FinFET transistor with fin back biasing

    公开(公告)号:US10163902B2

    公开(公告)日:2018-12-25

    申请号:US15916756

    申请日:2018-03-09

    摘要: A semiconductor device includes multiple first fins oriented lengthwise along a first direction and multiple first gate structures oriented lengthwise along a second direction generally perpendicular to the first direction. Each of the first fins includes an end that is narrower than a main body of the respective first fin. The first gate structures are disposed over channel regions of the main body of the first fins to form multiple first FinFETs. The end of the first fins and the channel regions of the first fins sandwich some of source/drain regions of the first fins. The semiconductor device further includes a first contact disposed over and in electrical contact with the ends of the first fins.