公开(公告)号：US12092460B2

公开(公告)日：2024-09-17

申请号：US17980045

申请日：2022-11-03

Applicant: The Charles Stark Draper Laboratory, Inc.

Inventor： Eugene H. Cook ,  Jonathan J. Bernstein ,  Mirela G. Bancu ,  Marc Steven Weinberg ,  William Sawyer

IPC: G01C19/5621 ,  B81B3/00 ,  B81C1/00 ,  G01C19/5628

CPC classification number: G01C19/5621 ,  B81B3/0097 ,  B81C1/00166 ,  G01C19/5628 ,  B81B2201/0242 ,  B81B2203/04 ,  B81B2207/096 ,  B81C2201/0132 ,  B81C2201/0133 ,  B81C2203/035 ,  B81C2203/036

Abstract: Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.

公开(公告)号：US09841432B2

公开(公告)日：2017-12-12

申请号：US15231674

申请日：2016-08-08

Applicant: SZ DJI TECHNOLOGY CO., LTD

Inventor： Tao Wang ,  Tao Zhao

IPC: G01P1/02 ,  G01P15/08 ,  G01C19/56 ,  G01P1/00 ,  F16F15/00 ,  G01C21/16 ,  B64D45/00 ,  G01C25/00 ,  G01C19/16 ,  G01C19/5628 ,  G01C19/5663 ,  G01C19/5769 ,  G01C19/5783

CPC classification number: G01P1/003 ,  B64C2201/14 ,  B64D45/00 ,  F16F7/104 ,  F16F15/00 ,  G01C19/16 ,  G01C19/56 ,  G01C19/5628 ,  G01C19/5663 ,  G01C19/5769 ,  G01C19/5783 ,  G01C21/16 ,  G01C25/00 ,  G01P1/023 ,  G01P15/08 ,  G01P15/0802

Abstract: The present disclosure relates to an inertia measurement module for an unmanned aircraft, which comprises a housing assembly, a sensing assembly and a vibration damper. The vibration damper comprises a first vibration-attenuation cushion; and the sensing assembly comprises a first circuit board, a second circuit board and a flexible signal line for connecting the first circuit board and the second circuit board. An inertia sensor is fixed on the second circuit board, and the first circuit board is fixed on the housing assembly. The inertia measurement module further comprises a weight block, and the second circuit board, the weight block, the first vibration-attenuation cushion and the first circuit board are bonded together. The present disclosure greatly reduces the influence of the operational vibration frequency of the unmanned aircraft on the inertia sensor and improves the measurement stability of the inertia sensor.

公开(公告)号：US09676610B2

公开(公告)日：2017-06-13

申请号：US15228553

申请日：2016-08-04

Applicant: Seiko Epson Corporation

Inventor： Yutaka Takada

IPC: B81B7/00 ,  B81C1/00 ,  G01P1/02 ,  G01P15/08 ,  G01C19/5628

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2207/07 ,  B81C1/00253 ,  G01C19/5628 ,  G01P1/023 ,  G01P15/08

Abstract: A physical quantity sensor includes a sensor element, an integrated circuit that is electrically connected to the sensor element, and a ceramic package (base body) on which the integrated circuit is mounted. A first conductor pattern (interconnection pattern) for electrical connection with the outside is provided on one surface of the ceramic package. A second conductor pattern is provided to be electrically connected to the interconnection pattern. The second conductor pattern includes an interconnection pattern that passes through the inside of the ceramic package, and a metallized region that is exposed on the other surface of the ceramic package. The interconnection pattern is longer than a distance between the one surface and the other surface of the ceramic package.

公开(公告)号：US20170059320A1

公开(公告)日：2017-03-02

申请号：US15307859

申请日：2015-06-11

Applicant: DENSO CORPORATION

Inventor： Kiyomasa SUGIMOTO ,  Naoki YOSHIDA ,  Minekazu SAKAI ,  Nobuaki KUZUYA

IPC: G01C19/5607 ,  G01C25/00

CPC classification number: G01C19/5607 ,  G01C19/5614 ,  G01C19/5628 ,  G01C25/00 ,  G01P15/125 ,  G01P21/00 ,  G01P2015/0814 ,  H01L2224/32145 ,  H01L2224/48091 ,  H01L2224/48145 ,  H01L2224/73265 ,  H01L2924/16195 ,  H01L2924/00014 ,  H01L2924/00 ,  H01L2924/00012

Abstract: A physical quantity sensor includes a detection unit outputting a detection signal corresponding to a vibration of a vibrating element in an angular velocity sensor, and a self-diagnostic unit self-diagnosing a detection environment of an acceleration sensor and the angular velocity sensor on a basis of the detection signal outputted by the detection unit.

