公开(公告)号：US09496157B2

公开(公告)日：2016-11-15

申请号：US14079945

申请日：2013-11-14

Applicant: Taiwan Semiconductor Manufacturing CO., LTD.

Inventor： Teng-Da Hung ,  Liang-Chang Hsieh ,  Chun-Lung Lin ,  Hsin-Hung Chi ,  Yun-Wen Chu ,  Jiun-Wei Su

IPC: H01L21/00 ,  H01L21/67

CPC classification number: H01L21/67115 ,  H01L21/6719

Abstract: An ultraviolet curing apparatus includes a chamber, a gas flow generator, and an ultraviolet lamp. The gas flow generator includes a top liner and a bottom liner coupled to each other. The top liner and the bottom liner are disposed in the chamber, and are made of low-coefficient of thermal expansion material. The ultraviolet lamp is disposed on the chamber and is configured for providing ultraviolet light.

Abstract translation: 紫外线固化装置包括室，气流发生器和紫外线灯。 气流发生器包括彼此连接的顶衬和底衬。 顶部衬套和底部衬套设置在室中，并且由低系数的热膨胀材料制成。 紫外线灯设置在室上并且被配置为提供紫外线。

公开(公告)号：US20150132973A1

公开(公告)日：2015-05-14

申请号：US14079945

申请日：2013-11-14

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Teng-Da Hung ,  Liang-Chang Hsieh ,  Chun-Lung Lin ,  Hsin-Hung Chi ,  Yun-Wen Chu ,  Jiun-Wei Su

IPC: H01L21/324 ,  H01L21/67 ,  H01L21/683

CPC classification number: H01L21/67115 ,  H01L21/6719

Abstract: An ultraviolet curing apparatus includes a chamber, a gas flow generator, and an ultraviolet lamp. The gas flow generator includes a top liner and a bottom liner coupled to each other. The top liner and the bottom liner are disposed in the chamber, and are made of low-coefficient of thermal expansion material. The ultraviolet lamp is disposed on the chamber and is configured for providing ultraviolet light.

Abstract translation: 紫外线固化装置包括室，气流发生器和紫外线灯。 气流发生器包括彼此连接的顶衬和底衬。 顶部衬套和底部衬套设置在室中，并且由低系数的热膨胀材料制成。 紫外线灯设置在室上并且被配置为提供紫外线。