公开(公告)号：US07523665B2

公开(公告)日：2009-04-28

申请号：US11653344

申请日：2007-01-16

申请人： Takashi Katsumata ,  Takeshi Ito ,  Hirofumi Higuchi ,  Mutsuhito Ogino ,  Tetsuya Morishima

发明人： Takashi Katsumata ,  Takeshi Ito ,  Hirofumi Higuchi ,  Mutsuhito Ogino ,  Tetsuya Morishima

IPC分类号： G01P15/125

CPC分类号： G01C19/5719

摘要： An angular velocity sensor includes first and second vibrators having a movable portion with driving and detecting purpose movable electrodes and a fixed portion with first and second side driving and detecting purpose fixed electrodes. The driving voltages applied to the first side driving purpose fixed electrode in the first vibrator is a first driving voltage including direct and alternating voltages. The driving voltage applied to the second side driving purpose fixed electrode in the first vibrator is a second driving voltage including direct and alternating voltages. At least one of the direct voltages, one of the alternating voltages, or one of duty ratios of the first and second driving voltages is controlled so that the first vibrator vibrates opposite to the second vibrator.

摘要翻译： 角速度传感器包括第一振动器和第二振动器，该第一振动器和第二振动器具有带有驱动和检测目的的可移动电极的可移动部分和具有第一和第二侧驱动和检测目的的固定电极的固定部分。 施加到第一振动器中的第一侧驱动用固定电极的驱动电压是包括直流和交流电压的第一驱动电压。 施加到第一振动器中的第二侧驱动用固定电极的驱动电压是包括直流和交流电压的第二驱动电压。 控制直流电压中的至少一个，交流电压之一或第一和第二驱动电压的占空比中的一个，使得第一振动器与第二振动器相反地振动。

公开(公告)号：US07318348B2

公开(公告)日：2008-01-15

申请号：US11216131

申请日：2005-09-01

申请人： Mutsuhito Ogino

发明人： Mutsuhito Ogino

IPC分类号： G01P9/04

CPC分类号： G01C19/5719

摘要： An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.

摘要翻译： 角速率传感器包括：基板; 能够沿第一方向振动的驱动用振动器; 以及能够沿第二方向振动的角速度检测用振动器。 当驱动用振动器沿第一方向振动时，传感器基于由科里奥利力引起的第二方向上的角速度检测用振动器的振动检测角速度，并且将角速度施加到 传感器在第三个方向。 角速度检测用振动器具有与第二方向一致的长度和与第一方向一起的宽度。 宽度和长度之间的比例等于或大于0.1。

公开(公告)号：US07546768B2

公开(公告)日：2009-06-16

申请号：US11907636

申请日：2007-10-16

申请人： Shunji Mase ,  Mutsuhito Ogino

发明人： Shunji Mase ,  Mutsuhito Ogino

IPC分类号： G01P1/02 ,  G01P9/04

CPC分类号： G01C19/5719

摘要： An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.

摘要翻译： 角速率传感器包括：基板; 能够沿第一方向振动的驱动用振动器; 以及能够沿第二方向振动的角速度检测用振动器。 当驱动用振动器沿第一方向振动时，传感器基于由科里奥利力引起的第二方向上的角速度检测用振动器的振动检测角速度，并且将角速度施加到 传感器在第三个方向。 角速度检测用振动器具有与第二方向一致的长度和与第一方向一起的宽度。 宽度和长度之间的比率等于或大于0.1。

公开(公告)号：US20060042383A1

公开(公告)日：2006-03-02

申请号：US11216131

申请日：2005-09-01

申请人： Mutsuhito Ogino ,  Shunji Mase

发明人： Mutsuhito Ogino ,  Shunji Mase

IPC分类号： G01P15/08

CPC分类号： G01C19/5719

摘要： An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.

摘要翻译： 角速率传感器包括：基板; 能够沿第一方向振动的驱动用振动器; 以及能够沿第二方向振动的角速度检测用振动器。 当驱动用振动器沿第一方向振动时，传感器基于由科里奥利力引起的第二方向上的角速度检测用振动器的振动检测角速度，并且将角速度施加到 传感器在第三个方向。 角速度检测用振动器具有与第二方向一致的长度和与第一方向一起的宽度。 宽度和长度之间的比率等于或大于0.1。