Abstract translation: 物理量传感器包括：检测单元，输出与角速度传感器中的振动元件的振动相对应的检测信号;以及自诊断单元，其基于加速度传感器和角速度传感器自身诊断的检测环境 由检测单元输出的检测信号。

公开(公告)号：US20170059319A1

公开(公告)日：2017-03-02

申请号：US15349980

申请日：2016-11-11

Applicant: SZ DJI TECHNOLOGY CO., LTD.

Inventor： Jiangang FENG ,  Yin TANG

IPC: G01C19/00 ,  B64C39/02 ,  G01C21/16

CPC classification number: G01C19/00 ,  B64C39/024 ,  B64C2201/141 ,  G01C19/5628 ,  G01C21/16 ,  G01C21/265 ,  G01C25/00 ,  G01P1/003 ,  G01P15/0802 ,  H01L23/345 ,  H05K1/189 ,  H05K7/20 ,  H05K2201/10151

Abstract: System and method can support a measurement module on a movable object. The measurement module includes a first circuit board with one or more sensors. Additionally, the measurement module includes a weight block assembly, wherein the weight block assembly is configured to have a mass that keeps an inherent frequency of the measurement module away from an operation frequency of the movable object. Furthermore, said first circuit board can be disposed in an inner chamber within the weight block assembly.

Abstract translation: 系统和方法可以支持可移动物体上的测量模块。 测量模块包括具有一个或多个传感器的第一电路板。 此外，测量模块包括重量块组件，其中重量块组件被配置为具有使测量模块的固有频率远离可移动物体的操作频率的质量。 此外，所述第一电路板可以设置在配重块组件内的内室中。

公开(公告)号：US20160340177A1

公开(公告)日：2016-11-24

申请号：US15228553

申请日：2016-08-04

Applicant: Seiko Epson Corporation

Inventor： Yutaka TAKADA

IPC: B81B7/00 ,  G01C19/5628 ,  B81C1/00

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2207/07 ,  B81C1/00253 ,  G01C19/5628 ,  G01P1/023 ,  G01P15/08

Abstract: A physical quantity sensor includes a sensor element, an integrated circuit that is electrically connected to the sensor element, and a ceramic package (base body) on which the integrated circuit is mounted. A first conductor pattern (interconnection pattern) for electrical connection with the outside is provided on one surface of the ceramic package. A second conductor pattern is provided to be electrically connected to the interconnection pattern. The second conductor pattern includes an interconnection pattern that passes through the inside of the ceramic package, and a metallized region that is exposed on the other surface of the ceramic package. The interconnection pattern is longer than a distance between the one surface and the other surface of the ceramic package.

Abstract translation: 物理量传感器包括传感器元件，电连接到传感器元件的集成电路以及安装集成电路的陶瓷封装（基体）。 用于与外部电连接的第一导体图案（互连图案）设置在陶瓷封装的一个表面上。 提供第二导体图案以电连接到互连图案。 第二导体图案包括穿过陶瓷封装的内部的互连图案，以及暴露在陶瓷封装的另一个表面上的金属化区域。 互连图案比陶瓷封装的一个表面和另一个表面之间的距离更长。

公开(公告)号：US09434603B2

公开(公告)日：2016-09-06

申请号：US14256239

申请日：2014-04-18

Applicant: Seiko Epson Corporation

Inventor： Yutaka Takada

IPC: B81B7/00 ,  B81C1/00 ,  G01P1/02 ,  G01P15/08 ,  G01C19/5628

CPC classification number: B81B7/0064 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2207/07 ,  B81C1/00253 ,  G01C19/5628 ,  G01P1/023 ,  G01P15/08

Abstract: A physical quantity sensor includes a sensor element, an integrated circuit that is electrically connected to the sensor element, and a ceramic package (base body) on which the integrated circuit is mounted. A first conductor pattern (interconnection pattern) for electrical connection with the outside is provided on one surface of the ceramic package. A second conductor pattern is provided to be electrically connected to the interconnection pattern. The second conductor pattern includes an interconnection pattern that passes through the inside of the ceramic package, and a metallized region that is exposed on the other surface of the ceramic package. The interconnection pattern is longer than a distance between the one surface and the other surface of the ceramic package.

Abstract translation: 物理量传感器包括传感器元件，电连接到传感器元件的集成电路以及安装集成电路的陶瓷封装（基体）。 用于与外部电连接的第一导体图案（互连图案）设置在陶瓷封装的一个表面上。 提供第二导体图案以电连接到互连图案。 第二导体图案包括穿过陶瓷封装的内部的互连图案，以及暴露在陶瓷封装的另一个表面上的金属化区域。 互连图案比陶瓷封装的一个表面和另一个表面之间的距离更长。

公开(公告)号：US20160223328A1

公开(公告)日：2016-08-04

申请号：US15097869

申请日：2016-04-13

Applicant: Seiko Epson Corporation

Inventor： Keiichi YAMAGUCHI ,  Seiichiro OGURA ,  Takayuki KIKUCHI ,  Ryuta NISHIZAWA ,  Seiji OSAWA

IPC: G01C19/5607 ,  G01C19/5628

CPC classification number: G01C19/5607 ,  G01C19/5621 ,  G01C19/5628 ,  G01P9/04 ,  Y10T29/49 ,  Y10T74/12

Abstract: A vibrator element includes a pair of first and second drive vibrating arms that extend in opposite directions from a base portion; a first weight that is spaced from a tip of at least one of the first and second drive vibrating arms toward the base portion and is provided in a first region of the at least one of the drive vibrating arms; and a second weight that is provided in a second region that is a region between a tip of the first weight and the tip of the at least one of the drive vibrating arms. When an area of the first region is represented as A1, a mass of the first weight is represented as B1, an area of the second region is represented as A2, and a mass of the second weight is represented as B2, B1/A1>B2/A2 is established.

