 ,  H01L27/14 ,  H01L31/00

CPC分类号： H01L31/1105 ,  H01L27/14681 ,  Y10T307/773

摘要： A photoelectric converter is adapted for an accumulation operation, readout operation and refresh operation. The photoelectric converter includes a transistor including a control electrode region having a semiconductor of a first conductivity type, a first main electrode region comprising a semiconductor of a second conductivity type different from the first conductivity type and disposed electrically connectable to an output circuit including a capacitive load, and a second main electrode region of the second conductivity type, the control electrode region being adapted for accumulating carriers in response to light energy received. Refresh is provided for extinguishing the accumulated carriers while holding the first main electrode region at a reference potential during the refresh operation after the readout operation for reading out a signal based on the accumulated carriers. The refresh is adapted for providing a potential to the control electrode region independently of the first and second main electrode regions from a reference potential source to thereby forward-bias a junction between the control electrode region and the first main electrode region held at the reference potential. The second main electrode region is reverse-biased with respect to the control electrode region during respective periods of the accumulation operation, readout operation, and refresh operation.

摘要翻译： 光电转换器适用于累加操作，读出操作和刷新操作。 光电转换器包括晶体管，其包括具有第一导电类型的半导体的控制电极区域，第一主电极区域包括不同于第一导电类型的第二导电类型的半导体，并且被布置为可电连接到包括电容 负载和第二导电类型的第二主电极区域，所述控制电极区域适于响应于所接收的光能而累积载流子。 提供刷新以在基于累积的载波读出信号的读出操作之后在刷新操作期间将第一主电极区域保持在基准电位的同时熄灭累积载体。 该刷新适用于从参考电位源独立于第一和第二主电极区域向控制电极区域提供电位，从而对控制电极区域和保持在参考电位的第一主电极区域之间的接合进行正向偏置 。 在累积操作，读出操作和刷新操作的各个周期期间，第二主电极区域相对于控制电极区域被反向偏置。

公开(公告)号：US4916512A

公开(公告)日：1990-04-10

申请号：US250246

申请日：1988-09-28

申请人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

发明人： Tadahiro Ohmi ,  Nobuyoshi Tanaka

IPC分类号： H01L27/146 ,  H01L31/11

CPC分类号： H01L31/1105 ,  H01L27/14681

摘要： A photoelectric converter comprising a photosensor element, a typical example of the photosensor element comprising: a transistor including an n or n.sup.+ collector region an n.sup.- region disposed contiguous to the collector region, a p base region disposed contiguous to the n.sup.- region, an n.sup.+ emitter region disposed contiguous to the base region, and a first electrode connected to the emitter region; and a storage capacitor constituted by the base region, an electrically insulating region disposed contiguous to the base region, and a second electrode connected to the electrically insulating region; whereby the base region is held in a floating state. A photogenerated charge is stored in the base region by controlling the potential of the base region and an electric signal corresponding to the charge stored in the base region is subsequently output from the first electrode.