公开(公告)号：US07546768B2

公开(公告)日：2009-06-16

申请号：US11907636

申请日：2007-10-16

申请人： Shunji Mase ,  Mutsuhito Ogino

发明人： Shunji Mase ,  Mutsuhito Ogino

IPC分类号： G01P1/02 ,  G01P9/04

CPC分类号： G01C19/5719

摘要： An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.

摘要翻译： 角速率传感器包括：基板; 能够沿第一方向振动的驱动用振动器; 以及能够沿第二方向振动的角速度检测用振动器。 当驱动用振动器沿第一方向振动时，传感器基于由科里奥利力引起的第二方向上的角速度检测用振动器的振动检测角速度，并且将角速度施加到 传感器在第三个方向。 角速度检测用振动器具有与第二方向一致的长度和与第一方向一起的宽度。 宽度和长度之间的比率等于或大于0.1。

公开(公告)号：US20060042383A1

公开(公告)日：2006-03-02

申请号：US11216131

申请日：2005-09-01

申请人： Mutsuhito Ogino ,  Shunji Mase

发明人： Mutsuhito Ogino ,  Shunji Mase

IPC分类号： G01P15/08

CPC分类号： G01C19/5719

摘要： An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.

摘要翻译： 角速率传感器包括：基板; 能够沿第一方向振动的驱动用振动器; 以及能够沿第二方向振动的角速度检测用振动器。 当驱动用振动器沿第一方向振动时，传感器基于由科里奥利力引起的第二方向上的角速度检测用振动器的振动检测角速度，并且将角速度施加到 传感器在第三个方向。 角速度检测用振动器具有与第二方向一致的长度和与第一方向一起的宽度。 宽度和长度之间的比率等于或大于0.1。

公开(公告)号：US07466119B2

公开(公告)日：2008-12-16

申请号：US11500303

申请日：2006-08-08

申请人： Hajime Ito ,  Shunji Mase ,  Takao Tsuruhara

发明人： Hajime Ito ,  Shunji Mase ,  Takao Tsuruhara

IPC分类号： G01D1/14 ,  G01R27/08

CPC分类号： G01D3/08 ,  G01C19/5726 ,  G01C19/5776 ,  G01P21/00

摘要： A sensor circuit includes an AC component pickup circuit and first and second adder circuits or first and second high-pass filters, and specifies a range of normal voltages by an upper-limit voltage formed by adding an upper-limit threshold value to the AC component in the input voltage and by a lower-limit voltage formed by adding a lower-limit threshold value to the AC component in the input voltage. An abnormal offset voltage is detected by judging whether the output voltage of an inverting amplifier circuit is lying in the range of normal voltages.

摘要翻译： 传感器电路包括AC分量拾取电路和第一和第二加法器电路或第一和第二高通滤波器，并且通过将上限阈值与AC分量相加形成的上限电压来指定正常电压的范围 在输入电压和通过向输入电压中的AC分量增加下限阈值而形成的下限电压。 通过判断反相放大器电路的输出电压是否处于正常电压的范围来检测异常偏移电压。

公开(公告)号：US20080060437A1

公开(公告)日：2008-03-13

申请号：US11907636

申请日：2007-10-16

申请人： Shunji Mase

发明人： Shunji Mase

IPC分类号： G01C19/56

CPC分类号： G01C19/5719

摘要： An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.

公开(公告)号：US07292021B2

公开(公告)日：2007-11-06

申请号：US11245453

申请日：2005-10-07

申请人： Takao Tsuruhara ,  Hajime Ito ,  Shunji Mase

发明人： Takao Tsuruhara ,  Hajime Ito ,  Shunji Mase

IPC分类号： G01R13/14 ,  G01P3/44 ,  G01P9/00 ,  G01P15/08

CPC分类号： G01C19/5649

摘要： In an anomaly detector that detects an abnormal condition of an oscillation signal of a circuit such as a vibratory sensing circuit, the oscillation signal, having AC and DC components, is converted to a pair of first and second signals of either opposite-polarity DC amplitudes or opposite-phase alternating amplitudes. The first and second signals are combined to cancel the AC component of the oscillation signal to detect the DC component. The DC component is then compared with the upper and lower thresholds of a decision range to produce an alarm if the DC component goes outside the decision range. In one embodiment, the first and second signals are produced by detecting positive and negative peak values of the oscillation signal at intervals. In a second embodiment, the first signal is produced by high-pass filtering the oscillation signal as a replica of the AC component and the second signal is the oscillation signal itself.

