公开(公告)号：US06766210B2

公开(公告)日：2004-07-20

申请号：US10222852

申请日：2002-08-19

申请人： Tae-Ha Jun ,  Hee-Sun Chae ,  Kyung-Bo Sim ,  Jong-Hwan Weon

发明人： Tae-Ha Jun ,  Hee-Sun Chae ,  Kyung-Bo Sim ,  Jong-Hwan Weon

IPC分类号： G06F1900

CPC分类号： G05B19/4184 ,  G05B2219/36542 ,  Y02P90/14 ,  Y02P90/18

摘要： A method for preventing process errors in a semiconductor fabricating process allows only a few authorized engineers to release interlocks of semiconductor fabricating equipment when a count of interlock occurrences exceeds a predetermined number within a predetermined period of time. By allowing a semiconductor fabricating equipment operator only limited ability to reset equipment interlocks, repeated interlock conditions caused by test specification failures may be over-ridden only a predetermined number of times before the semiconductor fabricating equipment is disabled completely. The disabled semiconductor fabricating equipment may only be re-enabled using an authorization code, which is only made available to selected personnel, thereby ensuring that necessary repairs and corrections have been implemented on the semiconductor fabricating equipment.

摘要翻译： 一种防止半导体制造工艺中的工艺误差的方法允许只有少数授权的工程师在预定的时间内互锁次数超过预定数量时才能释放半导体制造设备的互锁。 通过允许半导体制造设备操作者仅限于重置设备互锁的能力，在半导体制造设备完全禁用之前，由测试规范故障引起的重复互锁条件可能会超过预定次数。 禁用的半导体制造设备只能使用授权码重新启用，该授权码仅对选定的人员可用，从而确保在半导体制造设备上已经实施了必要的修理和更正。