公开(公告)号：US20130142595A1

公开(公告)日：2013-06-06

申请号：US13592408

申请日：2012-08-23

申请人： Takahiro SHIMOMURA ,  Yoshifumi OGAWA ,  Susumu TAUCHI

发明人： Takahiro SHIMOMURA ,  Yoshifumi OGAWA ,  Susumu TAUCHI

IPC分类号： H01L21/677

CPC分类号： H01L21/67161 ,  H01L21/67184

摘要： A vacuum processing apparatus includes a row of containers of vacuum transfer chambers connected to each other behind a lock chamber, a wafer being transferred through depressurized inside of the row of the containers of the vacuum transfer containers, an intermediate chamber disposed between the containers of the vacuum transfer chambers, a plurality of processing units including processing containers respectively connected to left or right side walls of the containers of the vacuum transfer chambers and the wafer is processed therein, and a bypass chamber which constitutes a bypass path connecting the processing units, where only either the wafer which is being transferred from the lock chamber toward one of the processing units or the wafer which was processed in one of the processing units and is being transferred toward the lock chamber is transferred through the containers of the vacuum transfer chambers.

摘要翻译： 真空处理装置包括一排在锁室后面彼此连接的真空传送室的容器，通过减压的真空传送容器的排的内部被转移的晶片，设置在真空传送容器的容器之间的中间室 在真空传送室中处理多个处理单元，包括分别连接到真空传送室的容器的左侧壁或右侧壁的处理容器和晶片，以及构成连接处理单元的旁路的旁路室，其中， 只有从锁定室转移到处理单元之一的晶片或在一个处理单元中被处理并且被转移到锁定室的晶片被传送通过真空传送室的容器。

公开(公告)号：US20120067521A1

公开(公告)日：2012-03-22

申请号：US12968357

申请日：2010-12-15

申请人： Takahiro SHIMOMURA ,  Yutaka Kudou ,  Takashi Uemura ,  Masakazu Isozaki

发明人： Takahiro SHIMOMURA ,  Yutaka Kudou ,  Takashi Uemura ,  Masakazu Isozaki

IPC分类号： H01L21/3065 ,  C23C16/458

CPC分类号： H01L21/67109 ,  H01L21/67178

摘要： A vacuum processing system including a cassette holder for setting up cassettes in which samples are stored, an air-transfer chamber for transferring the samples, lock chambers for storing the samples transferred from the air-transfer chamber, the lock chambers being capable of switching between air atmosphere and vacuum atmosphere in their inside, a vacuum transfer chamber connected to the lock chambers, vacuum containers for processing the samples transferred via the vacuum transfer chamber, a cooling chamber for cooling the samples down to a first temperature, the samples being processed in at least one of the vacuum containers, and a cooling unit for cooling the samples down to a second temperature, the samples being cooled in the cooling chamber. The cooling unit is deployed in the air transfer chamber, and has a cooling part for cooling the samples, being cooled in the cooling chamber, down to the second temperature.

摘要翻译： 一种真空处理系统，包括用于设置其中存储样品的盒的盒保持器，用于传送样品的空气传送室，用于存储从空气传送室传送的样品的锁定室，能够在 空气气氛和真空气氛，连接到锁定室的真空传送室，用于处理通过真空传送室传送的样品的真空容器，用于将样品冷却至第一温度的冷却室，将样品加工成 至少一个真空容器和用于将样品冷却至第二温度的冷却单元，样品在冷却室中被冷却。 冷却单元布置在空气传送室中，并且具有冷却部件，用于冷却样品，在冷却室中冷却至第二温度。