公开(公告)号：US20150316489A1

公开(公告)日：2015-11-05

申请号：US14746961

申请日：2015-06-23

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Biow-Hiem Ong ,  CHIH-CHIANG TU ,  Chien-Hung Lai ,  JONG-YUH CHANG ,  Kuang-Yu Liu

IPC: G01N21/88 ,  G01N21/59 ,  G01N21/55 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/55 ,  G01N21/59 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/558 ,  G01N2021/8809 ,  H01L22/12 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for inspecting a manufactured product includes applying a first test regimen to the manufactured product to identify product defects. The first test regimen produces a first set of defect candidates. The method further includes applying a second test regimen to the manufactured product to identify product defects. The second test regimen produces a second set of defect candidates, and the second test regimen is different from the first test regimen. The method also includes generating a first filtered defect set by eliminating ones of the first set of defect candidates that are not indentified in the second set of defect candidates.

Abstract translation: 用于检查制造产品的方法包括将第一测试方案应用于所制造的产品以识别产品缺陷。 第一个测试方案产生第一组缺陷候选物。 该方法还包括将第二测试方案应用于所制造的产品以鉴定产品缺陷。 第二个测试方案产生第二组缺陷候选物，第二个测试方案与第一个测试方案不同。 该方法还包括通过消除在第二组缺陷候选中未识别的第一组缺陷候选中的一个产生第一过滤缺陷集。

公开(公告)号：US09689805B2

公开(公告)日：2017-06-27

申请号：US14746961

申请日：2015-06-23

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Biow-Hiem Ong ,  Chih-Chiang Tu ,  Chien-Hung Lai ,  Jong-Yuh Chang ,  Kuang-Yu Liu

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/59 ,  G01N21/55 ,  G01N21/956 ,  H01L21/66

CPC classification number: G01N21/8806 ,  G01N21/55 ,  G01N21/59 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/558 ,  G01N2021/8809 ,  H01L22/12 ,  H01L22/20 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A method for inspecting a manufactured product includes applying a first test regimen to the manufactured product to identify product defects. The first test regimen produces a first set of defect candidates. The method further includes applying a second test regimen to the manufactured product to identify product defects. The second test regimen produces a second set of defect candidates, and the second test regimen is different from the first test regimen. The method also includes generating a first filtered defect set by eliminating ones of the first set of defect candidates that are not identified in the second set of defect candidates.