公开(公告)号：US20230061568A1

公开(公告)日：2023-03-02

申请号：US17461534

申请日：2021-08-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Min-Hsiang Hsu ,  Chewn-Pu Jou ,  Chan-Hong Chern ,  Cheng-Tse Tang ,  Yung-Jr Hung ,  Lan-Chou Cho

IPC: G02B6/30

Abstract: Disclosed are edge couplers having a high coupling efficiency and low polarization dependent loss, and methods of making the edge couplers. In one embodiment, a semiconductor device for optical coupling is disclosed. The semiconductor device includes: a substrate; an optical waveguide over the substrate; and a plurality of layers over the optical waveguide. The plurality of layers includes a plurality of coupling pillars disposed at an edge of the semiconductor device. The plurality of coupling pillars form an edge coupler configured for optically coupling the optical waveguide to an optical fiber placed at the edge of the semiconductor device.

公开(公告)号：US12124088B2

公开(公告)日：2024-10-22

申请号：US18232319

申请日：2023-08-09

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Min-Hsiang Hsu ,  Chewn-Pu Jou ,  Chan-Hong Chern ,  Cheng-Tse Tang ,  Yung-Jr Hung ,  Lan-Chou Cho

IPC: G02B6/30

CPC classification number: G02B6/305

Abstract: Disclosed are edge couplers having a high coupling efficiency and low polarization dependent loss, and methods of making the edge couplers. In one embodiment, a semiconductor device for optical coupling is disclosed. The semiconductor device includes: a substrate; an optical waveguide over the substrate; and a plurality of layers over the optical waveguide. The plurality of layers includes a plurality of coupling pillars disposed at an edge of the semiconductor device. The plurality of coupling pillars form an edge coupler configured for optically coupling the optical waveguide to an optical fiber placed at the edge of the semiconductor device.

公开(公告)号：US20230400639A1

公开(公告)日：2023-12-14

申请号：US18232319

申请日：2023-08-09

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Min-Hsiang HSU ,  Chewn-Pu Jou ,  Chan-Hong Chern ,  Cheng-Tse Tang ,  Yung-Jr Hung ,  Lan-Chou Cho

IPC: G02B6/30

CPC classification number: G02B6/305

Abstract: Disclosed are edge couplers having a high coupling efficiency and low polarization dependent loss, and methods of making the edge couplers. In one embodiment, a semiconductor device for optical coupling is disclosed. The semiconductor device includes: a substrate; an optical waveguide over the substrate; and a plurality of layers over the optical waveguide. The plurality of layers includes a plurality of coupling pillars disposed at an edge of the semiconductor device. The plurality of coupling pillars form an edge coupler configured for optically coupling the optical waveguide to an optical fiber placed at the edge of the semiconductor device.

公开(公告)号：US11796739B2

公开(公告)日：2023-10-24

申请号：US17461534

申请日：2021-08-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Min-Hsiang Hsu ,  Chewn-Pu Jou ,  Chan-Hong Chern ,  Cheng-Tse Tang ,  Yung-Jr Hung ,  Lan-Chou Cho

IPC: G02B6/30

CPC classification number: G02B6/305

Abstract: Disclosed are edge couplers having a high coupling efficiency and low polarization dependent loss, and methods of making the edge couplers. In one embodiment, a semiconductor device for optical coupling is disclosed. The semiconductor device includes: a substrate; an optical waveguide over the substrate; and a plurality of layers over the optical waveguide. The plurality of layers includes a plurality of coupling pillars disposed at an edge of the semiconductor device. The plurality of coupling pillars form an edge coupler configured for optically coupling the optical waveguide to an optical fiber placed at the edge of the semiconductor device.