公开(公告)号：US09651736B2

公开(公告)日：2017-05-16

申请号：US14477917

申请日：2014-09-05

Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.

Inventor： Jay Lai ,  Ying-Hao Kuo ,  Hai-Ching Chen ,  Tien-I Bao

IPC: G02B6/122 ,  G03F7/00 ,  G02B6/42 ,  G02B6/12 ,  B05D5/06

CPC classification number: G02B6/122 ,  B05D5/06 ,  G02B6/425 ,  G02B6/4298 ,  G02B2006/12102 ,  G02B2006/12173 ,  G03F7/0002 ,  Y10T428/24612

Abstract: Some embodiments relate to a method of processing a workpiece. The workpiece includes a first surface region having a first wettability coefficient, and a second surface region having a second wettability coefficient that differs from the first wettability coefficient. A liquid, which corresponds to an optical structure, is dispensed on the first and second surface regions of the workpiece, wherein the liquid self-aligns to the second surface region due to the difference between the first and second wettability coefficients. The self-aligned liquid is hardened to form the optical structure.

公开(公告)号：US20140376858A1

公开(公告)日：2014-12-25

申请号：US14477917

申请日：2014-09-05

Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.

Inventor： Jay Lai ,  Ying-Hao Kuo ,  Hai-Ching Chen ,  Tien-I Bao

IPC: G02B6/122 ,  G02B6/42

CPC classification number: G02B6/122 ,  B05D5/06 ,  G02B6/425 ,  G02B6/4298 ,  G02B2006/12102 ,  G02B2006/12173 ,  G03F7/0002 ,  Y10T428/24612

Abstract: Some embodiments relate to a method of processing a workpiece. The workpiece includes a first surface region having a first wettability coefficient, and a second surface region having a second wettability coefficient that differs from the first wettability coefficient. A liquid, which corresponds to an optical structure, is dispensed on the first and second surface regions of the workpiece, wherein the liquid self-aligns to the second surface region due to the difference between the first and second wettability coefficients. The self-aligned liquid is hardened to form the optical structure.

Abstract translation: 一些实施例涉及加工工件的方法。 工件包括具有第一润湿性系数的第一表面区域和具有与第一润湿性系数不同的第二润湿性系数的第二表面区域。 对应于光学结构的液体被分配在工件的第一和第二表面区域上，其中由于第一和第二润湿性系数之间的差异，液体自对准到第二表面区域。 自对准液体被硬化以形成光学结构。

公开(公告)号：US08828484B2

公开(公告)日：2014-09-09

申请号：US13751540

申请日：2013-01-28

Applicant: Taiwan Semiconductor Manufacturing Co. Ltd.

Inventor： Jay Lai ,  Ying-Hao Kuo ,  Hai-Ching Chen ,  Tien-I Bao

IPC: B05D5/06

CPC classification number: G02B6/122 ,  B05D5/06 ,  G02B6/425 ,  G02B6/4298 ,  G02B2006/12102 ,  G02B2006/12173 ,  G03F7/0002 ,  Y10T428/24612

Abstract: Some embodiments relate to a method of processing a workpiece. The workpiece includes a first surface region having a first wettability coefficient, and a second surface region having a second wettability coefficient that differs from the first wettability coefficient. A liquid, which corresponds to an optical structure, is dispensed on the first and second surface regions of the workpiece, wherein the liquid self-aligns to the second surface region due to the difference between the first and second wettability coefficients. The self-aligned liquid is hardened to form the optical structure.

Abstract translation: 一些实施例涉及加工工件的方法。 工件包括具有第一润湿性系数的第一表面区域和具有与第一润湿性系数不同的第二润湿性系数的第二表面区域。 对应于光学结构的液体被分配在工件的第一和第二表面区域上，其中由于第一和第二润湿性系数之间的差异，液体自对准到第二表面区域。 自对准液体被硬化以形成光学结构。

公开(公告)号：US20140212627A1

公开(公告)日：2014-07-31

申请号：US13751540

申请日：2013-01-28

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Jay Lai ,  Ying-Hao Kuo ,  Hai-Ching Chen ,  Tien-I Bao

IPC: B05D5/06

CPC classification number: G02B6/122 ,  B05D5/06 ,  G02B6/425 ,  G02B6/4298 ,  G02B2006/12102 ,  G02B2006/12173 ,  G03F7/0002 ,  Y10T428/24612

Abstract: Some embodiments relate to a method of processing a workpiece. The workpiece includes a first surface region having a first wettability coefficient, and a second surface region having a second wettability coefficient that differs from the first wettability coefficient. A liquid, which corresponds to an optical structure, is dispensed on the first and second surface regions of the workpiece, wherein the liquid self-aligns to the second surface region due to the difference between the first and second wettability coefficients. The self-aligned liquid is hardened to form the optical structure.

Abstract translation: 一些实施例涉及加工工件的方法。 工件包括具有第一润湿性系数的第一表面区域和具有与第一润湿性系数不同的第二润湿性系数的第二表面区域。 对应于光学结构的液体被分配在工件的第一和第二表面区域上，其中由于第一和第二润湿性系数之间的差异，液体自对准到第二表面区域。 自对准液体被硬化以形成光学结构。