Abstract translation: 振动元件包括从基部向相反方向延伸的一对第一和第二驱动振动臂; 所述第一重物与所述第一和第二驱动振动臂中的至少一个朝向所述基座部分的顶端间隔开并设置在所述至少一个所述驱动振动臂的第一区域中; 以及设置在作为所述第一配重的前端与所述至少一个所述驱动振动臂的前端之间的区域的第二区域中的第二配重。 当第一区域的区域表示为A1时，将第一重量的质量表示为B1，将第二区域的面积表示为A2，将第二重量的质量表示为B2，B1 / A1> B2 / A2建立。

公开(公告)号：US09331262B2

公开(公告)日：2016-05-03

申请号：US13898110

申请日：2013-05-20

Applicant: TDK CORPORATION

Inventor： Kazuhiko Maejima ,  Yasuhiro Aida ,  Yoshitomo Tanaka ,  Katsuyuki Kurachi ,  Hitoshi Sakuma

IPC: H01L41/187 ,  C04B35/00 ,  H01L41/08 ,  B41J2/14 ,  G01L9/00 ,  G11B5/55 ,  H01L41/316 ,  B41J2/16 ,  G01C19/5621 ,  G01C19/5628

CPC classification number: H01L41/0805 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1646 ,  B41J2202/03 ,  G01C19/5621 ,  G01C19/5628 ,  G01L9/008 ,  G11B5/483 ,  G11B5/5552 ,  H01L41/1873 ,  H01L41/316

Abstract: A thin film piezoelectric element according to the present invention includes a potassium sodium niobate thin film having a structure in which a plurality of crystal grains are present in a film thickness direction; and a pair of electrode films sandwiching the potassium sodium niobate thin film. When the potassium sodium niobate thin film is divided into three regions of the same thickness in the film thickness direction and average crystal grain sizes A1, A2, and A3 of the respective regions are determined, a ratio m/M of the smallest average crystal grain size m among A1, A2, and A3 to the largest average crystal grain size M among A1, A2, and A3 is 10% to 80%. The region having the smallest average crystal grain size m lies next to one of the pair of electrode films.

Abstract translation: 根据本发明的薄膜压电元件包括​​具有多个晶粒在膜厚度方向上存在的结构的铌酸钾钠薄膜; 和一对夹着铌酸钾钠薄膜的电极膜。 当铌酸钾薄膜在膜厚度方向上分为相同厚度的三个区域并确定各个区域的平均晶粒尺寸A1，A2和A3时，最小平均晶粒的比率m / M A1，A2和A3之间的尺寸m为A1，A2和A3之间的最大平均晶粒尺寸M为10％至80％。 具有最小平均晶粒尺寸m的区域紧邻该对电极膜中的一个。

公开(公告)号：US09329040B2

公开(公告)日：2016-05-03

申请号：US13608480

申请日：2012-09-10

Applicant: Fumio Ichikawa

Inventor： Fumio Ichikawa

IPC: G01C19/00 ,  G01C19/5628 ,  G01C19/5642

CPC classification number: G01C19/5628 ,  G01C19/5642 ,  Y10T29/42

Abstract: A sensor element has drive vibrating arms drive-vibrating by energization, adjustment vibrating arms vibrating with the drive vibrations of the drive vibrating arms, detection electrodes outputting charge in response to physical quantities applied to the drive vibrating arms, first electrodes provided on the adjustment vibrating arms, electrically connected to the detection electrodes, and outputting charge with the vibrations of the adjustment vibrating arms, and a pair of second electrodes provided on the adjustment vibrating arms, electrically connected to a pair of detection electrodes, and outputting charge having an opposite polarity to that of the first electrodes with the vibrations of the adjustment vibrating arms.

Abstract translation: 传感器元件具有通过通电而驱动振动的驱动振动臂，调节振动臂与驱动振动臂的驱动振动一起振动，检测电极响应于施加到驱动振动臂的物理量而输出电荷，设置在调节振动上的第一电极 臂，电连接到检测电极，并且输出电荷与调节振动臂的振动;以及一对第二电极，设置在调节振动臂上，电连接到一对检测电极，并输出具有相反极性的电荷 与第一电极的调节振动臂的振动。