公开(公告)号：US20030233746A1

公开(公告)日：2003-12-25

申请号：US10174932

申请日：2002-06-19

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Wen-Shan Chang ,  Jung-Chang Chen ,  Shih-Chang Hsu ,  Li-Chung Wang ,  Cheng-Chia Kuo ,  Jong-Min Lin ,  Kuo-Ming Yu ,  Da-Hsiang Chou ,  Kuo-Chuan Chen ,  Ming-Te Chen

IPC分类号： B23P019/04

CPC分类号： H01J37/32605 ,  C23C16/4401 ,  C23C16/5096 ,  Y10T29/49721 ,  Y10T29/4973 ,  Y10T29/49822 ,  Y10T29/53848 ,  Y10T29/53891

摘要： A clamp for quickly, effectively and safely removing a cathode collar from an HDP deposition chamber for routine maintenance, cleaning or replacement of the collar. The clamp includes a pair of clamp plates which are capable of pivoting movement on respective ends of a connecting rod. A clamp shoe for gripping a corresponding edge of the annular collar is provided on the bottom end of each clamp plate, and a turnbuckle is fitted with a pair of threaded shafts which engage the upper end portions of the respective clamp plates. By rotating the turnbuckle, the threaded shafts are advanced away from each other against the clamp plates, which pivot on the connecting rod and cause the clamp shoes to tightly engage respective edges of the collar. The clamp is grasped to lift the collar from the chamber and replace the collar in the chamber after cleaning or maintenance.

摘要翻译： 用于快速，有效和安全地从HDP沉积室移除阴极环的夹具，用于日常维护，清洁或更换套环。 夹具包括能够在连杆的相应端部枢转运动的一对夹板。 在每个夹板的底端上设置有用于夹持环形圈的相应边缘的夹钳，并且螺丝扣装配有与相应夹紧板的上端部接合的一对螺纹轴。 通过旋转螺丝扣，螺纹轴彼此抵靠夹紧板前进，该夹板在连接杆上枢转并使夹钳紧紧地接合套环的相应边缘。 抓住夹具以将套环从腔室提起，并在清洁或维护后更换腔室中的套环。