公开(公告)号：US20220288627A1

公开(公告)日：2022-09-15

申请号：US17826561

申请日：2022-05-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Ching-Hai Yang ,  Yao-Hwan Kao ,  Shang-Sheng Li ,  Kuo-Pin Chen ,  Hsiang-Kai Tseng ,  Chuan-Wei Chen

IPC: B05C11/10 ,  B05C11/08 ,  B05B11/00 ,  G03F7/16 ,  G03F7/30 ,  H01L21/67

Abstract: A spin dispenser module and methods for using the same is disclosed. The spin dispenser module includes a cup having a basin with sidewalls and an exhaust, a rotatable platform situated inside the cup adapted for holding and rotating a substrate, a liquid dispenser disposed over the rotatable platform for dispensing a liquid coating material on top of the substrate, one or more ejector inlets disposed over the rotatable platform, the one or more ejectors connected to a negative pressure source, and a motor coupled to the rotatable platform to rate the rotatable platform at different rotational speeds. The one or more ejector inlets may be translatable and/or rotatable with optionally adjustable suction pressure. The ejector inlets operate after a liquid coating material is dispensed to avoid deposition of suspended organic compounds after a coating is formed.

公开(公告)号：US11806743B2

公开(公告)日：2023-11-07

申请号：US17826561

申请日：2022-05-27

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Ching-Hai Yang ,  Yao-Hwan Kao ,  Shang-Sheng Li ,  Kuo-Pin Chen ,  Hsiang-Kai Tseng ,  Chuan-Wei Chen

IPC: B05D1/00 ,  B05C11/10 ,  B05C11/08 ,  G03F7/16 ,  G03F7/30 ,  H01L21/67 ,  B05B11/10

CPC classification number: B05C11/1039 ,  B05B11/1097 ,  B05C11/08 ,  G03F7/162 ,  G03F7/3021 ,  H01L21/6715 ,  B05D1/005

Abstract: A spin dispenser module and methods for using the same is disclosed. The spin dispenser module includes a cup having a basin with sidewalls and an exhaust, a rotatable platform situated inside the cup adapted for holding and rotating a substrate, a liquid dispenser disposed over the rotatable platform for dispensing a liquid coating material on top of the substrate, one or more ejector inlets disposed over the rotatable platform, the one or more ejectors connected to a negative pressure source, and a motor coupled to the rotatable platform to rate the rotatable platform at different rotational speeds. The one or more ejector inlets may be translatable and/or rotatable with optionally adjustable suction pressure. The ejector inlets operate after a liquid coating material is dispensed to avoid deposition of suspended organic compounds after a coating is formed.