公开(公告)号：US07714486B2

公开(公告)日：2010-05-11

申请号：US12078050

申请日：2008-03-26

申请人： Kenichi Tochi ,  Tatsuo Namikawa ,  Ken Unno ,  Takao Noguchi

发明人： Kenichi Tochi ,  Tatsuo Namikawa ,  Ken Unno ,  Takao Noguchi

IPC分类号： H01L41/08

CPC分类号： G01C19/5628 ,  B81B2201/025 ,  B81C1/0023 ,  G01C25/00 ,  H01L41/1132

摘要： The present invention provides an angular velocity sensor in which higher sensitivity for sensors is available even with a smaller base portion. The angular velocity sensor includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.

摘要翻译： 本发明提供了一种角速度传感器，其中传感器的更高的灵敏度即使在较小的基部也可获得。 角速度传感器包括固定到壳体的传感器元件支撑部分的上表面的固定部分，上检测臂和下检测臂，它们各自连接到彼此相对的侧面上的固定部分，并且延伸 沿着平行于传感器元件支撑部分的顶表面的平面，以及一对上部振动臂，其以固定部分的方式连接，以便形成一对臂，其中上部检测臂在其中并且在方向 平行于上检测臂的延伸方向。

公开(公告)号：US08056414B2

公开(公告)日：2011-11-15

申请号：US12078031

申请日：2008-03-26

申请人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

发明人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

IPC分类号： G01P9/04 ,  H01L41/00

CPC分类号： G01C19/5607

摘要： An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof is easily fixed, is provided. It includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm portion and a lower detection arm portion respectively connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion with the upper detection arm portion in between. The fixed portion includes one or more slits extending at least in a direction intersecting with the extending direction of the upper detection arm portion.

摘要翻译： 提供了一种水平定位型的角速度传感器，其中容易地去除从横向施加到其上的平移加速度的影响，并且其固定部分容易固定。 它包括固定到壳体的传感器元件支撑部分的顶表面的固定部分，上检测臂部分和下检测臂部分，其分别连接到彼此相对的侧面上的固定部分，并且沿平行于 传感器元件支撑部分的顶表面和连接到固定部分的上部振动臂，上部检测臂部分在其间。 固定部分包括至少沿与上检测臂部分的延伸方向交叉的方向延伸的一个或多个狭缝。

公开(公告)号：US20090165554A1

公开(公告)日：2009-07-02

申请号：US12078051

申请日：2008-03-26

申请人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

发明人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

IPC分类号： G01C19/56

CPC分类号： G01C19/5642 ,  G01C19/5607 ,  H01L41/08

摘要： Provided is a horizontally located sensitive angular velocity sensor capable of easily eliminating influence of acceleration in a lateral direction and whose fixed section is easily fixed. The angular velocity sensor includes a pair of fixed sections fixed on a top of an sensor support section of a case, a detection arm extending along a plane parallel to the sensor support section, and a pair of upper drive arm and lower drive arm extending along the plane parallel to the sensor support section and extending in a direction opposite to each other so as to intersect an extending direction of the detection arm.

摘要翻译： 提供了一种水平定位的敏感角速度传感器，其能够容易地消除横向加速度的影响，并且其固定部分容易固定。 角速度传感器包括固定在壳体的传感器支撑部分的顶部上的一对固定部分，沿着平行于传感器支撑部分的平面延伸的检测臂，以及一对上延伸的上驱动臂和下驱动臂 该平面平行于传感器支撑部分并且沿彼此相反的方向延伸以与检测臂的延伸方向相交。

公开(公告)号：US20080236281A1

公开(公告)日：2008-10-02

申请号：US12078031

申请日：2008-03-26

申请人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

发明人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

IPC分类号： G01C19/56

CPC分类号： G01C19/5607

摘要： An angular velocity sensor of a horizontally located type, in which influence of a translational acceleration applied thereto from a lateral direction is readily removed and a fixed portion thereof is easily fixed, is provided. It includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm portion and a lower detection arm portion respectively connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion with the upper detection arm portion in between. The fixed portion includes one or more slits extending at least in a direction intersecting with the extending direction of the upper detection arm portion.