摘要翻译： 在检测振动检测电路等电路的振荡信号的异常状态的异常检测器中，将具有AC，DC成分的振荡信号转换为相反极性的DC振幅的一对第一和第二信号 或反相交变振幅。 组合第一和第二信号以消除振荡信号的AC分量以检测DC分量。 然后将DC分量与决策范围的上限和下限阈值进行比较，以在DC分量超出决策范围时产生报警。 在一个实施例中，通过以间隔检测振荡信号的正和负峰值来产生第一和第二信号。 在第二实施例中，第一信号是通过对作为AC分量的复制品的振荡信号进行高通滤波而产生的，第二信号是振荡信号本身。

公开(公告)号：US20060077013A1

公开(公告)日：2006-04-13

申请号：US11245453

申请日：2005-10-07

申请人： Takao Tsuruhara ,  Hajime Ito ,  Shunji Mase

发明人： Takao Tsuruhara ,  Hajime Ito ,  Shunji Mase

IPC分类号： H03B1/00

CPC分类号： G01C19/5649

摘要： In an anomaly detector that detects an abnormal condition of an oscillation signal of a circuit such as a vibratory sensing circuit, the oscillation signal, having AC and DC components, is converted to a pair of first and second signals of either opposite-polarity DC amplitudes or opposite-phase alternating amplitudes. The first and second signals are combined to cancel the AC component of the oscillation signal to detect the DC component. The DC component is then compared with the upper and lower thresholds of a decision range to produce an alarm if the DC component goes outside the decision range. In one embodiment, the first and second signals are produced by detecting positive and negative peak values of the oscillation signal at intervals. In a second embodiment, the first signal is produced by high-pass filtering the oscillation signal as a replica of the AC component and the second signal is the oscillation signal itself.

摘要翻译： 在检测振动检测电路等电路的振荡信号的异常状态的异常检测器中，将具有AC，DC成分的振荡信号转换为相反极性的DC振幅的一对第一和第二信号 或反相交变振幅。 组合第一和第二信号以消除振荡信号的AC分量以检测DC分量。 然后将DC分量与决策范围的上限和下限阈值进行比较，以在DC分量超出决策范围时产生报警。 在一个实施例中，通过以间隔检测振荡信号的正和负峰值来产生第一和第二信号。 在第二实施例中，第一信号是通过对作为AC分量的复制品的振荡信号进行高通滤波而产生的，第二信号是振荡信号本身。

公开(公告)号：US20050217375A1

公开(公告)日：2005-10-06

申请号：US11085109

申请日：2005-03-22

申请人： Shunji Mase

发明人： Shunji Mase

IPC分类号： G01P21/02 ,  G01C19/00 ,  G01C19/56 ,  G01P15/08 ,  G01P15/097 ,  G01P15/125 ,  G01P21/00

CPC分类号： G01C19/5719 ,  G01P15/125

摘要： In a sensor system, a detection waveform-forming unit detects a vibration component and forms a waveform of a detected angular velocity based on the vibration component. Components of the waveform are of opposite phases relative to each other and acceleration waveform components are in phase relative to each other. An acceleration signal-forming unit operates on the waveform to cancel the waveform of opposite phases to each other, and produces a second kind acceleration signal. An abnormal condition-detecting unit detects an abnormal condition in either the angular velocity sensor unit or an acceleration sensor unit provided separately based on the second kind acceleration signal and a first kind acceleration signal.

