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公开(公告)号：US20240377590A1
公开(公告)日：2024-11-14
申请号：US18784541
申请日：2024-07-25
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Min-Hsiang HSU , Chewn-Pu JOU , Chan-Hong CHERN , Cheng-Tse TANG , Yung-Jr HUNG , Lan-Chou CHO
IPC: G02B6/30
Abstract: Disclosed are edge couplers having a high coupling efficiency and low polarization dependent loss, and methods of making the edge couplers. In one embodiment, a semiconductor device for optical coupling is disclosed. The semiconductor device includes: a substrate; an optical waveguide over the substrate; and a plurality of layers over the optical waveguide. The plurality of layers includes a plurality of coupling pillars disposed at an edge of the semiconductor device. The plurality of coupling pillars form an edge coupler configured for optically coupling the optical waveguide to an optical fiber placed at the edge of the semiconductor device.
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公开(公告)号：US20220155524A1
公开(公告)日：2022-05-19
申请号：US17097270
申请日：2020-11-13
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Weiwei SONG , Chan-Hong CHERN , Chewn-Pu JOU , Stefan RUSU , Min-Hsiang HSU
Abstract: An optical system with different optical coupling device configurations and a method of fabricating the same are disclosed. An optical system includes a substrate, a waveguide disposed on the substrate, an optical fiber optically coupled to the waveguide, and an optical coupling device disposed between the optical fiber and the waveguide. The optical coupling device configured to optically couple the optical fiber to the waveguide. The optical coupling device includes a dielectric layer disposed on the substrate, a semiconductor tapered structure disposed in a first horizontal plane within the dielectric layer, and a multi-tip dielectric structure disposed in a second horizontal plane within the dielectric layer. The first and second horizontal planes are different from each other
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公开(公告)号：US20220035223A1
公开(公告)日：2022-02-03
申请号：US17503095
申请日：2021-10-15
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Lan-Chou CHO , Chewn-Pu JOU , Min-Hsiang HSU
IPC: G02F1/225
Abstract: Apparatus, circuits and methods for reducing mismatch in an electro-optic modulator are described herein. In some embodiments, a described optical includes: a splitter configured for splitting an input optical signal into a first optical signal and a second optical signal; a phase shifter coupled to the splitter; and a combiner coupled to the phase shifter. The phase shifter includes: a first waveguide arm configured for controlling a first phase of the first optical signal to generate a first phase-controlled optical signal, and a second waveguide arm configured for controlling a second phase of the second optical signal to generate a second phase-controlled optical signal. Each of the first and second waveguide arms includes: a plurality of straight segments and a plurality of curved segments. The combiner is configured for combining the first and second phase-controlled optical signals to generate an output optical signal.
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公开(公告)号：US20210271147A1
公开(公告)日：2021-09-02
申请号：US16804522
申请日：2020-02-28
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Lan-Chou CHO , Chewn-Pu JOU , Min-Hsiang HSU
IPC: G02F1/225
Abstract: Apparatus, circuits and methods for reducing mismatch in an electro-optic modulator are described herein. In some embodiments, a described optical includes: a splitter configured for splitting an input optical signal into a first optical signal and a second optical signal; a phase shifter coupled to the splitter; and a combiner coupled to the phase shifter. The phase shifter includes: a first waveguide arm configured for controlling a first phase of the first optical signal to generate a first phase-controlled optical signal, and a second waveguide arm configured for controlling a second phase of the second optical signal to generate a second phase-controlled optical signal. Each of the first and second waveguide arms includes: a plurality of straight segments and a plurality of curved segments. The combiner is configured for combining the first and second phase-controlled optical signals to generate an output optical signal.
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公开(公告)号：US20250060645A1
公开(公告)日：2025-02-20
申请号：US18936859
申请日：2024-11-04
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Lan-Chou CHO , Chewn-Pu JOU , Min-Hsiang HSU
Abstract: Apparatus, circuits and methods for reducing mismatch in an electro-optic modulator are described herein. In some embodiments, a described optical includes: a splitter configured for splitting an input optical signal into a first optical signal and a second optical signal; a phase shifter coupled to the splitter; and a combiner coupled to the phase shifter. The phase shifter includes: a first waveguide arm configured for controlling a first phase of the first optical signal to generate a first phase-controlled optical signal, and a second waveguide arm configured for controlling a second phase of the second optical signal to generate a second phase-controlled optical signal. Each of the first and second waveguide arms includes: a plurality of straight segments and a plurality of curved segments. The combiner is configured for combining the first and second phase-controlled optical signals to generate an output optical signal.