摘要翻译： 提供了一种水平定位型的角速度传感器，其中容易地去除从横向施加到其上的平移加速度的影响并且其固定部分容易固定。 它包括固定到壳体的传感器元件支撑部分的顶表面的固定部分，上检测臂部分和下检测臂部分，其分别连接到彼此相对的侧面上的固定部分，并且沿平行于 传感器元件支撑部分的顶表面和连接到固定部分的上部振动臂，上部检测臂部分在其间。 固定部分包括至少沿与上检测臂部分的延伸方向交叉的方向延伸的一个或多个狭缝。

公开(公告)号：US20080148848A1

公开(公告)日：2008-06-26

申请号：US12004069

申请日：2007-12-20

申请人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

发明人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

IPC分类号： G01C19/56

CPC分类号： G01C19/5607

摘要： An angular velocity sensor of a horizontally located type, which can easily remove the translational acceleration influence thereto from the lateral direction, is provided. It includes a fixed portion fixed to the surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the surface place of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.

摘要翻译： 提供了一种水平定位型的角速度传感器，其可以容易地从横向方向去除对其的平移加速度影响。 它包括固定到壳体的传感器元件支撑部分的表面的固定部分，上检测臂和下检测臂，它们中的每一个连接到彼此相对的侧面上的固定部分，并且沿平行的平面延伸 到传感器元件支撑部分的表面位置，以及一对上部振动臂，其以固定部分的方式连接，以便形成一对臂，其中上部检测臂在与延伸部分平行的方向上延伸 上检测臂的方向。

公开(公告)号：US20080134781A1

公开(公告)日：2008-06-12

申请号：US11987996

申请日：2007-12-06

申请人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

发明人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

IPC分类号： G01P3/44

CPC分类号： G01C19/5642

摘要： Proposed is a horizontally located angular velocity sensor hardly affected by a translational acceleration in a lateral direction, and in which a fixed section is easily fixed. The angular velocity sensor includes a fixed section fixed on a support surface. On both sides of the fixed section, an arm section of an upper detection arm and a pair of upper drive arms extending along a plane parallel to the support surface, and an arm section of a lower detection arm and a pair of lower drive arms extending along the plane parallel to the support surface are coupled, respectively. The upper detection arm and the pair of upper drive arms are coupled without the fixed section in between, and the lower detection arm and the pair of lower drive arms are coupled without the fixed section in between.

摘要翻译： 提出了一种水平位置的角速度传感器，其几乎不受侧向平移加速度的影响，固定部分容易固定。 角速度传感器包括固定在支撑表面上的固定部分。 在固定部分的两侧，上检测臂的臂部分和沿着平行于支撑表面的平面延伸的一对上驱动臂，以及下检测臂的臂部分和一对下驱动臂延伸 沿着平行于支撑表面的平面分别耦合。 上检测臂和一对上驱动臂在其间没有固定部分连接，下检测臂和一对下驱动臂在其间没有固定部分连接。

公开(公告)号：US07975546B2

公开(公告)日：2011-07-12

申请号：US12004069

申请日：2007-12-20

申请人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

发明人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

IPC分类号： G01P3/44

CPC分类号： G01C19/5607

摘要： An angular velocity sensor of a horizontally located type, which can easily remove the translational acceleration influence thereto from the lateral direction, is provided. It includes a fixed portion fixed to the surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the surface place of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.

摘要翻译： 提供了一种水平定位型的角速度传感器，其可以容易地从横向方向去除对其的平移加速度影响。 它包括固定到壳体的传感器元件支撑部分的表面的固定部分，上检测臂和下检测臂，它们中的每一个连接到彼此相对的侧面上的固定部分，并且沿平行的平面延伸 到传感器元件支撑部分的表面位置，以及一对上部振动臂，其以固定部分的方式连接，以便形成一对臂，其中上部检测臂在与延伸部分平行的方向上延伸 上检测臂的方向。

公开(公告)号：US07975545B2

公开(公告)日：2011-07-12

申请号：US11987996

申请日：2007-12-06

申请人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

发明人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

IPC分类号： G01P9/04

CPC分类号： G01C19/5642

摘要： Proposed is a horizontally located angular velocity sensor hardly affected by a translational acceleration in a lateral direction, and in which a fixed section is easily fixed. The angular velocity sensor includes a fixed section fixed on a support surface. On both sides of the fixed section, an arm section of an upper detection arm and a pair of upper drive arms extending along a plane parallel to the support surface, and an arm section of a lower detection arm and a pair of lower drive arms extending along the plane parallel to the support surface are coupled, respectively. The upper detection arm and the pair of upper drive arms are coupled without the fixed section in between, and the lower detection arm and the pair of lower drive arms are coupled without the fixed section in between.