摘要翻译： 在传感器系统中，检测波形形成单元检测振动分量，并且基于振动分量形成检测到的角速度的波形。 波形的分量相对于彼此具有相反的相位，并且加速度波形分量相对于彼此相位。 加速度信号形成单元对波形进行动作以抵消相反相位的波形，并产生第二种加速度信号。 异常状态检测单元基于第二种加速度信号和第一种加速度信号来检测角速度传感器单元或单独提供的加速度传感器单元中的异常状况。

公开(公告)号：US08547119B2

公开(公告)日：2013-10-01

申请号：US12923539

申请日：2010-09-28

申请人： Toshio Ikuta ,  Shunji Mase ,  Seiya Ide

发明人： Toshio Ikuta ,  Shunji Mase ,  Seiya Ide

IPC分类号： G01R27/26

CPC分类号： G01L9/12 ,  G01D5/24 ,  G01P15/125

摘要： A dynamic quantity detection device includes a detection portion, a signal process portion, and an operation mode switch portion. The detection portion detects a dynamic quantity applied from an outside and generates a sensor signal in accordance with the dynamic quantity. The signal process portion processes the sensor signal from the detection portion to have a property suitable for an external device. When the sensor signal output from the detection portion is less than or equal to a predetermined threshold value, the operation mode switch portion sets an operation mode to a power save mode by stopping an operation of the signal process portion. When the sensor signal output from the detection portion is greater than the predetermined threshold value, the operation mode switch portion switches the operation mode to a normal mode by activating the signal process portion.

摘要翻译： 动态量检测装置包括检测部分，信号处理部分和操作模式切换部分。 检测部分检测从外部施加的动态量，并根据动态量生成传感器信号。 信号处理部分处理来自检测部分的传感器信号具有适于外部设备的特性。 当从检测部分输出的传感器信号小于或等于预定阈值时，操作模式切换部分通过停止信号处理部分的操作将操作模式设置为省电模式。 当从检测部分输出的传感器信号大于预定阈值时，操作模式切换部分通过激活信号处理部分将操作模式切换到正常模式。

公开(公告)号：US20110109330A1

公开(公告)日：2011-05-12

申请号：US12923539

申请日：2010-09-28

申请人： Toshio Ikuta ,  Shunji Mase ,  Seiya Ide

发明人： Toshio Ikuta ,  Shunji Mase ,  Seiya Ide

IPC分类号： G01R27/26 ,  G01P15/125 ,  H04B1/04

CPC分类号： G01L9/12 ,  G01D5/24 ,  G01P15/125

摘要： A dynamic quantity detection device includes a detection portion, a signal process portion, and an operation mode switch portion. The detection portion detects a dynamic quantity applied from an outside and generates a sensor signal in accordance with the dynamic quantity. The signal process portion processes the sensor signal from the detection portion to have a property suitable for an external device. When the sensor signal output from the detection portion is less than or equal to a predetermined threshold value, the operation mode switch portion sets an operation mode to a power save mode by stopping an operation of the signal process portion. When the sensor signal output from the detection portion is greater than the predetermined threshold value, the operation mode switch portion switches the operation mode to a normal mode by activating the signal process portion.

摘要翻译： 动态量检测装置包括检测部分，信号处理部分和操作模式切换部分。 检测部分检测从外部施加的动态量，并根据动态量生成传感器信号。 信号处理部分处理来自检测部分的传感器信号具有适于外部设备的特性。 当从检测部分输出的传感器信号小于或等于预定阈值时，操作模式切换部分通过停止信号处理部分的操作将操作模式设置为省电模式。 当从检测部分输出的传感器信号大于预定阈值时，操作模式切换部分通过激活信号处理部分将操作模式切换到正常模式。

公开(公告)号：US20060197173A1

公开(公告)日：2006-09-07

申请号：US11365606

申请日：2006-03-02

申请人： Shunji Mase

发明人： Shunji Mase

IPC分类号： H01L31/00

CPC分类号： G01C19/5719 ,  B81B3/0078 ,  B81B2201/0235

摘要： A movable sensor device includes a laminate body in which a micromechanical acting layer having a movable sensor structure and a coating layer coated on the micromechanical acting layer is successively laminated on a substrate. A draft portion penetrates through the laminate body in the lamination direction. The draft portion and a residual portion thereof are disposed at a peripheral portion of the movable sensor structure in the laminate body. The residual portion is a thin portion that is smaller in thickness than the laminate body and has a spring function.

摘要翻译： 可移动传感器装置包括层压体，其中具有可移动传感器结构的微机械作用层和涂覆在微机械作用层上的涂层依次层压在基板上。 牵伸部分在层叠体上穿过层叠体。 牵伸部分及其残留部分设置在层叠体中的可移动传感器结构的周边部分。 剩余部分是厚度小于层压体的薄部分并且具有弹簧功能。