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Patent Agency Ranking
公开(公告)号：US20230400647A1
公开(公告)日：2023-12-14
申请号：US18232342
申请日：2023-08-09
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chan-Hong CHERN , Min-Hsiang HSU
IPC: G02B6/42
CPC classification number: G02B6/4215 , G02B6/4206
Abstract: Disclosed are apparatus and methods for optical coupling in optical communications. In one embodiment, an apparatus for optical coupling is disclosed. The apparatus includes: a planar layer; an array of scattering elements arranged in the planar layer at a plurality of intersections of a first set of concentric elliptical curves crossing with a second set of concentric elliptical curves rotated proximately 90 degrees to form a two-dimensional (2D) grating; a first taper structure formed in the planar layer connecting a first convex side of the 2D grating to a first waveguide; and a second taper structure formed in the planar layer connecting a second convex side of the 2D grating to a second waveguide. Each scattering element is a pillar into the planar layer. The pillar has a top surface whose shape is a concave polygon having at least 6 corners.
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公开(公告)号：US20230121421A1
公开(公告)日：2023-04-20
申请号：US18081525
申请日：2022-12-14
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chan-Hong CHERN , Min-Hsiang HSU
IPC: G02B6/42
Abstract: Disclosed are apparatus and methods for optical coupling in optical communications. In one embodiment, an apparatus for optical coupling is disclosed. The apparatus includes: a planar layer; an array of scattering elements arranged in the planar layer at a plurality of intersections of a first set of concentric elliptical curves crossing with a second set of concentric elliptical curves rotated proximately 90 degrees to form a two-dimensional (2D) grating; a first taper structure formed in the planar layer connecting a first convex side of the 2D grating to a first waveguide; and a second taper structure formed in the planar layer connecting a second convex side of the 2D grating to a second waveguide. Each scattering element is a pillar into the planar layer. The pillar has a top surface whose shape is a concave polygon having at least 6 corners.
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公开(公告)号：US20230400639A1
公开(公告)日：2023-12-14
申请号：US18232319
申请日：2023-08-09
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Min-Hsiang HSU , Chewn-Pu Jou , Chan-Hong Chern , Cheng-Tse Tang , Yung-Jr Hung , Lan-Chou Cho
IPC: G02B6/30
CPC classification number: G02B6/305
Abstract: Disclosed are edge couplers having a high coupling efficiency and low polarization dependent loss, and methods of making the edge couplers. In one embodiment, a semiconductor device for optical coupling is disclosed. The semiconductor device includes: a substrate; an optical waveguide over the substrate; and a plurality of layers over the optical waveguide. The plurality of layers includes a plurality of coupling pillars disposed at an edge of the semiconductor device. The plurality of coupling pillars form an edge coupler configured for optically coupling the optical waveguide to an optical fiber placed at the edge of the semiconductor device.
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公开(公告)号：US20220276453A1
公开(公告)日：2022-09-01
申请号：US17186661
申请日：2021-02-26
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chan-Hong CHERN , Min-Hsiang HSU
IPC: G02B6/42
Abstract: Disclosed are apparatus and methods for optical coupling in optical communications. In one embodiment, an apparatus for optical coupling is disclosed. The apparatus includes: a planar layer; an array of scattering elements arranged in the planar layer at a plurality of intersections of a first set of concentric elliptical curves crossing with a second set of concentric elliptical curves rotated proximately 90 degrees to form a two-dimensional (2D) grating; a first taper structure formed in the planar layer connecting a first convex side of the 2D grating to a first waveguide; and a second taper structure formed in the planar layer connecting a second convex side of the 2D grating to a second waveguide. Each scattering element is a pillar into the planar layer. The pillar has a top surface whose shape is a concave polygon having at least 6 corners.
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公开(公告)号：US20210088726A1
公开(公告)日：2021-03-25
申请号：US16919747
申请日：2020-07-02
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor： Chan-Hong CHERN , Min-Hsiang HSU
Abstract: A photonic structure is provided. The photonic structure includes a semiconductor substrate, a buried oxide layer over the semiconductor substrate, an optical coupling region over the buried oxide layer, and an oxide structure embedded in the semiconductor substrate. The optical coupling region is tapered toward a terminus of the optical coupling region located at an edge of the semiconductor substrate. The optical coupling region overlaps the oxide structure in a plan view.
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