摘要翻译： 提出了一种水平位置的角速度传感器，其几乎不受侧向平移加速度的影响，固定部分容易固定。 角速度传感器包括固定在支撑表面上的固定部分。 在固定部分的两侧，上检测臂的臂部分和沿着平行于支撑表面的平面延伸的一对上驱动臂，以及下检测臂的臂部分和一对下驱动臂延伸 沿着平行于支撑表面的平面分别耦合。 上检测臂和一对上驱动臂在其间没有固定部分连接，下检测臂和一对下驱动臂在其间没有固定部分连接。

公开(公告)号：US07934422B2

公开(公告)日：2011-05-03

申请号：US12078051

申请日：2008-03-26

申请人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

发明人： Takao Noguchi ,  Kenichi Tochi ,  Ken Unno ,  Tatsuo Namikawa

IPC分类号： G01P9/04

CPC分类号： G01C19/5642 ,  G01C19/5607 ,  H01L41/08

摘要： Provided is a horizontally located sensitive angular velocity sensor capable of easily eliminating influence of acceleration in a lateral direction and whose fixed section is easily fixed. The angular velocity sensor includes a pair of fixed sections fixed on a top of an sensor support section of a case, a detection arm extending along a plane parallel to the sensor support section, and a pair of upper drive arm and lower drive arm extending along the plane parallel to the sensor support section and extending in a direction opposite to each other so as to intersect an extending direction of the detection arm.

摘要翻译： 提供了一种水平定位的敏感角速度传感器，其能够容易地消除横向加速度的影响，并且其固定部分容易固定。 角速度传感器包括固定在壳体的传感器支撑部分的顶部上的一对固定部分，沿着平行于传感器支撑部分的平面延伸的检测臂，以及一对上延伸的上驱动臂和下驱动臂 该平面平行于传感器支撑部分并且沿彼此相反的方向延伸以与检测臂的延伸方向相交。

公开(公告)号：US20090039739A1

公开(公告)日：2009-02-12

申请号：US12078050

申请日：2008-03-26

申请人： Kenichi Tochi ,  Tatsuo Namikawa ,  Ken Unno ,  Takao Noguchi

发明人： Kenichi Tochi ,  Tatsuo Namikawa ,  Ken Unno ,  Takao Noguchi

IPC分类号： G01C19/56

CPC分类号： G01C19/5628 ,  B81B2201/025 ,  B81C1/0023 ,  G01C25/00 ,  H01L41/1132

摘要： The present invention provides an angular velocity sensor in which higher sensitivity for sensors is available even with a smaller base portion. The angular velocity sensor includes a fixed portion fixed to the top surface of a sensor element supporting portion of a casing, an upper detection arm and a lower detection arm, each of them being connected to the fixed portion on sides opposite to each other and extending along a plane parallel to the top surface of the sensor element supporting portion, and a pair of upper vibration arms connected to the fixed portion in such a manner as to form a pair of arms with the upper detection arm in between and extending in a direction parallel to the extending direction of the upper detection arm.

摘要翻译： 本发明提供了一种角速度传感器，其中传感器的更高的灵敏度即使在较小的基部也可获得。 角速度传感器包括固定到壳体的传感器元件支撑部分的上表面的固定部分，上检测臂和下检测臂，它们各自连接到彼此相对的侧面上的固定部分，并且延伸 沿着平行于传感器元件支撑部分的顶表面的平面，以及一对上部振动臂，其以固定部分的方式连接，以便形成一对臂，其中上部检测臂在其中并且在方向 平行于上检测臂的延伸方向。