公开(公告)号：US11435257B2

公开(公告)日：2022-09-06

申请号：US16521989

申请日：2019-07-25

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Pei Cheng Chiu

IPC: G01M3/28 ,  G01M3/02 ,  G01M13/00 ,  G01M13/003 ,  H01L21/67 ,  G01M13/005

Abstract: A system and method for cleaning and inspecting ring frames is disclosed here. In one embodiment, a vacuum valve comprising at least one sealing O-ring; and a pressure monitoring tape on a mating surface on a vacuum processing chamber, wherein the pressure monitoring tape is configured to perform a pressure profile mapping between the mating surface on the vacuum processing chamber and a surface of the at least one sealing O-ring on the vacuum valve to determine a closing condition of the vacuum valve.

公开(公告)号：US12111233B2

公开(公告)日：2024-10-08

申请号：US17881307

申请日：2022-08-04

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Pei Cheng Chiu

IPC: G01M3/28 ,  G01M3/02 ,  G01M13/00 ,  G01M13/003 ,  G01M13/005 ,  H01L21/67

CPC classification number: G01M3/2876 ,  G01M3/02 ,  G01M13/00 ,  G01M13/003 ,  G01M13/005 ,  H01L21/67017

Abstract: A system and method for cleaning and inspecting ring frames is disclosed here. In one embodiment, a vacuum valve comprising at least one sealing O-ring; and a pressure monitoring tape on a mating surface on a vacuum processing chamber, wherein the pressure monitoring tape is configured to perform a pressure profile mapping between the mating surface on the vacuum processing chamber and a surface of the at least one sealing O-ring on the vacuum valve to determine a closing condition of the vacuum valve.