公开(公告)号：US20240153787A1

公开(公告)日：2024-05-09

申请号：US18168265

申请日：2023-02-13

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jhih-Yu Li ,  Nai-Han Cheng ,  Chien-Hung Lu

IPC: H01L21/67 ,  C23C14/48 ,  C23C14/54

CPC classification number: H01L21/67017 ,  C23C14/48 ,  C23C14/54 ,  H01L21/67242 ,  H01L21/67167 ,  H01L21/67213 ,  H01L21/76883

Abstract: Methods and apparatuses for adjusting and controlling conditions within the environment of a workpiece handling module include sensors for detecting humidity and concentration of harmful gasses. Signals generated by these sensors are utilized to generate signals that control the flow of air into the environment and/or the flow of air and gases out of the environment. By controlling the humidity, negative impacts on processes carried out in the environment are avoided. By controlling the gas concentration, exposure of workers to harmful gases is avoided.